US5586059A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Automated data management system for analysis and control of photolithography stepper performance
Assignee: Advanced Micro Devices Inc
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Filing: 1995-06-07
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Granted: 1996-12-17
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Expires: 2015-06-07
Abstract
Abstract An automated data management system for enabling the analysis and control of the performance of photolithography steppers in a submicron fabrication facility is disclosed. In a preferred embodiments, software running on each of a plurality of first personal computers (PCs), each of which is connected to one of a plurality of steppers, is used to append printer data generated by the steppers responsive to tests performed therein to ASCII files associated with the steppers and subsequently to upload the ASCII files to a network drive at specified time intervals. Once the ASCII files have been uploaded to the VAX drive, the files may be accessed by a user outside the facility using a second PC on which is running a utility of the present invention for providing automated analysis of the data for a particular stepper as requested by a user. In one aspect of the invention, the utility of the present invention comprises a windows-based user interface for enabling the user to select and initiate analysis procedures by selecting from a variety of options displayed on the user's PC. In another aspect of the invention, the utility of the present invention enables the user to select from among a variety of formats, including browse tables, charts and graphs, for viewing the resulting analysis data.
Inventors
- 👤 Anastasia L. Oshelski
- 👤 Paul Ackmann
- 👤 Stu Brown
- 👤 Richard Edwards
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 10:21
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70491; G03F7/70525; G03F7/7055; G03F7/70558; G03F7/70605; G03F7/70616; G03F7/70625; G03F7/708; G03F7/70991; G05; G05B; G05B19/00; G05B19/02; G05B19/04; G05B19/042; G05B19/418; G05B19/4183; G05B2219/00; G05B2219/20; G05B2219/24; G05B2219/24053; G05B2219/24058; G05B2219/30; G05B2219/31; G05B2219/31288; G05B2219/31318; G05B2219/45; G05B2219/45026; Y; Y02; Y02P; Y02P90/00; Y02P90/02; Y02P90/80
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
130 words
A method of performing automated analysis of the performance of at least one photolithography stepper using test data generated responsive to tests run on said at least one stepper, the method comprising: responsive to test data being generated by said at least one stepper, automatically and without user involvement appending said test data to a file associated with said at least one stepper, said associated file being stored in a computer electrically connected between said stepper and a network drive; automatically periodically uploading said associated file to and storing said associated file on said network drive; responsive to user selection of said at least one stepper, retrieving and parsing said associated file; performing user-selected analyses on said data; and presenting results of said user selected analyses in a user-selected format.
Claim 2
Independent Claim
130 words
A method of performing automated analysis of the performance of at least one photolithography stepper using test data generated responsive to tests run on said at least one stepper, the method comprising: responsive to test data being generated by said at least one stepper, automatically and without user involvement appending said test data to a file associated with said at least one stepper, said associated file being stored in a computer electrically connected between said stepper and a network drive; automatically periodically uploading said associated file to and storing said associated file on said network drive; responsive to user selection of said at least one stepper, retrieving and parsing said associated file; performing user-selected analyses on said data; and presenting results of said user selected analyses in a user-selected format.
Claim 3
Dependent Claim
67 words
The method of claim 1 further comprising: logging errors occasioned by said at least one stepper in an error file associated with said at least one stepper; periodically uploading said associated error file to said network drive; responsive to user selection of an error file analysis option, retrieving and parsing said associated error file; presenting said errors stored in said associated error file in a user-selected format.
Claim 4
Dependent Claim
18 words
The method of claim 1 wherein said parsed data is stored in a database on said network drive.
Claim 5
Dependent Claim
20 words
The method of claim 1 wherein said retrieving and parsing are performed by a computer connected to said network drive.
Claim 6
Dependent Claim
17 words
The method of claim 4 wherein said presenting is performed using a display screen of said computer.
Claim 7
Dependent Claim
17 words
The method of claim 4 wherein said presenting is performed using a printer connected to said computer.
Claim 8
Dependent Claim
22 words
The method of claim 1 wherein said appending and uploading is performed by a computer connected to said at least one stepper.
Claim 9
Dependent Claim
23 words
The method of claim 1 wherein said user-selected format comprises at least one of a pareto graph, a chart, or a browse table.
Claim 10
Dependent Claim
13 words
The method of claim 1 wherein said network drive is a VAX drive.
Claim 11
Dependent Claim
28 words
The method of claim 2 wherein said user-selected format comprises at least one of a pareto graph, an error code distribution sheet, or an error code occurrence sheet.
Claim 12
Independent Claim
140 words
A system for performing automated analysis of the performance of at least one photolithography stepper using test data generated responsive to tests run on said at least one stepper, the system comprising: means responsive to test data being generated by said at least one stepper for automatically and without user involvement appending said test data to a file associated with said at least one stepper, said associated file being stored in a computer electrically connected between said stepper and a network drive; means for automatically periodically uploading said associated file to and storing said associated file on said network drive; means responsive to user selection of said at least one stepper for retrieving and parsing said associated file; means for performing user-selected analyses on said data; and means for presenting results of said user selected analyses in a user-selected format.
