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US5585211A
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Fabrication and use of sub-micron dimensional standard
Assignee: RFN TECHNOLOGY Inc
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Filing: 1995-02-06
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Granted: 1996-12-17
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Expires: 2015-02-06
Abstract
Abstract A sub-micron dimensional standard is embodied in a grating of equal-sized lines and spaces formed in an electron-sensitive material by means of E-beam lithography. Several gratings are generated in the material at different respective doses of electrons. For each dose, a plurality of gratings are formed with different respective energy deposition contours over the interface of a line and a space. At one dose the energy deposition contour will be the same for all of the different energy deposition contour values. The grating formed with this dose is chosen as the one having a part which forms the standard. The width of a line, as well as the width of a space, in the selected grating is known in absolute terms to the same degree of accuracy as the grating's period. With such an artifact, the systematic error inherent to a measurement system can be determined. Once this error is known, it can be employed as a compensating factor to correct measurements made via the system.
Inventors
- 👤 Leon A. Firstein
- 👤 John L. Rogers
- 👤 Arthur Noz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 13:08
CPC Classifications
G; G03; G03C; G03C5/00; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70558; B; B82; B82Y; B82Y35/00; H; H01; H01J; H01J2237/00; H01J2237/30; H01J2237/304; H01J2237/30433; H01J2237/30438; H01J2237/30444; H01J2237/3045; Y; Y10; Y10S; Y10S430/00; Y10S430/143
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
144 words
A method for fabricating a dimensional standard for non-periodic dimensions, comprising the steps of: (i) producing at least two gratings in a material where each grating comprises a plurality of lines having associated widths, and is formed by exposing the material to multiple subgrating patterns with an electron beam, wherein the locations of the subgrating patterns are shifted relative to one another, with the amount of said shift being different for said at least two gratings; (ii) repeating step (i) at different respective incident doses of the electron beam; (iii) measuring the width of a line in each of said gratings; (iv) determining the incident dose at which the width of a line is the same for gratings having different respective amounts of shift; and (v) selecting an element of a grating formed with said determined incident dose as the standard for a dimension.
Claim 2
Independent Claim
144 words
A method for fabricating a dimensional standard for non-periodic dimensions, comprising the steps of: (i) producing at least two gratings in a material where each grating comprises a plurality of lines having associated widths, and is formed by exposing the material to multiple subgrating patterns with an electron beam, wherein the locations of the subgrating patterns are shifted relative to one another, with the amount of said shift being different for said at least two gratings; (ii) repeating step (i) at different respective incident doses of the electron beam; (iii) measuring the width of a line in each of said gratings; (iv) determining the incident dose at which the width of a line is the same for gratings having different respective amounts of shift; and (v) selecting an element of a grating formed with said determined incident dose as the standard for a dimension.
Claim 3
Dependent Claim
18 words
The method of claim 1 in which the amount of shift for one of said gratings is zero.
Claim 4
Dependent Claim
19 words
The method of claim 1 in which the number of subgrating patterns for a grating is an odd number.
Claim 5
Independent Claim
123 words
A method for fabricating a dimensional standard for non-periodic dimensions, comprising the steps of: producing a plurality of line-space gratings in a material where each grating is formed by exposing the material to an electron beam, and controlling said exposure such that some of said gratings have different respective incident doses of energy and each of said gratings has a different contour of energy deposited at an interface of a line and a space; measuring a line width in each of said gratings; determining the incident dose value at which the line width is the same for gratings having different respective deposited energy contours; and selecting an element of a grating formed with said determined dose value as the standard for a dimension.
Claim 6
Independent Claim
123 words
A method for fabricating a dimensional standard for non-periodic dimensions, comprising the steps of: producing a plurality of line-space gratings in a material where each grating is formed by exposing the material to an electron beam, and controlling said exposure such that some of said gratings have different respective incident doses of energy and each of said gratings has a different contour of energy deposited at an interface of a line and a space; measuring a line width in each of said gratings; determining the incident dose value at which the line width is the same for gratings having different respective deposited energy contours; and selecting an element of a grating formed with said determined dose value as the standard for a dimension.
Claim 7
Dependent Claim
46 words
The method of claim 4 wherein at least some of said gratings which differ from one another in their respective deposited energy contours are formed by exposing the material to multiple subgrating patterns, wherein the locations of the subgrating patterns are shifted relative to one another.
Claim 8
Dependent Claim
83 words
The method of claim 5 wherein the gratings which differ from one another in their respective deposited energy contours are grouped according to the amount of radiant energy to which the material is exposed, and wherein the exposure of each of the multiple subgrating patterns for the gratings in a group is carried out at an incident dose of D/n, where n is the total number of exposures used to form a grating and D is the total incident dose for the grating.
Claim 9
Dependent Claim
29 words
The method of claim 6 wherein one of the gratings in a group is formed by exposing the material to n subgrating patterns that are aligned with each other.
Claim 10
Dependent Claim
61 words
The method of claim 6 wherein said gratings are arranged on a substrate in the form of a two-dimensional array wherein the gratings in one dimension of the array have the same exposure pattern but differ in dose amounts, and the gratings in the other dimension of the array have the same dose amounts but differ in their respective exposure patterns.
Claim 11
Dependent Claim
12 words
The method of claim 6 in which n is an odd number.
Claim 12
Dependent Claim
23 words
The method of claim 4 wherein said gratings are formed by means of electron-beam lithography and said material is an electron-sensitive resist material.
Claim 13
Dependent Claim
17 words
The method of claim 10 further including the step of forming said gratings in an electroplatable metal.
Claim 14
Dependent Claim
10 words
The method of claim 11 wherein said metal is gold.
Claim 15
Dependent Claim
10 words
The method of claim 11 wherein said metal is chromium.
Claim 16
Dependent Claim
54 words
The method of claim 4 further including the step of determining the amount by which the measured width of a line deviates from said dimension in a grating formed with said determined dose, to thereby identify the magnitude of a systematic error for an instrument used to measure said dimension, relative to said material.
Claim 17
Dependent Claim
24 words
The method of claim 14 further including the step of calibrating an instrument used to measure said dimension, in accordance with said systematic error.
Claim 18
Dependent Claim
13 words
The method of claim 15 wherein said instrument is a scanning electron microscope.
Claim 19
Dependent Claim
13 words
The method of claim 15 wherein said instrument is a scanning probe microscope.
Claim 20
Dependent Claim
36 words
The method of claim 17 further including the step of measuring systematic error associated with a layered structure composed of different materials by means of a scanning probe microscope calibrated in accordance with said dimensional standard.
Claim 21
Dependent Claim
32 words
The method of claim 18 including the further step of measuring systematic error associated with said layered structure by means of a scanning electron microscope calibrated in accordance with said dimensional standard.
Claim 22
Dependent Claim
25 words
The method of claim 14 further including the step of monitoring the performance of said instrument by detecting changes in said systematic error over time.
Claim 23
Dependent Claim
13 words
The method of claim 4 wherein said dimension is less than a micron.
References Cited (Backward Citations)
US3961102A
Cited
US5087537A
Cited
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| 7.5 Years (Year 8) | 2003-12-17 | 2004-06-17 | 2004-12-17 | $3760.00 | Window Closed / Lapsed |
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