US5593335A — Method of manufacturing an electron source

Claim 1

Independent Claim 124 words

A method of manufacturing an electron source having a plurality of surface-conduction electron-emitting devices arranged in a matrix form with a plurality of row-direction wires and a plurality of column-direction wires on a substrate, each of the plurality of surface-conduction electron-emitting devices being connected to one of the plurality of row-direction wires and one of the plurality of column-direction wires, comprising the steps of: dividing a plurality of conductive films connected to the plurality of row-direction wires and column-direction wires in the matrix form into a plurality of groups; and supplying electric current to each of the plurality of groups through some of the plurality of row-direction wires or column-direction wires in each group to form electron emission portions of the surface-conduction electron-emitting devices.

Claim 2

Independent Claim 124 words

A method of manufacturing an electron source having a plurality of surface-conduction electron-emitting devices arranged in a matrix form with a plurality of row-direction wires and a plurality of column-direction wires on a substrate, each of the plurality of surface-conduction electron-emitting devices being connected to one of the plurality of row-direction wires and one of the plurality of column-direction wires, comprising the steps of: dividing a plurality of conductive films connected to the plurality of row-direction wires and column-direction wires in the matrix form into a plurality of groups; and supplying electric current to each of the plurality of groups through some of the plurality of row-direction wires or column-direction wires in each group to form electron emission portions of the surface-conduction electron-emitting devices.

Claim 3

Dependent Claim 57 words

The method according to claim 1, wherein the size of the matrix is M×N, each of the plurality of groups includes a plurality of conductive films connected to M' wires (1≦M'<M) of the row-direction wires and N' wires (1≦N'<N) of the column-direction wires, the electric current is supplied to the plurality of conductive films in each group.

Claim 4

Dependent Claim 70 words

The method according to claim 2, wherein, in said supplying step, a potential V1 is applied to both the M' wires of the row-direction wires and the wires of the column-direction wires other than the N' wires, and a potential V2, which differs from the potential V1, is applied to both the N' wires of the column-direction wires and the wires of the row-direction wires other than the M' wires.

Claim 5

Dependent Claim 32 words

The method according to claim 2, wherein, in said supplying step, the electric current is supplied from power supply portion connected to one end of the row-direction wires or the column-direction wires.

Claim 6

Dependent Claim 32 words

The method according to claim 2, wherein, in said supplying step, the electric current is supplied from power supply portions connected to both ends of the row-direction wires or the column-direction wires.

Claim 7

Dependent Claim 45 words

The method according to claim 1, wherein each of the plurality of groups includes a plurality of conductive films connected to the row-direction wires or column-direction wires, and the electric current is successively supplied to the conductive films through every row-direction wire or column-direction wire.

Claim 8

Dependent Claim 28 words

The method according to claim 6, wherein the electric current is supplied from power supply portions connected to both ends of the row-direction wires or the column-direction wires.

Claim 9

Dependent Claim 49 words

The method according to claim 6, wherein in said supplying step, potential V2 is applied to some of either the row-direction wires or the column-direction wires, a potential V1, which differs from the potential V2, is supplied to the remaining wires of the row-direction wires and the column-direction wires.

Claim 10

Dependent Claim 47 words

The method according to claim 8, wherein the potential V2 is applied to the wires of the said row-direction wires or the column-direction wires that exhibit a smaller variance in electric power when the electric power is applied to either the row-direction wires or the column-direction wires.

Claim 11

Dependent Claim 29 words

The method according to claim 6, wherein the electric current is supplied from a power supply portion connected to one end of the row-direction wires or the column-direction wires.

