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US5587665A Expired / Lapsed US ⏱️ 0.0 years remaining

Testing hot carrier induced degradation to fall and rise time of CMOS inverter circuits

Assignee: Philips Semiconductors Inc
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Filing: 1995-07-18
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Granted: 1996-12-24
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Expires: 2015-07-18
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Abstract

Abstract Performance degradation resulting from hot carrier stress is determined using a special test circuit. The test circuit is formed using a string of inverters on an integrated circuit. The string of inverters is connected in series. Every other inverter in the string of inverters uses cascaded transistors so that performance of the inverters with cascaded are not degraded by introduced hot carrier stress. For example, odd numbered inverters are each constructed using cascaded PMOSFETs and cascaded NMOSFETs and even numbered inverters are each constructed using a single PMOSFET and a single NMOSFET. On an input of the string of inverters, a first signal is placed which transitions from logic 0 to logic 1. Propagation delay of the first signal through the string of inverters is measured. Also, a second signal which transitions from logic 1 to logic 0 is placed on the input of the string of inverters. Propagation delay of the second signal through the string of inverters is measured. Then, sufficient hot carrier stress is added to the string of inverters so that inverters not constructed using cascaded transistors will have degraded performance. After introduction of the hot carrier stress, a third signal which transitions from logic 0 to logic 1 is placed on the input of the string of inverters. Propagation delay of the third signal through the string of inverters is measured. Finally, a fourth signal which transitions from logic 1 to logic 0 is placed on the input of the string of inverters. Propagation delay of the fourth signal through the string of inverters is measured.

Inventors

  • 👤 Chun Jiang

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 13:43
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/30

