US5583296A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Layered diaphragm pressure sensor with connecting channel
Assignee: Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung eV
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Filing: 1993-01-19
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Granted: 1996-12-10
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Expires: 2013-01-19
Abstract
Abstract A pressure sensor comprises a substrate and a layer defining together with said substrate a pressure sensor cavity, said layer including a diaphragmlike area which is adapted to be acted upon by an external pressure. A micro-miniaturizable pressure sensor of the above-mentioned type, which is used for differential pressure measurement or for relative pressure measurement, is provided on the basis of the features that said cavity is followed by a channel which extends along the surface of said substrate, said channel comprising a layered structure including also the layer which also defines the diaphragmlike area of the pressure sensor, the ratio of the width of the channel to the thickness of the layered structure above the channel being smaller than the ratio of the smallest extension of the diaphragmlike area in the diaphragm plane to the thickness of the diaphragmlike area.
Inventors
- 👤 Wilfried Mokwa
- 👤 Michael Kandler
- 👤 Jorg Amelung
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 13:45
CPC Classifications
G; G01; G01L; G01L9/00; G01L9/0041; G01L9/0072; G01L9/0073; G01L15/00; G01L9/0042
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
175 words
A pressure sensor comprising a substrate, and a first layer of relatively uniform thickness deposited on said substrate and defining a cavity, said layer including above said cavity a diaphragm like area which is adapted to be acted upon by a pressure prevailing outside of said cavity, a channel which borders on said cavity and which extends along the surface of said substrate below said deposited first layer, said channel being adapted to be acted upon by a second pressure, wherein said channel is defined, on the one hand, by a layered structure comprising said first layer and a second layer deposited on said first layer so as to cover and reinforce said first layer, and, on the other hand, by said substrate, said second layer not extending over the diaphragml ike area, and the ratio of the width of the channel to thickness of the layered structure above the channel being smaller than the ratio of the smallest extension of the diaphragmlike area in the diaphragm plane to the thickness of the diaphragmlike area.
Claim 2
Dependent Claim
175 words
A pressure sensor comprising a substrate, and a first layer of relatively uniform thickness deposited on said substrate and defining a cavity, said layer including above said cavity a diaphragm like area which is adapted to be acted upon by a pressure prevailing outside of said cavity, a channel which borders on said cavity and which extends along the surface of said substrate below said deposited first layer, said channel being adapted to be acted upon by a second pressure, wherein said channel is defined, on the one hand, by a layered structure comprising said first layer and a second layer deposited on said first layer so as to cover and reinforce said first layer, and, on the other hand, by said substrate, said second layer not extending over the diaphragml ike area, and the ratio of the width of the channel to thickness of the layered structure above the channel being smaller than the ratio of the smallest extension of the diaphragmlike area in the diaphragm plane to the thickness of the diaphragmlike area.
Claim 3
Dependent Claim
21 words
A pressure sensor according to claim 1, wherein the first layer consists of polysilicon, and the second layer consists of polysilicon.
Claim 4
Dependent Claim
22 words
A pressure sensor according to claim 1, wherein the first layer consists of polysilicon, and the second layer consists of silicon dioxide.
Claim 5
Dependent Claim
22 words
A pressure sensor according to claim 1, wherein the first layer consists of polysilicon, and the second layer consists of silicon nitride.
Claim 6
Dependent Claim
31 words
A pressure sensor according to claims 1 wherein the substrate is provided with a rear opening extending from the rear of the substrate through said substrate and up to the channel.
Claim 7
Dependent Claim
189 words
An arrangement of pressure sensors, comprising a plurality of pressure sensors formed on a chip, wherein each pressure sensor comprises: a substrate, and a first layer of relatively Uniform thickness deposited on said substrate and defining a cavity, said layer including above said cavity, a diaphragmlike area which is adapted to be acted upon by a pressure prevailing outside of said cavity, a channel which borders on said cavity and which extends along the surface of said substrate below said deposited first layer, said channel being adapted to be acted upon by a second pressure, wherein said channel is defined, on the one hand, by a layered structure comprising said first layer and a second layer deposited on said first layer so as to cover and. reinfOrCe first layer, and, on the other hand, by said substrate. said second layer not extending over the diaphragmlike area, and the ratio of the width of the channel to the thickness of the layered structure above the channel being smaller than the ratio of the smallest extension of the diaphragmlike area in the diaphragm plane to the thickness of the diaphragmlike area.
Claim 8
Dependent Claim
189 words
An arrangement of pressure sensors, comprising a plurality of pressure sensors formed on a chip, wherein each pressure sensor comprises: a substrate, and a first layer of relatively Uniform thickness deposited on said substrate and defining a cavity, said layer including above said cavity, a diaphragmlike area which is adapted to be acted upon by a pressure prevailing outside of said cavity, a channel which borders on said cavity and which extends along the surface of said substrate below said deposited first layer, said channel being adapted to be acted upon by a second pressure, wherein said channel is defined, on the one hand, by a layered structure comprising said first layer and a second layer deposited on said first layer so as to cover and. reinfOrCe first layer, and, on the other hand, by said substrate. said second layer not extending over the diaphragmlike area, and the ratio of the width of the channel to the thickness of the layered structure above the channel being smaller than the ratio of the smallest extension of the diaphragmlike area in the diaphragm plane to the thickness of the diaphragmlike area.
Claim 9
Dependent Claim
53 words
An arrangement of pressure sensors according to claim 6, wherein each of said pressure sensors is provided with a channel bordering on the cavity of the respective pressure sensor, and the channels are concentrated into a pressure detection area on said chip so as to detect a pressure distribution with high spatial resolution.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-12-10 | 2000-06-10 | 2000-12-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-12-10 | 2004-06-10 | 2004-12-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-12-10 | 2008-06-10 | 2008-12-10 | $7700.00 | Window Closed / Lapsed |