Claim 12

Dependent Claim 137 words

The method according to claim 10, wherein, in said supplying step, the potential V2 is applied to the row-direction wires when (N.sub.x ×N.sub.x -aN.sub.x)×r.sub.x ≦(N.sub.y ×N.sub.y -aN.sub.y)×r.sub.y holds, and to the column-direction wires when (N.sub.x ×N.sub.x -aN.sub.x)×r.sub.x >(N.sub.y ×N.sub.y -aN.sub.y)×r.sub.y holds, where N x represents the number of surface-conduction electron-emitting devices connected to the row-direction wire, N y represents the number of surface-conduction electron-emitting devices connected to the column-direction wires, r x represents wiring resistance per one surface-conduction electron-emitting device in the row-direction wire and r y represents wiring resistance per one surface-conduction electron-emitting device in the column-direction wire, and further, a=8 when the power supply portion is connected to end of said row-direction wires or column-direction wires, and a=24 when the power supply portions are connected to both ends of said row-direction wires or column-direction wires.

Claim 13

Independent Claim 87 words

A method of manufacturing an electron source having a plurality of surface-conduction electron-emitting devices connected to a plurality of wires on a substrate, comprising the steps of: dividing a plurality of conductive films connected to the plurality of wires into a plurality of groups by forming at least one high-impedance portion on each of the plurality of wires; supplying electric current to conductive films in each group to form electron emission portions; and electrically short-circuiting the at least one high-impedance portion after forming the electron emission portions.

Claim 14

Independent Claim 87 words

A method of manufacturing an electron source having a plurality of surface-conduction electron-emitting devices connected to a plurality of wires on a substrate, comprising the steps of: dividing a plurality of conductive films connected to the plurality of wires into a plurality of groups by forming at least one high-impedance portion on each of the plurality of wires; supplying electric current to conductive films in each group to form electron emission portions; and electrically short-circuiting the at least one high-impedance portion after forming the electron emission portions.

Claim 15

Dependent Claim 19 words

The method according to claim 12, wherein said short-circuiting step is performed by wire-bonding using a low-resistance metal material.

Claim 16

Dependent Claim 23 words

The method according to claim 12, wherein said short-circuiting step is performed by heating and melting a metal exhibiting a low melting point.

Claim 17

Dependent Claim 17 words

The method according to claim 12, wherein the high-impedance portion comprises a metal exhibiting a high resistivity.

Claim 18

Dependent Claim 18 words

The method according to claim 12, wherein each high-impedance portion includes a thin film of a nickel-chrome alloy.

Claim 19

Dependent Claim 28 words

The method according to claim 12, wherein each high-impedance portion has a width less than the width of the portion of the wire other than the high-impedance portion.

Claim 20

Dependent Claim 28 words

The method according to claim 12, wherein each high-impedance portion has a thickness less than the width of the portion of the wire other than the high-impedance portion.

Claim 21

Dependent Claim 44 words

The method according to claim 12, wherein the plurality of wires include a plurality of row-direction wires and column-direction wires, and the plurality of surface-conduction electron-emitting devices are arranged in a matrix form to connect with the plurality of row-direction wires and column-direction wires.

Claim 22

Dependent Claim 30 words

The method according to claim 12, wherein the wires are arranged parallel to each other, and each of the surface-conduction electron-emitting devices is connected between parallel ones of the wires.

Claim 23

Dependent Claim 15 words

The method according to claim 12, wherein each wire is cut at the high-impedance portions.

Claim 24

Independent Claim 59 words

A method of manufacturing an electron source, comprising the steps of: connecting a plurality of surface-condition electron-emitting devices to a plurality of wires on a substrate; and supplying electric power to a plurality of conductive films connected to the plurality of wires from electrical connecting portions arranged to contact the plurality of wires at a plurality of locations thereof.

Claim 25

Independent Claim 59 words

A method of manufacturing an electron source, comprising the steps of: connecting a plurality of surface-condition electron-emitting devices to a plurality of wires on a substrate; and supplying electric power to a plurality of conductive films connected to the plurality of wires from electrical connecting portions arranged to contact the plurality of wires at a plurality of locations thereof.

Claim 26

Dependent Claim 30 words

The method according to claim 22, wherein the electrical connecting portions have a plurality of contact terminals arranged to contact the plurality of wires at a plurality of locations thereof.

Claim 27

Dependent Claim 25 words

The method according to claim 22, wherein the electrical connecting portions have contact surfaces capable of contacting the plurality of wires over the surface thereof.

