US5596204A
Expired / Lapsed
US
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Method for aligning processing areas on a substrate with a predetermined position in a static coordinate system
Assignee: Nikon Corp
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Filing: 1994-04-05
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Granted: 1997-01-21
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Expires: 2014-04-05
Abstract
Abstract Measured is a coordinate position, on a static coordinate system, of each of some specified areas selected from a plurality of areas on a substrate. The coordinate positions of some specified areas undergo a weighted averaging process by use of such a weight that it decreases with a larger distance between the specified areas. The coordinate position is thereby smoothed per specified area. The weight is given to each of some smoothed coordinate positions, and, thereafter, a statistic calculation is effected. The coordinate position, on the static coordinate system, of the area on the substrate is thereby obtained. The substrate is sequentially located based on the obtained coordinate position, and each area on the substrate is thus aligned to a predetermined position.
Inventors
- 👤 Nobuyuki Irie
- 👤 Shigeru Hirukawa
- 👤 Hiroki Tateno
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 19:46
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
192 words
A method of aligning each of a plurality of processing areas on each of a plurality of substrates with a predetermined position in a static coordinate system for defining movement of the substrates, comprising: obtaining a state of distortion of a K-th substrate, where K is an integer; weighting respective coordinate positions of a group of specified areas selected from a plurality of processing areas on said K-th substrate in accordance with the state of distortion of the K-th substrate; aligning each of the plurality of processing areas on said K-th substrate with said predetermined position; obtaining a state of distortion of a (K+N)-th substrate, where N is an integer; examining a correlation between the state of distortion of said K-th substrate and the state of distortion of said (K+N)-th substrate; weighting, if the correlation is high, each of respective coordinate positions of a group of specified areas selected from a plurality of processing areas on said (K+N)-th substrate the same as corresponding coordinate positions of the group of specified areas of the K-th substrate; and aligning each of the plurality of processing areas on said (K+N)-th substrate with said predetermined position.
Claim 2
Independent Claim
192 words
A method of aligning each of a plurality of processing areas on each of a plurality of substrates with a predetermined position in a static coordinate system for defining movement of the substrates, comprising: obtaining a state of distortion of a K-th substrate, where K is an integer; weighting respective coordinate positions of a group of specified areas selected from a plurality of processing areas on said K-th substrate in accordance with the state of distortion of the K-th substrate; aligning each of the plurality of processing areas on said K-th substrate with said predetermined position; obtaining a state of distortion of a (K+N)-th substrate, where N is an integer; examining a correlation between the state of distortion of said K-th substrate and the state of distortion of said (K+N)-th substrate; weighting, if the correlation is high, each of respective coordinate positions of a group of specified areas selected from a plurality of processing areas on said (K+N)-th substrate the same as corresponding coordinate positions of the group of specified areas of the K-th substrate; and aligning each of the plurality of processing areas on said (K+N)-th substrate with said predetermined position.
Claim 3
Dependent Claim
62 words
A method according to claim 1, further comprising: obtaining, if the correlation is high, a relative rotational deviation between the state of distortion of said K-th substrate and that of said (K+N)-th substrate; and weighting each of the coordinate positions of the group of specified areas selected from said plurality of processing areas on said (K+N)-th substrate based on the rotational deviation.
Claim 4
Independent Claim
139 words
A method of aligning each of a plurality of processing areas on a substrate with a predetermined position in a static coordinate system for defining movement of said substrate, comprising: obtaining a non-linear error in at least a part of said plurality of processing areas; measuring a coordinate position, in said static coordinate system, of each of a group of specified areas selected from said plurality of processing areas; weighting the coordinate positions of each of said group of specified areas based on the obtained non-linear error and performing a statistical calculation using the weighted coordinate positions to obtain a calculated coordinate position, in said static coordinate system, of each of said plurality of processing areas on said substrate; and aligning each of said plurality of processing areas with said predetermined position based on the corresponding calculated coordinate position.
