US5581345A — Confocal laser scanning mode interference contras…

Claim 1

Independent Claim 165 words

A confocal laser scanning mode interference contrast microscope comprising: a laser source; illuminating optical means for condensing a light beam from said laser source and forming a light spot on an object to be examined; condensing optical means for condensing the light beam from said object to be examined on a detecting surface; detecting means for detecting the light beam condensed on said detecting surface; said detecting means having a substrate formed with a channel waveguide and two light detecting elements, said channel waveguide having a double mode channel waveguide region an entrance end surface on said detecting surface, and a waveguide fork which forks said double mode region into two channel waveguide regions, said two detecting elements detecting lights propagated through said two channel waveguide regions; scanning means for moving said object to be examined and said light spot relative to each other; and signal processing means for producing differential information of the object to be examined by detection signals of said detecting elements.

Claim 2

Dependent Claim 165 words

A confocal laser scanning mode interference contrast microscope comprising: a laser source; illuminating optical means for condensing a light beam from said laser source and forming a light spot on an object to be examined; condensing optical means for condensing the light beam from said object to be examined on a detecting surface; detecting means for detecting the light beam condensed on said detecting surface; said detecting means having a substrate formed with a channel waveguide and two light detecting elements, said channel waveguide having a double mode channel waveguide region an entrance end surface on said detecting surface, and a waveguide fork which forks said double mode region into two channel waveguide regions, said two detecting elements detecting lights propagated through said two channel waveguide regions; scanning means for moving said object to be examined and said light spot relative to each other; and signal processing means for producing differential information of the object to be examined by detection signals of said detecting elements.

Claim 3

Dependent Claim 31 words

A confocal laser scanning mode interference contrast microscope according to claim 1, wherein said signal processing means includes differential means outputting a difference between the signals from said two detecting elements.

Claim 4

Dependent Claim 70 words

A confocal laser scanning mode interference contrast microscope according to claim 2, wherein said double mode region of said channel waveguide satisfies one of the following relations: L≈mLc (m=1, 2, . . . ) L≈Lc (2m+1)/2, (m=0, 1, 2, . . . ) where L is the length of said double mode region, and Lc is the fully coupled length of even and odd modes in said double mode region.

Claim 5

Dependent Claim 35 words

A confocal laser scanning mode interference contrast microscope according to claim 2, wherein the substrate of said detecting means has an electro-optical effect and has an electrode provided on said double mode channel waveguide region.

Claim 6

Dependent Claim 83 words

A confocal laser scanning mode interference contrast microscope according to claim 4, which is designed such that by applying a voltage to the electrode disposed on said double mode region, the fully coupled length Lc in said double mode region is varied to Lc 1 and Lc 2 and the following relations are established relative to the a predetermined length L of said double mode region: L≃mLc 1 (m=1, 2, . . . ) L≃Lc.sub.2 (2m+1)/2 (m=0, 1, 2, . . . ).

Claim 7

Dependent Claim 34 words

A confocal laser scanning mode interference contrast microscope according to claim 2, wherein said substrate is a semiconductor substrate, and said light detecting elements are monolithically formed on said semiconductor substrate with said waveguide.

Claim 8

Dependent Claim 171 words

A confocal laser scanning mode interference contrast microscope, comprising: a substrate formed with a channel waveguide; said channel waveguide having a double mode channel waveguide region and a waveguide fork which forks said double mode region into three channel waveguide regions; a laser source for supplying a laser beam from a middle one of said three channel waveguide regions; optical means for condensing the laser beam passing through said one channel waveguide region and said double mode region to thereby form a light spot on an object to be examined, and condensing the reflected light from said object to be examined on an end surface of said double mode region; light detecting elements for detecting lights from said object to be examined passed through the outer two of said three channel waveguide regions; scanning means for moving said object to be examined and said light spot relative to each other; and signal processing means for producing differential information of said object to be examined by detection signals of said detecting elements.

Claim 9

Dependent Claim 171 words

A confocal laser scanning mode interference contrast microscope, comprising: a substrate formed with a channel waveguide; said channel waveguide having a double mode channel waveguide region and a waveguide fork which forks said double mode region into three channel waveguide regions; a laser source for supplying a laser beam from a middle one of said three channel waveguide regions; optical means for condensing the laser beam passing through said one channel waveguide region and said double mode region to thereby form a light spot on an object to be examined, and condensing the reflected light from said object to be examined on an end surface of said double mode region; light detecting elements for detecting lights from said object to be examined passed through the outer two of said three channel waveguide regions; scanning means for moving said object to be examined and said light spot relative to each other; and signal processing means for producing differential information of said object to be examined by detection signals of said detecting elements.

Claim 10

Dependent Claim 31 words

A confocal laser scanning mode interference contrast microscope according to claim 7, wherein said signal processing means includes differential means outputting a difference between the signals from said two detecting elements.

Claim 11

Dependent Claim 62 words

A confocal laser scanning mode interference contrast microscope according to claim 8, which satisfies one of the following relations: L≃mLc (m=1, 2, . . . ) L≃Lc (2m+1)/2 (m=0, 1, 2, . . . ), where L is the length of said double mode region, and Lc is the fully coupled length of even and odd modes in said double mode region.

