US5244527A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Manufacturing unit for semiconductor devices
Assignee: NEC Electronics Corp
•
Filing: 1992-07-13
•
Granted: 1993-09-14
•
Expires: 2012-07-13
Abstract
Abstract A sensor for detecting the end point of etching is secured to a wafer chuck and a light projector and light receiver of an infrared photosensor which is used as the sensor for detecting the end point for aluminum etching rotates in synchronization with the rotation of a wafer during the etching process and the end point of etching is judged by a judgement circuit which receives a signal from the sensor for detecting the etching end point. In a spin etcher for the wafer, the sensor constantly monitors the same location on the wafer and thus prevents misjudgment of the end point of etching by an unstable waveform of the end-point detection signal.
Inventors
- 👤 Nobuaki Aoyagi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 12:50
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0604; B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; B24B49/00; B24B49/16; C; C23; C23F; C23F1/00; C23F1/02
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
98 words
A manufacturing unit for semiconductor devices which includes a rotation mechanism that secures a semiconductor wafer and rotates it and a mechanism that applies an etching solution used for etching a thin metallic film formed on the surface of said wafer, which is on said rotation mechanism, comprising a sensor for detecting the end point of etching that is secured to said rotation mechanism and rotates in synchronization with the rotation of said wafer, and a circuit for judging the end point of etching using an electrical signal from said sensor for detecting the end point of etching.
Claim 2
Dependent Claim
98 words
A manufacturing unit for semiconductor devices which includes a rotation mechanism that secures a semiconductor wafer and rotates it and a mechanism that applies an etching solution used for etching a thin metallic film formed on the surface of said wafer, which is on said rotation mechanism, comprising a sensor for detecting the end point of etching that is secured to said rotation mechanism and rotates in synchronization with the rotation of said wafer, and a circuit for judging the end point of etching using an electrical signal from said sensor for detecting the end point of etching.
Claim 3
Dependent Claim
29 words
The manufacturing unit as defined in claim 1 which further comprises a balancing means for balancing the weight of said sensor to stabilize the rotation of said rotation mechanism.
Claim 4
Dependent Claim
46 words
The manufacturing unit as defined in claim 2 which further comprises a sensor positioning mechanism for adjusting the location of a light projector of said sensor and that of a light receiver thereof and a mechanism for positioning said balancing means corresponding to the sensor adjustment.
Claim 5
Dependent Claim
23 words
The manufacturing unit as defined in claim 2 which further comprises a photoresist pattern formation section for detecting the end point of etching.
Claim 6
Dependent Claim
18 words
The manufacturing unit as defined in claim 1 wherein said thin metallic film is a thin aluminum film.
Claim 7
Dependent Claim
146 words
A manufacturing unit for semiconductor devices which includes a rotation mechanism having a wafer chuck on which a semiconductor wafer is secured and a spin motor for rotating said wafer chuck, and a spray nozzle for applying an etching solution used for etching a thin metallic film formed on the surface of said wafer, which is on said rotation mechanism, comprising a sensor for detecting the end point of etching which includes a photoelectric element and a light projector and a light receiver each being connected to said element through an optical fiber cable, said sensor being secured to said rotation mechanism and rotating in synchronization with the rotation of said wafer, a balancer for balancing the weight of said sensor to stabilize the rotation of said rotation mechanism, and a circuit for judging the end point of etching using an electrical signal from said sensor.
Claim 8
Dependent Claim
146 words
A manufacturing unit for semiconductor devices which includes a rotation mechanism having a wafer chuck on which a semiconductor wafer is secured and a spin motor for rotating said wafer chuck, and a spray nozzle for applying an etching solution used for etching a thin metallic film formed on the surface of said wafer, which is on said rotation mechanism, comprising a sensor for detecting the end point of etching which includes a photoelectric element and a light projector and a light receiver each being connected to said element through an optical fiber cable, said sensor being secured to said rotation mechanism and rotating in synchronization with the rotation of said wafer, a balancer for balancing the weight of said sensor to stabilize the rotation of said rotation mechanism, and a circuit for judging the end point of etching using an electrical signal from said sensor.
Claim 9
Dependent Claim
41 words
The manufacturing unit as defined in claim 6 which further comprises a sensor positioning mechanism for adjusting the location of said light projector and that of said light receiver and a mechanism for positioning said balancer corresponding to the sensor adjustment.
Claim 10
Dependent Claim
23 words
The manufacturing unit as defined in claim 6 which further comprises a photoresist pattern formation section for detecting the end point of etching.
Claim 11
Dependent Claim
18 words
The manufacturing unit as defined in claim 6 wherein said thin metallic film is a thin aluminum film.
References Cited (Backward Citations)
US5032217A
Cited
US5069002A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-09-13 | 1997-03-15 | 1997-09-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-09-13 | 2001-03-15 | 2001-09-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-09-13 | 2005-03-15 | 2005-09-14 | $7700.00 | Window Closed / Lapsed |