Claim 5
Independent Claim
139 words
A method of aligning each of a plurality of processing areas on a substrate with a predetermined position in a static coordinate system for defining movement of said substrate, comprising: obtaining a non-linear error in at least a part of said plurality of processing areas; measuring a coordinate position, in said static coordinate system, of each of a group of specified areas selected from said plurality of processing areas; weighting the coordinate positions of each of said group of specified areas based on the obtained non-linear error and performing a statistical calculation using the weighted coordinate positions to obtain a calculated coordinate position, in said static coordinate system, of each of said plurality of processing areas on said substrate; and aligning each of said plurality of processing areas with said predetermined position based on the corresponding calculated coordinate position.
Claim 6
Independent Claim
159 words
A method of aligning each of a plurality of processing areas on a substrate with a predetermined position in a static coordinate system for defining a moving position of the substrate, said method comprising: measuring a coordinate position, in the static coordinate system, of each of a group of specified areas selected from said plurality of processing areas; adding at least one virtual specified area outwardly of said substrate or inwardly of said substrate that is not in said group of specified areas; estimating a coordinate position, in the static coordinate system, of said virtual specified area based on the measured coordinate positions; obtaining a calculated coordinate position, in the static coordinate system, of each of said plurality of processing areas on said substrate by performing a statistical calculation using said measured coordinate positions and said estimated coordinate position; and aligning each of said plurality of processing areas with said predetermined position based on the corresponding calculated coordinate position.
Claim 7
Independent Claim
159 words
A method of aligning each of a plurality of processing areas on a substrate with a predetermined position in a static coordinate system for defining a moving position of the substrate, said method comprising: measuring a coordinate position, in the static coordinate system, of each of a group of specified areas selected from said plurality of processing areas; adding at least one virtual specified area outwardly of said substrate or inwardly of said substrate that is not in said group of specified areas; estimating a coordinate position, in the static coordinate system, of said virtual specified area based on the measured coordinate positions; obtaining a calculated coordinate position, in the static coordinate system, of each of said plurality of processing areas on said substrate by performing a statistical calculation using said measured coordinate positions and said estimated coordinate position; and aligning each of said plurality of processing areas with said predetermined position based on the corresponding calculated coordinate position.
Claim 8
Independent Claim
169 words
A method of aligning each of a plurality of processing areas on a substrate with a predetermined position in a static coordinate system for defining a moving position of the substrate, said method comprising: measuring a coordinate position, in the static coordinate system, of each of a group of specified areas selected from said plurality of processing areas; smoothing the coordinate position of each of said group of specified areas by weight-averaging each of the coordinate positions of said group of specified areas; selecting one of said plurality of processing areas as an area to be aligned and weighting each of the smoothed coordinate positions in accordance with a positional relationship between the area to be aligned and each of said group of specified areas and performing a statistical calculation using said weighted coordinate positions to obtain a calculated coordinate position, in said static coordinate system, of said area to be aligned; and aligning said area to be aligned with said predetermined position based on the calculated coordinate position.
Claim 9
Independent Claim
169 words
A method of aligning each of a plurality of processing areas on a substrate with a predetermined position in a static coordinate system for defining a moving position of the substrate, said method comprising: measuring a coordinate position, in the static coordinate system, of each of a group of specified areas selected from said plurality of processing areas; smoothing the coordinate position of each of said group of specified areas by weight-averaging each of the coordinate positions of said group of specified areas; selecting one of said plurality of processing areas as an area to be aligned and weighting each of the smoothed coordinate positions in accordance with a positional relationship between the area to be aligned and each of said group of specified areas and performing a statistical calculation using said weighted coordinate positions to obtain a calculated coordinate position, in said static coordinate system, of said area to be aligned; and aligning said area to be aligned with said predetermined position based on the calculated coordinate position.