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 246 words
A method for determining performance degradation of an inverter resulting from hot carrier stress, the method comprising the following steps: (a) forming a string of inverters on an integrated circuit, the string of inverters being connected in series, comprising the following substep (a.1) constructing every other inverter in the string of inverters using cascaded transistors so that performance of these every other inverters will not be degraded by hot carrier stress introduced in step (d); (b) on an input of the string of inverters placing a first signal which transitions from logic 0 to logic 1, and measuring propagation delay of the first signal through the string of inverters; (c) on the input of the string of inverters placing a second signal which transitions from logic 1 to logic 0, and measuring propagation delay of the second signal through the string of inverters; (d) after steps (b) and (c), introducing sufficient hot carrier stress to the string of inverters so that inverters not constructed using cascaded transistors will have degraded performance; (e) after step (d), on the input of the string of inverters, placing a third signal which transitions from logic 0 to logic 1, and measuring propagation delay of the third signal through the string of inverters; and, (f) after step (d), on the input of the string of inverters placing a fourth signal which transitions from logic 1 to logic 0, and measuring propagation delay of the fourth signal through the string of inverters.
Claim 2
Independent Claim 246 words
A method for determining performance degradation of an inverter resulting from hot carrier stress, the method comprising the following steps: (a) forming a string of inverters on an integrated circuit, the string of inverters being connected in series, comprising the following substep (a.1) constructing every other inverter in the string of inverters using cascaded transistors so that performance of these every other inverters will not be degraded by hot carrier stress introduced in step (d); (b) on an input of the string of inverters placing a first signal which transitions from logic 0 to logic 1, and measuring propagation delay of the first signal through the string of inverters; (c) on the input of the string of inverters placing a second signal which transitions from logic 1 to logic 0, and measuring propagation delay of the second signal through the string of inverters; (d) after steps (b) and (c), introducing sufficient hot carrier stress to the string of inverters so that inverters not constructed using cascaded transistors will have degraded performance; (e) after step (d), on the input of the string of inverters, placing a third signal which transitions from logic 0 to logic 1, and measuring propagation delay of the third signal through the string of inverters; and, (f) after step (d), on the input of the string of inverters placing a fourth signal which transitions from logic 1 to logic 0, and measuring propagation delay of the fourth signal through the string of inverters.
Claim 3
Dependent Claim 37 words
A method as in claim 1 wherein in step (a) odd numbered inverters are each constructed using cascaded PMOSFETs and cascaded NMOSFETs and even numbered inverters are each constructed using a single PMOSFET and a single NMOSFET.
Claim 4
Dependent Claim 120 words
A method as in claim 2 additionally comprising the following steps: (g) subtracting propagation delay of the first signal through the string of inverters measured in step (b) from propagation delay of the third signal through the string of inverters measured in step (e) in order to determine a rise time component of performance degradation resulting from the hot carrier stress introduced in step (d); and, (h) subtracting propagation delay of the second signal through the string of inverters measured in step (c) from propagation delay of the fourth signal through the string of inverters measured in step (f) in order to determine a fall time component of performance degradation resulting from the hot carrier stress introduced in step (d).
Claim 5
Dependent Claim 37 words
A method as in claim 1 wherein in step (a) even numbered inverters are each constructed using cascaded PMOSFETs and cascaded NMOSFETs and odd numbered inverters are each constructed using a single PMOSFET and a single NMOSFET.
Claim 6
Dependent Claim 120 words
A method as in claim 4 additionally comprising the following steps: (g) subtracting propagation delay of the first signal through the string of inverters measured in step (b) from propagation delay of the third signal through the string of inverters measured in step (e) in order to determine a fall time component of performance degradation resulting from the hot carrier stress introduced in step (d); and, (h) subtracting propagation delay of the second signal through the string of inverters measured in step (c) from propagation delay of the fourth signal through the string of inverters measured in step (f) in order to determine a rise time component of performance degradation resulting from the hot carrier stress introduced in step (d).
Claim 7
Independent Claim 148 words
A method for determining performance degradation of an inverter resulting from hot carrier stress, the method comprising the following steps: (a) forming a string of inverters on an integrated circuit, the string of inverters being connected in series, comprising the following substep (a.1) constructing every other inverter in the string of inverters using cascaded transistors so that performance of these every other inverters will not be degraded by hot carrier stress introduced in step (d); (b) measuring propagation delay through the string of inverters of a transition from a first logic state to a second logic state; (c) after step (b), introducing sufficient hot carrier stress to the string of inverters so that inverters not constructed using cascaded transistors will have degraded performance; (d) after step (c), measuring propagation delay through the string of inverters of the transition from the first logic state to the second logic state.
Claim 8
Independent Claim 148 words
A method for determining performance degradation of an inverter resulting from hot carrier stress, the method comprising the following steps: (a) forming a string of inverters on an integrated circuit, the string of inverters being connected in series, comprising the following substep (a.1) constructing every other inverter in the string of inverters using cascaded transistors so that performance of these every other inverters will not be degraded by hot carrier stress introduced in step (d); (b) measuring propagation delay through the string of inverters of a transition from a first logic state to a second logic state; (c) after step (b), introducing sufficient hot carrier stress to the string of inverters so that inverters not constructed using cascaded transistors will have degraded performance; (d) after step (c), measuring propagation delay through the string of inverters of the transition from the first logic state to the second logic state.
Claim 9
Dependent Claim 37 words
A method as in claim 6 wherein in step (a) odd numbered inverters are each constructed using cascaded PMOSFETs and cascaded NMOSFETs and even numbered inverters are each constructed using a single PMOSFET and a single NMOSFET.
Claim 10
Dependent Claim 80 words
A method as in claim 6 wherein the transition in step (b) is from logic 0 to logic 1 and wherein the method additionally comprises the following step: (e) subtracting propagation delay of the transition through the string of inverters measured in step (b) from propagation delay of the transition through the string of inverters measured in step (d) in order to determine a rise time component of performance degradation resulting from the hot carrier stress introduced in step (c).
Claim 11
Dependent Claim 37 words
A method as in claim 6 wherein in step (a) even numbered inverters are each constructed using cascaded PMOSFETs and cascaded NMOSFETs and odd numbered inverters are each constructed using a single PMOSFET and a single NMOSFET.
Claim 12
Dependent Claim 80 words
A method as in claim 6 wherein the transition in step (b) is from logic 1 to logic 0 and wherein the method additionally comprises the following step: (e) subtracting propagation delay of the transition through the string of inverters measured in step (b) from propagation delay of the transition through the string of inverters measured in step (d) in order to determine a fall time component of performance degradation resulting from the hot carrier stress introduced in step (c).

References Cited (Backward Citations)

US4700089A Cited
US4920287A Cited
US5245585A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1999-12-24 2000-06-24 2000-12-24 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2003-12-24 2004-06-24 2004-12-24 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2007-12-24 2008-06-24 2008-12-24 $7700.00 Window Closed / Lapsed

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