US5594357A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Testing apparatus and connection method for the testing apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1995-12-06
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Granted: 1997-01-14
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Expires: 2015-12-06
Abstract
Abstract A testing apparatus has a probe card having a plurality of first contact elements to be put in contact with an object to be tested, and a plurality of electrodes electrically connected with the first contact elements, a test head to be shifted between a retreat position and a test position, for performing electrical measurement of the object in the test position, a cylindrical connection unit, having a plurality of second contact elements to be put in contact with the electrodes of the probe card in the test position, for electrically connecting the probe card with the test head, the connection member being movably supported by the test head, a head plate for supporting the probe card, a driving mechanism for moving the probe card between a test position near the head plate and a wait position away from the head plate, and a movement limiting member for limiting movement of the connection member towards the test head and applying a pressing force to the connection member and the probe card via the second contact portions in cooperation with the driving mechanism, when the probe card is shifted from the wait position to the test position by the driving mechanism.
Inventors
- 👤 Hisashi Nakajima
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 06:45
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07342; G01R1/07314; H; H10; H10P; H10P74/00; H10P74/27
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
203 words
A testing apparatus comprising: a probe card having a plurality of first contact elements to be put in contact with an object to be tested, and a plurality of electrodes electrically connected with the first contact elements; a test head to be shifted between a retreat position and a test position, for performing electrical measurement of the object in the test position; a connection member, having a plurality of second contact elements to be put in contact with the electrodes of the probe card in the test position, for electrically connecting the probe card with the test head, the connection member being supported by the test head; a support mechanism for movably supporting the connection member on the test head; guide means for guiding the connection member such that the second contact elements are aligned to the electrodes of the probe card in the test position; limiting means for limiting movement of the connection member towards the test head after the test head is moved to the test position; and fixing means for fixing the probe card in the state in which movement of the connection member is limited by the limiting means and the probe card is pressed on the connection member.
Claim 2
Dependent Claim
203 words
A testing apparatus comprising: a probe card having a plurality of first contact elements to be put in contact with an object to be tested, and a plurality of electrodes electrically connected with the first contact elements; a test head to be shifted between a retreat position and a test position, for performing electrical measurement of the object in the test position; a connection member, having a plurality of second contact elements to be put in contact with the electrodes of the probe card in the test position, for electrically connecting the probe card with the test head, the connection member being supported by the test head; a support mechanism for movably supporting the connection member on the test head; guide means for guiding the connection member such that the second contact elements are aligned to the electrodes of the probe card in the test position; limiting means for limiting movement of the connection member towards the test head after the test head is moved to the test position; and fixing means for fixing the probe card in the state in which movement of the connection member is limited by the limiting means and the probe card is pressed on the connection member.
Claim 3
Dependent Claim
43 words
The apparatus according to claim 1, wherein each of said second contact elements has a pogo pin mechanism for enabling said each of the second contact elements to come into elastic contact with an associated one of said electrodes of the probe card.
Claim 4
Dependent Claim
14 words
The apparatus according to claim 1, wherein said support mechanism has a spring mechanism.
Claim 5
Dependent Claim
24 words
The apparatus according to claim 1, further comprising flexible wiring for connecting the test head to the second contact elements of the connection member.
Claim 6
Dependent Claim
83 words
The apparatus according to claim 1, wherein said limiting means includes: a limiting member switchable between an insertion permitting position where insertion of the connection member is permitted and a limiting position where movement of the connection member towards the test head is limited after the insertion of the connection member, when the test head is shifted from the retreat position to the test position; and a driving mechanism for switching the limiting member between the insertion permitting position and the limiting position.
Claim 7
Dependent Claim
86 words
The apparatus according to claim 5, wherein said connection member has flanges on a peripheral portion thereof, said limiting member has an insertion hole for insertion of the connection member in an upper wall thereof, notches continuous with the insertion hole and corresponding to the flanges, and stoppers, said flanges being situated to correspond to the notches when the connection member is in the insertion permitting position, and said flanges being situated to correspond to the stoppers when the connection member is in the limiting position.
Claim 8
Dependent Claim
14 words
The apparatus according to claim 1, wherein said fixing means has a cylinder mechanism.
Claim 9
Dependent Claim
14 words
The apparatus according to claim 1, wherein said fixing means has a cam mechanism.
Claim 10
Dependent Claim
29 words
The apparatus according to claim 1, wherein said guide means has a guide pin and a guide hole formed in the connection member for insertion of the guide pin.
Claim 11
Dependent Claim
19 words
The apparatus according to claim 9, wherein said guide hole is formed in at least one of the flanges.
Claim 12
Dependent Claim
17 words
The apparatus according to claim 1, further comprising a probe card holder for holding the probe card.
References Cited (Backward Citations)
US5321453A
Cited
US5254939A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-01-14 | 2000-07-15 | 2001-01-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-01-14 | 2004-07-15 | 2005-01-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-01-14 | 2008-07-15 | 2009-01-14 | $7700.00 | Window Closed / Lapsed |