Manufacture of electron emitting element

Abstract

Abstract PURPOSE:To make it possible to form an electron emitting part in which changes in a film, that is, the widths, dimensions, shapes, etc. are uniform and which is excellent in reproducibility at an optional position of the film and high in resistance by applying heat treatment to the film made of electron emitting material provided between electrodes that oppose each other using a heating means whose tip is constituted of a fine acicular substance. CONSTITUTION:An acicular substance 16 is one which is made of high melting point metal such as W, Pt, Ta, Mo, etc. or high melting point alloy such as HfB2, ZrB2, etc., and whose tip area is minute, and the size of the tip is optionally selected to use. To apply heat treatment to a film made of electron emitting material, using a heating means whose tip consists of fine acicular substance, the acicular substance 16 is heated up to above the melting point of the electron emitting material of the film by a coil heater, for example, among the air or inside a vacuum vessel, and the heated acicular substance is contacted with a position to form an electron emitting part 15 in the film 13 so as to generate a change in the film. In this way, by shifting the acicular substance 16, the electron emitting part in an optional shape can be formed at an optional position of the neck part of the film 13.

Inventors

• 👤 Yoshikazu Sakano
• 👤 Tetsuya Kaneko
• 👤 Seishiro Yoshioka
• 👤 Ichiro Nomura
• 👤 Toshihiko Takeda
• 👤 Hidetoshi Suzuki
• 👤 Kojiro Yokono

Bibliographic Details