Claim 12

Dependent Claim 33 words

A confocal laser scanning mode interference contrast microscope according to claim 8, wherein the substrate of said detecting means has an electro-optical effect and has an electrode provided on said double mode region.

Claim 13

Dependent Claim 82 words

A confocal laser scanning mode interference contrast microscope according to claim 10, which is designed such that by applying a voltage to the electrode disposed on said double mode region, the fully coupled length Lc in said double mode region is varied to Lc 1 and Lc 2 and the following relations are established relative to a predetermined length L of said double mode region: L≃mLc 1 (m=1, 2, . . . ) L≃Lc.sub.2 (2m+1)/2 (m=0, 1, 2, . . . ).

Claim 14

Dependent Claim 38 words

A confocal laser scanning mode interference contrast microscope according to claim 8, wherein said substrate is a semiconductor substrate, and said light detecting elements and said laser source are monolithically formed on said semiconductor substrate with said waveguide.

Claim 15

Dependent Claim 250 words

A confocal laser scanning mode interference contrast microscope, comprising: laser source; illuminating optical means for condensing a light beam from said laser source and forming a light spot on an object to be examined; condensing optical means for condensing the light beam from said object to be examined on a detecting surface; first and second detecting means for detecting the light beam condensed on said detecting surface, said first and second detecting means each having a substrate formed with a channel waveguide and two light detecting elements, said channel waveguide having a double mode channel waveguide region with an entrance end surface on said detecting surface, and a waveguide fork which forks said double mode region into two channel waveguide regions, said two detecting elements detecting lights propagated through said two channel waveguide regions; light dividing means for separating the light from said object to be examined to said first detecting means and said second detecting means, a widthwise direction of the double mode channel waveguide region of said first detecting means and a widthwise direction of the double mode channel waveguide region of said second detecting means being disposed so as to be orthogonal to each other through said light dividing means; and signal processing means for producing differential information of the object to be examined based on a difference between signals from the two light detecting elements of said first detecting means and a difference between signals from the two light detecting elements of said second detecting means.

Claim 16

Dependent Claim 250 words

A confocal laser scanning mode interference contrast microscope, comprising: laser source; illuminating optical means for condensing a light beam from said laser source and forming a light spot on an object to be examined; condensing optical means for condensing the light beam from said object to be examined on a detecting surface; first and second detecting means for detecting the light beam condensed on said detecting surface, said first and second detecting means each having a substrate formed with a channel waveguide and two light detecting elements, said channel waveguide having a double mode channel waveguide region with an entrance end surface on said detecting surface, and a waveguide fork which forks said double mode region into two channel waveguide regions, said two detecting elements detecting lights propagated through said two channel waveguide regions; light dividing means for separating the light from said object to be examined to said first detecting means and said second detecting means, a widthwise direction of the double mode channel waveguide region of said first detecting means and a widthwise direction of the double mode channel waveguide region of said second detecting means being disposed so as to be orthogonal to each other through said light dividing means; and signal processing means for producing differential information of the object to be examined based on a difference between signals from the two light detecting elements of said first detecting means and a difference between signals from the two light detecting elements of said second detecting means.

Claim 17

Dependent Claim 73 words

A confocal laser scanning mode interference contrast microscope according to claim 13, wherein said signal processing means effects signal processing so that a combined signal I of a difference signal I 1 from the two light detecting elements of said first detecting means and a difference signal I 2 from the two light detecting elements of said second detecting means is I=I.sub.1 sinθ+I.sub.2 cosθ (θ is an angle within a range of 0-π).

Claim 18

Dependent Claim 31 words

A confocal laser scanning mode interference contrast microscope according to claim 13, further comprising scanning means for moving said object to be examined and said light spot relative to each other.

Claim 19

Dependent Claim 69 words

A confocal laser scanning mode interference contrast microscope according to claim 13, wherein the substrate of said first detecting means has a third channel waveguide regions located between said two channel waveguide regions, and the light from said laser source is directed from said double mode region of said first detecting means onto said object by said illuminating optical means through said third channel waveguide region and said fork.

Claim 20

Dependent Claim 64 words

A confocal laser scanning mode interference contrast microscope according to claim 13, which satisfies one of the following relations: L≃mLc (m=1, 2, . . . ) L≃Lc (2m+1)/2 (m=0, 1, 2, . . . ), where L is the length of a said double mode region of, and Lc is the fully coupled length of even and odd modes in that double mode region.

Claim 21

Dependent Claim 60 words

A confocal laser scanning mode interference contrast microscope according to claim 13, wherein the substrate of at least one of said first detecting means and said second detecting means has an electro-optical effect, and further has an electrode provided for said double mode region thereof, and said microscope has power source means for varying electric power applied to said electrode.

Claim 22

Dependent Claim 78 words

A confocal laser scanning mode interference contrast microscope according to claim 18, which is designed such that by applying a voltage to said electrode, the fully coupled length Lc in the double mode region of said one detecting means is varied to Lc 1 and Lc 2 and L≃mLc 1 (m=1, 2, . . . ) L≃nc.sub.2 (2m+1)/2 (m=0, 1, 2, . . . ) are established relative to a predetermined length L of that double mode region.