Claim 10
Independent Claim
110 words
A method of aligning each of a plurality of processing areas on a substrate with a predetermined position in a static coordinate system for defining a moving position of the substrate, said method comprising: measuring a coordinate position, in the static coordinate system, of each of a group of specified areas selected from said plurality of processing areas; estimating a coordinate position, in said static coordinate system, of each of said plurality of processing areas on said substrate by weight-averaging the respective coordinate positions of said group of specified areas; and aligning each of said plurality of processing areas with said predetermined position based on the corresponding estimated coordinate position.
Claim 11
Independent Claim
110 words
A method of aligning each of a plurality of processing areas on a substrate with a predetermined position in a static coordinate system for defining a moving position of the substrate, said method comprising: measuring a coordinate position, in the static coordinate system, of each of a group of specified areas selected from said plurality of processing areas; estimating a coordinate position, in said static coordinate system, of each of said plurality of processing areas on said substrate by weight-averaging the respective coordinate positions of said group of specified areas; and aligning each of said plurality of processing areas with said predetermined position based on the corresponding estimated coordinate position.
Claim 12
Dependent Claim
28 words
A method according to claim 4, further comprising: exposing each of said plurality of processing areas aligned with said predetermined position with a pattern image of a mask.
Claim 13
Dependent Claim
23 words
A method according to claim 5, further comprising: exposing said area aligned with said predetermined position with a pattern image of a mask.
Claim 14
Dependent Claim
67 words
A method according to claim 5, wherein said smoothing includes, when smoothing the coordinate position of one of said group of specified areas, weighting each of the coordinate positions of said group of specified areas based on the distance between the one specified area and each of the other specified areas and weight-averaging the weighted coordinate positions, thereby smoothing the coordinate position of said one specified area.
Claim 15
Dependent Claim
70 words
A method according to claim 5, wherein said smoothing includes, when smoothing the coordinate position of one of said group of specified areas, weighting each of the coordinate positions of said group of specified areas based on a positional relationship between said area to be aligned and each of said group of specified areas and weight-averaging the weighted coordinate positions, thereby smoothing the coordinate position of said one specified area.
Claim 16
Dependent Claim
28 words
A method according to claim 6, further comprising: exposing each of said plurality of processing areas aligned with said predetermined position with a pattern image of a mask.
Claim 17
Independent Claim
143 words
A method for aligning each of a plurality of processing areas on a substrate with a predetermined position in a static coordinate system for defining movement of said substrate, comprising: obtaining a state of distortion of said substrate; measuring a coordinate position, in said static coordinate system, of each of a group of specified areas selected from said plurality of processing areas; for each of said plurality of processing areas on said substrate, weighting each of the measured coordinate positions of said group of specified areas in accordance with said state of distortion and performing a statistical calculation using the weighted coordinate positions to obtain a calculated coordinate position, in said static coordinate system, for each of said processing areas on said substrate; and aligning each of said plurality of processing areas with said predetermined position based on the corresponding calculated coordinate position.
Claim 18
Independent Claim
143 words
A method for aligning each of a plurality of processing areas on a substrate with a predetermined position in a static coordinate system for defining movement of said substrate, comprising: obtaining a state of distortion of said substrate; measuring a coordinate position, in said static coordinate system, of each of a group of specified areas selected from said plurality of processing areas; for each of said plurality of processing areas on said substrate, weighting each of the measured coordinate positions of said group of specified areas in accordance with said state of distortion and performing a statistical calculation using the weighted coordinate positions to obtain a calculated coordinate position, in said static coordinate system, for each of said processing areas on said substrate; and aligning each of said plurality of processing areas with said predetermined position based on the corresponding calculated coordinate position.
Claim 19
Dependent Claim
28 words
A method according to claim 12, further comprising: exposing each of said plurality of processing areas aligned with said predetermined position with a pattern image of a mask.