Claim 13
Independent Claim
140 words
A system for performing automated analysis of the performance of at least one photolithography stepper using test data generated responsive to tests run on said at least one stepper, the system comprising: means responsive to test data being generated by said at least one stepper for automatically and without user involvement appending said test data to a file associated with said at least one stepper, said associated file being stored in a computer electrically connected between said stepper and a network drive; means for automatically periodically uploading said associated file to and storing said associated file on said network drive; means responsive to user selection of said at least one stepper for retrieving and parsing said associated file; means for performing user-selected analyses on said data; and means for presenting results of said user selected analyses in a user-selected format.
Claim 14
Dependent Claim
75 words
The system of claim 11 further comprising: means for logging errors occasioned by said at least one stepper in an error file associated with said at least one stepper; means for periodically uploading said associated error file to said network drive; means responsive to user selection of an error file analysis option, for retrieving and parsing said associated error file; means for presenting said errors stored in said associated error file in a user-selected format.
Claim 15
Dependent Claim
18 words
The system of claim 11 wherein said parsed data is stored in a database on said network drive.
Claim 16
Dependent Claim
20 words
The system of claim 11 wherein said means for retrieving and parsing comprises a computer connected to said network drive.
Claim 17
Dependent Claim
17 words
The system of claim 14 wherein said means for presenting comprises a display screen of said computer.
Claim 18
Dependent Claim
19 words
The system of claim 14 wherein said means for presenting comprises performed using a printer connected to said computer.
Claim 19
Dependent Claim
22 words
The system of claim 11 wherein said means for appending and uploading comprises a computer connected to said at least one stepper.
Claim 20
Dependent Claim
23 words
The system of claim 11 wherein said user-selected format comprises at least one of a pareto graph, a chart, or a browse table.
Claim 21
Dependent Claim
13 words
The system of claim 11 wherein said network drive is a VAX drive.
Claim 22
Dependent Claim
28 words
The system of claim 12 wherein said user-selected format comprises at least one of a pareto graph, an error code distribution sheet, or an error code occurrence sheet.
Claim 23
Independent Claim
157 words
A system for automating data collection and analysis of at least one photolithography stepper, the system comprising: a first computer electrically connected to said at least one stepper for automatically accumulating, without user involvement, test data generated by said at least one stepper responsive to tests performed thereon and appending said test data to a test data file associated with said at least one stepper; a VAX drive electrically connected to said first computer, said first computer automatically periodically uploading said associated test data file to said VAX drive for storage thereon; a second computer electrically connected to said VAX drive for receiving input from a user for selecting a stepper, a type of analysis to be performed, and a presentation format; wherein responsive to receipt of said user input, said second computer retrieves and parses said associated test data file, performs said user-selected analysis and presents results of said user-selected analysis in said user-selected presentation format.
Claim 24
Independent Claim
157 words
A system for automating data collection and analysis of at least one photolithography stepper, the system comprising: a first computer electrically connected to said at least one stepper for automatically accumulating, without user involvement, test data generated by said at least one stepper responsive to tests performed thereon and appending said test data to a test data file associated with said at least one stepper; a VAX drive electrically connected to said first computer, said first computer automatically periodically uploading said associated test data file to said VAX drive for storage thereon; a second computer electrically connected to said VAX drive for receiving input from a user for selecting a stepper, a type of analysis to be performed, and a presentation format; wherein responsive to receipt of said user input, said second computer retrieves and parses said associated test data file, performs said user-selected analysis and presents results of said user-selected analysis in said user-selected presentation format.
Claim 25
Dependent Claim
18 words
The system of claim 21 wherein said parsed data is stored in a database on said VAX drive.
Claim 26
Dependent Claim
24 words
The system of claim 21 wherein said second computer comprises a display, said user-selected analysis results being presented to said user on said display.
Claim 27
Dependent Claim
27 words
The system of claim 21 further comprising a printer electrically connected to said second computer, said user-selected analysis results being presented to said user using said printer.
Claim 28
Dependent Claim
24 words
The system of claim 21 wherein said user-selected presentation format comprises at least one of a pareto graph, a chart, or a browse table.
Claim 29
Dependent Claim
28 words
The system of claim 22 wherein said user-selected format comprises at least one of a pareto graph, an error code distribution list, or an error code occurrence list.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-12-17 | 2000-06-17 | 2000-12-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-12-17 | 2004-06-17 | 2004-12-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-12-17 | 2008-06-17 | 2008-12-17 | $7700.00 | Window Closed / Lapsed |