Claim 28

Dependent Claim 22 words

The method according to claim 22, where said electrical connecting portions comprise members exhibiting a resistance lower than that of the wires.

Claim 29

Dependent Claim 30 words

The method according to claim 22, wherein in said supplying step of electric power, a temperature of the electrical connecting portions is monitored and is controlled to be approximately constant.

Claim 30

Dependent Claim 31 words

The method according to claim 22, wherein surface portions of the wires to which the electrical connecting portions are arranged to contact are covered with a metal exhibiting a low resistance.

Claim 31

Dependent Claim 33 words

The method according to claim 22, wherein the plurality of wires are respectively covered with insulating members except at contact holes through which the electrical connecting portions are capable of contacting the wire.

Claim 32

Dependent Claim 47 words

The method according to claim 22, wherein, in the supplying step, electric power is supplied from a power supply portion connected to one end of each of the plurality of wires in addition to supplying electric power from the electrical connecting portions arranged to contact the wires.

Claim 33

Dependent Claim 47 words

The method according to claim 22, wherein, in said supplying step, electric power is supplied from power supply portions connected to both ends of each of the plurality of the wires in addition to supplying electric power from the electrical connecting portions arranged to contact the wires.

Claim 34

Independent Claim 88 words

A method of manufacturing an electron source having a plurality of surface-conduction electron-emitting devices arranged on a substrate and connected by a plurality of wire, comprising the steps of: supplying electric power to each of a plurality of thin films through the plurality of wires to form electron-emitting portions of the plurality of surface-conduction electron-emitting devices; and controlling an applied power or an applied voltage applied to each of the thin films so that the applied power or applied voltage is substantially constant for all of the devices.

Claim 35

Independent Claim 88 words

A method of manufacturing an electron source having a plurality of surface-conduction electron-emitting devices arranged on a substrate and connected by a plurality of wire, comprising the steps of: supplying electric power to each of a plurality of thin films through the plurality of wires to form electron-emitting portions of the plurality of surface-conduction electron-emitting devices; and controlling an applied power or an applied voltage applied to each of the thin films so that the applied power or applied voltage is substantially constant for all of the devices.

Claim 36

Dependent Claim 44 words

The method according to claim 31, wherein the plurality of wires included a plurality of row-direction wires and column-direction wires, and the plurality of surface-conduction electron-emitting devices are arranged in a matrix form to connect with the plurality of row-direction wires and column-direction wires.

Claim 37

Dependent Claim 35 words

The method according to claim 32, wherein, in said controlling step, the applied power or the applied voltage is controlled prior to forming an electron-emitting portion of each of the plurality of surface-conduction electron-emitting devices.

Claim 38

Dependent Claim 55 words

The method according to claim 32, wherein, in said controlling step, a position of a device that has been subjected to forming among a plurality of surface-conduction electron-emitting devices connected to the wires is sensed, and depending upon the sensed position, the applied power or the applied voltage for forming the other devices is controlled.

Claim 39

Dependent Claim 83 words

The method according to claim 32, wherein, in said supplying step, the electric power is supplied from a power supply portion connected to one end of the wires, and the applied voltage is controlled in such a manner that the voltage applied to the power supply portion is greater in devices situated at both ends of one of the plurality of wires than in devices situated near the middle of the one wire among a plurality of devices connected to the one wire.

Claim 40

Dependent Claim 88 words

The method according to claim 32, wherein, in said supplying step, the electric power is supplied from power supply portions connected to two ends of one of the plurality of wires, and the applied voltage is controlled in such a manner that the voltage applied to the power supply portions is greater in devices situated at one end of the one wire and in devices near the middle of the wire than in devices situated in the vicinity of one-quarter inward from both ends of the one wire.

Claim 41

Dependent Claim 30 words

The method according to claim 22, wherein the plurality of wires are arranged in parallel, and each of the surface-conduction electron-emitting devices is connected between parallel ones of the wires.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2000-01-14	2000-07-15	2001-01-14	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2004-01-14	2004-07-15	2005-01-14	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2008-01-14	2008-07-15	2009-01-14	$7700.00	Window Closed / Lapsed

Method of manufacturing an electron source

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