Claim 20
Dependent Claim
25 words
A method according to claim 12, wherein said obtaining includes obtaining a non-linear distortion of each of said plurality of processing areas on the substrate.
Claim 21
Dependent Claim
88 words
A method according to claim 12, wherein, when one of said plurality of processing areas on said substrate is selected as an area to be aligned, a measured coordinate position of a processing area in said group of specified areas having a state of distortion with a same tendency as said area to be aligned is weighted higher than a measured coordinate position of a processing area in said group of specified areas having a state of distortion with a different tendency from said area to be aligned.
Claim 22
Dependent Claim
46 words
A method according to claim 12, wherein, when one of said plurality of processing areas on the substrate is selected as an area to be aligned, each of the measured coordinate positions is weighted in accordance with a corresponding distance from the area to be aligned.
Claim 23
Dependent Claim
46 words
A method according to claim 12, wherein, when one of said plurality of processing areas on the substrate is selected as an area to be aligned, each of the measured coordinate positions is weighted in accordance with a corresponding distance from a center of said substrate.
Claim 24
Dependent Claim
39 words
A method according to claim 12, wherein said obtaining includes measuring a coordinate position for at least some of said plurality of processing areas on said substrate and obtaining the state of distortion based on the measured coordinate positions.
Claim 25
Independent Claim
147 words
A method for aligning each of a plurality of processing areas on a substrate with a predetermined position in a static coordinate system for defining movement of said substrate, comprising: measuring a coordinate position, in said static coordinate system, of each of a group of specified areas selected from said plurality of processing areas; adding at least one virtual specified area differing from said plurality of processing areas on the substrate; estimating a coordinate position, in said static coordinate system, of said virtual specified area based on the measured coordinate positions; obtaining a coordinate position, in said static coordinate system, of each of said plurality of processing areas on said substrate based on the measured coordinate positions and the estimated coordinate position; and aligning each of said plurality of processing areas with said predetermined position based on the corresponding obtained coordinate position in said static coordinate system.
Claim 26
Independent Claim
147 words
A method for aligning each of a plurality of processing areas on a substrate with a predetermined position in a static coordinate system for defining movement of said substrate, comprising: measuring a coordinate position, in said static coordinate system, of each of a group of specified areas selected from said plurality of processing areas; adding at least one virtual specified area differing from said plurality of processing areas on the substrate; estimating a coordinate position, in said static coordinate system, of said virtual specified area based on the measured coordinate positions; obtaining a coordinate position, in said static coordinate system, of each of said plurality of processing areas on said substrate based on the measured coordinate positions and the estimated coordinate position; and aligning each of said plurality of processing areas with said predetermined position based on the corresponding obtained coordinate position in said static coordinate system.
Claim 27
Dependent Claim
28 words
A method according to claim 19, further comprising: exposing each of said plurality of processing areas aligned with said predetermined position with a pattern image of a mask.
Claim 28
Dependent Claim
46 words
A method according to claim 19, wherein said obtaining includes performing a statistical calculation using the measured coordinate positions and the estimated coordinate position to obtain a calculated coordinate position, in said static coordinate system, of each of said plurality of processing areas on said substrate.
Claim 29
Dependent Claim
60 words
A method according to claim 19, further comprising weighting, when one of said plurality of processing areas on said substrate is selected as an area to be aligned, each of the coordinate positions of said group of specified areas and the coordinate position of said virtual specified area in accordance with a corresponding distance from the area to be aligned.
Claim 30
Dependent Claim
24 words
A method according to claim 19, wherein said virtual specified area is added on a straight line passing through a center of said substrate.
Claim 31
Dependent Claim
29 words
A method according to claim 19, wherein said virtual specified area is added on a straight line passing through a plurality of areas in said group of specified areas.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-01-21 | 2000-07-22 | 2001-01-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-01-21 | 2004-07-22 | 2005-01-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-01-21 | 2008-07-22 | 2009-01-21 | $7700.00 | Window Closed / Lapsed |