US5596239A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Enhanced quality factor resonator
Assignee: CTS Corp
•
Filing: 1995-06-29
•
Granted: 1997-01-21
•
Expires: 2015-06-29
Abstract
Abstract A high quality factor resonator (15) including a substrate (110) and a resonator layer (150). The resonator layer includes a first electrode (157). The resonator layer (150) is disposed on a surface of the substrate (110). The first electrode (157) is disposed on a distal surface of the resonator layer (150). A cavity (120) is disposed between the substrate (110) and the resonator layer (150) and a second electrode (159) is disposed on the substrate (110) and on a surface of the cavity (120) remote from the resonator layer (150) and is separated from the resonator layer (150) by a thin gap.
Inventors
- 👤 Michael Dydyk
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 22:50
CPC Classifications
H; H03; H03H; H03H3/00; H03H3/007; H03H3/02; H03H3/04; H03H9/00; H03H9/02; H03H9/02007; H03H9/02086; H03H9/02102; H03H9/15; H03H9/17; H03H9/171; H03H9/172; H03H9/173; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
100 words
A high quality factor resonator comprising: a substrate having a surface; a resonator layer having first and second surfaces and including a first electrode, said resonator layer disposed on said surface, said first electrode disposed on said first surface of said resonator layer, said first surface being more remote from said substrate than said second surface; a cavity disposed between said substrate and said resonator layer; and a second electrode disposed on said substrate and on a surface of said cavity remote from said resonator layer, wherein said second electrode is separated from said resonator layer by a thin gap.
Claim 2
Dependent Claim
100 words
A high quality factor resonator comprising: a substrate having a surface; a resonator layer having first and second surfaces and including a first electrode, said resonator layer disposed on said surface, said first electrode disposed on said first surface of said resonator layer, said first surface being more remote from said substrate than said second surface; a cavity disposed between said substrate and said resonator layer; and a second electrode disposed on said substrate and on a surface of said cavity remote from said resonator layer, wherein said second electrode is separated from said resonator layer by a thin gap.
Claim 3
Dependent Claim
18 words
A high quality factor resonator as claimed in claim 1, wherein said resonator layer comprises a single-crystal material.
Claim 4
Dependent Claim
22 words
A high quality factor resonator as claimed in claim 1, wherein said resonator layer comprises lithium niobate, lithium tantalate or lithium tetraborate.
Claim 5
Dependent Claim
23 words
A high quality factor resonator as claimed in claim 1, wherein said resonator layer comprises single-crystal lithium niobate, lithium tantalate or lithium tetraborate.
Claim 6
Dependent Claim
16 words
A high quality factor resonator as claimed in claim 1, wherein said first electrode includes aluminum.
Claim 7
Dependent Claim
16 words
A high quality factor resonator as claimed in claim 1, wherein first electrode is substantially circular.
Claim 8
Dependent Claim
21 words
A high quality factor resonator as claimed in claim 1, wherein said substrate includes a semiconductor substrate comprising an integrated circuit.
Claim 9
Dependent Claim
16 words
A high quality factor resonator as claimed in claim 1, wherein said second electrode comprises gold.
Claim 10
Dependent Claim
19 words
A high quality factor resonator as claimed in claim 1, wherein said resonator layer is welded to said substrate.
Claim 11
Dependent Claim
70 words
A high quality factor resonator comprising: a substrate comprising a semiconductor material and including an integrated circuit; a resonator layer comprising a piezoelectric material and including a first electrode, said resonator layer disposed on a first surface of said substrate; a cavity disposed between said substrate and said resonator layer; and a second electrode disposed on said substrate and on a surface of said cavity remote from said resonator layer.
Claim 12
Dependent Claim
70 words
A high quality factor resonator comprising: a substrate comprising a semiconductor material and including an integrated circuit; a resonator layer comprising a piezoelectric material and including a first electrode, said resonator layer disposed on a first surface of said substrate; a cavity disposed between said substrate and said resonator layer; and a second electrode disposed on said substrate and on a surface of said cavity remote from said resonator layer.
Claim 13
Dependent Claim
32 words
A high quality factor resonator as claimed in claim 10, wherein: said resonator layer comprises single-crystal lithium niobate, lithium tantalate or lithium tetraborate; and said resonator layer is welded to said substrate.
References Cited (Backward Citations)
US2266070A
Cited
US2807731A
Cited
US3414832A
Cited
US3313959A
Cited
US4166967A
Cited
SU980252A1
Cited
JPS58137319A
Cited
US4456850A
Cited
JPS6072277A
Cited
US4556812A
Cited
US4502932A
Cited
US4640756A
Cited
US4616152A
Cited
US4642508A
Cited
JPS6141215A
Cited
US4672591A
Cited
US4719383A
Cited
US4749900A
Cited
US5011568A
Cited
US5075641A
Cited
US5162691A
Cited
US5198716A
Cited
US5373268A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-01-21 | 2000-07-22 | 2001-01-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-01-21 | 2004-07-22 | 2005-01-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-01-21 | 2008-07-22 | 2009-01-21 | $7700.00 | Window Closed / Lapsed |