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US5585167A
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Thin-film conductor and method of fabricating the same
Assignee: Panasonic Holdings Corp
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Filing: 1993-04-27
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Granted: 1996-12-17
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Expires: 2013-04-27
Abstract
Abstract A thin-film conductor is made of (Sr 1-y Ca y ) 1-x CuO z , wherein 0≦x≦0.1 and 0≦y≦0.5, and z is approximately equal to or smaller than 2. In a method of fabricating the thin-film conductor, it is preferably to heat a substrate. A first atomic layer of metal including Sr or including Sr and Ca is formed on the heated substrate. A second atomic layer of oxide containing Cu is formed on the first atomic layer. A first atomic layer of metal including Sr or including Sr and Ca is formed on the second atomic layer. These steps are repeated to form a lamination of an alternation of the first atomic layers and the second atomic layers on the substrate.
Inventors
- 👤 Toshifumi Satoh
- 👤 Hideaki Adachi
- 👤 Yo Ichikakwa
- 👤 Kentaro Setsune
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:51
CPC Classifications
H; H01; H01B; H01B1/00; H01B1/06; H01B1/08; C; C30; C30B; C30B23/00; C30B23/02; C30B29/00; C30B29/10; C30B29/16; C30B29/22; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24942; Y10T428/2495; Y10T428/24967; Y10T428/24975; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
72 words
A conductor comprising a thin-film body of a single crystal, the thin-film body including a lamination of alternating first and second layers, the first layers each consisting of a plane of Sr or Sr and Ca which has a thickness corresponding to one atom and the second layers each consisting of a plane of CuO 2 which has a thickness corresponding to one atom, the first layers each being devoid of oxygen.
Claim 2
Dependent Claim
72 words
A conductor comprising a thin-film body of a single crystal, the thin-film body including a lamination of alternating first and second layers, the first layers each consisting of a plane of Sr or Sr and Ca which has a thickness corresponding to one atom and the second layers each consisting of a plane of CuO 2 which has a thickness corresponding to one atom, the first layers each being devoid of oxygen.
Claim 3
Dependent Claim
19 words
The conductor of claim 1 which has a resistivity approximately constant in a temperature range of 10K to 270K.
Claim 4
Dependent Claim
13 words
The conductor of claim 1 wherein first and second layers total about 40.
Claim 5
Dependent Claim
16 words
The conductor of claim 1 wherein said thin-film body has a thickness of about 140 Angstroms.
Claim 6
Dependent Claim
15 words
The conductor of claim 1 further comprising a substrate with said thin-film body formed thereon.
Claim 7
Dependent Claim
91 words
A conductor comprising a thin-film body of a single crystal, the thin-film body including a lamination of alternating first and second layers, the first layers each consisting of a plane of Sr or Sr and Ca which has a thickness corresponding to one atom and the second layers each consisting of a plane of CuO 2 which has a thickness corresponding to one atom, the first layers each being devoid of oxygen; wherein first and second layers total about 40 and said thin-film body has a thickness of about 140 Angstroms.
Claim 8
Dependent Claim
91 words
A conductor comprising a thin-film body of a single crystal, the thin-film body including a lamination of alternating first and second layers, the first layers each consisting of a plane of Sr or Sr and Ca which has a thickness corresponding to one atom and the second layers each consisting of a plane of CuO 2 which has a thickness corresponding to one atom, the first layers each being devoid of oxygen; wherein first and second layers total about 40 and said thin-film body has a thickness of about 140 Angstroms.
Claim 9
Dependent Claim
15 words
The conductor of claim 6 further comprising a substrate with said thin-film body formed thereon.
References Cited (Backward Citations)
US4983575A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-12-17 | 2000-06-17 | 2000-12-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-12-17 | 2004-06-17 | 2004-12-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-12-17 | 2008-06-17 | 2008-12-17 | $7700.00 | Window Closed / Lapsed |