US5597442A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Chemical/mechanical planarization (CMP) endpoint method using measurement of polishing pad temperature
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1995-10-16
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Granted: 1997-01-28
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Expires: 2015-10-16
Abstract
Abstract An improved and new process for chemical/mechanical planarization (CMP) of a substrate surface, wherein the endpoint for the planarization process is detected by monitoring the temperature of the polishing pad with an infrared temperature measuring device, has been developed. The method allows endpoint to be detected in-situ at the polishing apparatus, without necessity to unload the substrate for visual inspection or performance of specialized, time-consuming, and costly thickness and/or surface topography measurements.
Inventors
- 👤 Hsi-Chieh Chen
- 👤 Shun-Liang Hsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 16:30
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/015; B24B49/00; B24B49/12; G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0683; G01B11/30; G01B11/303; H; H10; H10P; H10P95/00; H10P95/06; H10P95/062
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
114 words
A method of chemical/mechanical planarization (CMP) of an article comprising: planarizing the article by holding the article on a rotating platen against a rotating polishing pad in the presence of a polishing slurry; controlling the temperature of the polishing slurry in the temperature range between about 20° to 22° C.; dispensing said temperature controlled slurry onto said rotating polishing pad; measuring by infrared detection means the temperature of said polishing pad at a selected polishing pad location which is abrading the surface of said article; and terminating the planarization process when said polishing pad temperature decreases by at least 2° C. below the maximum temperature reached by said polishing pad during the planarization process.
Claim 2
Independent Claim
114 words
A method of chemical/mechanical planarization (CMP) of an article comprising: planarizing the article by holding the article on a rotating platen against a rotating polishing pad in the presence of a polishing slurry; controlling the temperature of the polishing slurry in the temperature range between about 20° to 22° C.; dispensing said temperature controlled slurry onto said rotating polishing pad; measuring by infrared detection means the temperature of said polishing pad at a selected polishing pad location which is abrading the surface of said article; and terminating the planarization process when said polishing pad temperature decreases by at least 2° C. below the maximum temperature reached by said polishing pad during the planarization process.
Claim 3
Dependent Claim
12 words
The method of claim 1, wherein said article is a semiconductor wafer.
Claim 4
Dependent Claim
15 words
The method of claim 2, wherein said semiconductor wafer is coated with an oxide layer.
Claim 5
Dependent Claim
24 words
The method of claim 1, wherein said polishing slurry comprises silica and KOH, controlled in the temperature range between about 20° to 22° C.
Claim 6
Dependent Claim
24 words
The method of claim 1, wherein said temperature of said polishing pad is measured in the temperature range between about 30° to 50° C.
Claim 7
Dependent Claim
20 words
The method of claim 1, wherein said temperature of said polishing pad is measured by an infrared temperature detecting device.
Claim 8
Independent Claim
158 words
A method for fabricating a planarized layer of dielectric material on a semiconductor substrate containing a structure, comprising the steps of: providing said structure on said semiconductor substrate; depositing a layer of dielectric material onto said semiconductor substrate containing said structure; planarizing said layer of dielectric material by holding said semiconductor substrate on a rotating platen against a rotating polishing pad in the presence of a polishing slurry and applied pressure between the platen and polishing pad; controlling the temperature of the polishing slurry in the temperature range between about 20° to 22° C.; dispensing the temperature controlled slurry into the rotating polishing pad; measuring by infrared detection means the temperature of the polishing pad at a location which is abrading the surface of said layer of dielectric material; and terminating the planarizing process when said polishing pad temperature decreases by at least 2° C. below the maximum temperature reached by said polishing pad during the planarization process.
Claim 9
Independent Claim
158 words
A method for fabricating a planarized layer of dielectric material on a semiconductor substrate containing a structure, comprising the steps of: providing said structure on said semiconductor substrate; depositing a layer of dielectric material onto said semiconductor substrate containing said structure; planarizing said layer of dielectric material by holding said semiconductor substrate on a rotating platen against a rotating polishing pad in the presence of a polishing slurry and applied pressure between the platen and polishing pad; controlling the temperature of the polishing slurry in the temperature range between about 20° to 22° C.; dispensing the temperature controlled slurry into the rotating polishing pad; measuring by infrared detection means the temperature of the polishing pad at a location which is abrading the surface of said layer of dielectric material; and terminating the planarizing process when said polishing pad temperature decreases by at least 2° C. below the maximum temperature reached by said polishing pad during the planarization process.
Claim 10
Dependent Claim
12 words
The method of claim 7, wherein said structure is an active device.
Claim 11
Dependent Claim
15 words
The method of claim 7, wherein said structure is an interconnection pattern of conducting material.
Claim 12
Dependent Claim
19 words
The method of claim 7, wherein said structure comprises both active devices and an interconnection pattern of conducting material.
Claim 13
Dependent Claim
16 words
The method of claim 8, wherein said active device is a NFET or PFET MOS device.
Claim 14
Dependent Claim
23 words
The method of claim 9, wherein said interconnection pattern of conducting material, is aluminum having a thickness between about 4000 to 12,000 Angstroms.
Claim 15
Dependent Claim
47 words
The method of claim 7, wherein said layer of dielectric material is silicon oxide deposited using PECVD processing, at a temperature between about 300° to 500° C., to a thickness between about 15,000 to 30,000 Angstroms, using TEOS at a flow between about 100 to 1000 sccm.
Claim 16
Dependent Claim
24 words
The method of claim 7, wherein said polishing slurry comprises silica and KOH, controlled in the temperature range between about 20° to 22° C.
Claim 17
Dependent Claim
21 words
The method of claim 7, wherein said rotating polishing pad is rotated in a range between about 30 to 80 rpm.
Claim 18
Dependent Claim
20 words
The method of claim 7, wherein said rotating platen is rotated in a range between about 5 to 30 rpm.
Claim 19
Dependent Claim
25 words
The method of claim 7, wherein said applied pressure between the platen and polishing pad is in a range between about 6 to 12 psi.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-01-28 | 2000-07-29 | 2001-01-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-01-28 | 2004-07-29 | 2005-01-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-01-28 | 2008-07-29 | 2009-01-28 | $7700.00 | Window Closed / Lapsed |