Claim 23

Dependent Claim 48 words

A confocal laser scanning mode interference contrast microscope according to claim 18, wherein, for at least one of said first detecting means and said second detecting means, said substrate is a semiconductor substrate, and said light detecting elements are monolithically formed on said semiconductor substrate with said waveguide.

Claim 24

Dependent Claim 174 words

Light information detecting device for detecting information of a light flux condensed on a detecting surface, comprising: a substrate formed with a first channel waveguide, which has an entrance end surface on a predetermined detecting surface, in which an even mode and an odd mode can be excited in accordance with light incident on the entrance end surface, and which has a predetermined length propagating an excited mode; and a detecting unit for detecting light propagated in said first channel waveguide, and for providing information dependent upon a distribution of light in a widthwise direction of said first channel waveguide by interference between an even mode and an odd mode in said first channel waveguide, said detecting unit including a waveguide fork which is disposed at another end of said first channel waveguide and which forks said first channel waveguide into a plurality of channel waveguides, a plurality of light detectors for detecting light from the plurality of channel waveguides, respectively, and a signal processor for processing outputs from said plurality of light detectors.

Claim 25

Dependent Claim 174 words

Light information detecting device for detecting information of a light flux condensed on a detecting surface, comprising: a substrate formed with a first channel waveguide, which has an entrance end surface on a predetermined detecting surface, in which an even mode and an odd mode can be excited in accordance with light incident on the entrance end surface, and which has a predetermined length propagating an excited mode; and a detecting unit for detecting light propagated in said first channel waveguide, and for providing information dependent upon a distribution of light in a widthwise direction of said first channel waveguide by interference between an even mode and an odd mode in said first channel waveguide, said detecting unit including a waveguide fork which is disposed at another end of said first channel waveguide and which forks said first channel waveguide into a plurality of channel waveguides, a plurality of light detectors for detecting light from the plurality of channel waveguides, respectively, and a signal processor for processing outputs from said plurality of light detectors.

Claim 26

Dependent Claim 71 words

Light information detecting device according to claim 21, wherein said first channel waveguide satisfies either of the following relations: L≃mLc (m=1, 2, . . . ) L≃Lc(2m+1)/2 (m=0, 1, 2, . . . ), where L is the length of said first channel waveguide, and Lc is the fully coupled length in which a phase difference between an even mode and an odd mode in first said channel waveguide is 180°.

Claim 27

Dependent Claim 25 words

Light information detecting device according to claim 21, wherein said substrate has an electro-optical effect and has an electrode disposed on said first channel waveguide.

Claim 28

Dependent Claim 100 words

Light information detecting device according to claim 23, further comprising power source means for applying an electric voltage to the electrode and wherein, by applying an electric voltage to the electrode, the fully coupled length Lc in which a phase difference between an even mode and an odd mode in said first channel waveguide is 180° is varied to Lc 1 , and Lc 2 , and either of the following relations: L≃mLc 1 (m=1, 2, . . . ) L≃Lc.sub.2 (2m+1)/2 (m=0, 1, 2, . . .) for a predetermined length L of said first channel waveguide, is established.

Claim 29

Dependent Claim 18 words

Light information detecting device according to claim 24, wherein said first channel waveguide is a double mode waveguide.

Claim 30

Dependent Claim 24 words

Light information detecting device according to claim 24, wherein said first waveguide having the is two single mode waveguides disposed close to each other.

Claim 31

Dependent Claim 156 words

Light information detecting device for detecting information on light flux condensed on a detecting surface, comprising: a first optical waveguide for exciting an even mode and an odd mode in accordance with light incident on the detecting surface, said first optical waveguide having a predetermined length propagating an excited mode; and a detecting unit for detecting light propagated in said first optical waveguide, and for providing information dependent upon a distribution of light in a widthwise direction of said first optical waveguide by interference between an even mode and an odd mode in said first optical waveguide, said detecting unit including a waveguide fork which is disposed at another end of said first optical waveguide and which forks said first optical waveguide into a plurality of optical waveguides, a plurality of light detectors for detecting light from the plurality of optical waveguides, respectively, and a signal processor for processing outputs from said plurality of light detectors.

Claim 32

Dependent Claim 156 words

Light information detecting device for detecting information on light flux condensed on a detecting surface, comprising: a first optical waveguide for exciting an even mode and an odd mode in accordance with light incident on the detecting surface, said first optical waveguide having a predetermined length propagating an excited mode; and a detecting unit for detecting light propagated in said first optical waveguide, and for providing information dependent upon a distribution of light in a widthwise direction of said first optical waveguide by interference between an even mode and an odd mode in said first optical waveguide, said detecting unit including a waveguide fork which is disposed at another end of said first optical waveguide and which forks said first optical waveguide into a plurality of optical waveguides, a plurality of light detectors for detecting light from the plurality of optical waveguides, respectively, and a signal processor for processing outputs from said plurality of light detectors.

Claim 33

Dependent Claim 71 words

Light information detecting device according to claim 27, wherein said first optical waveguide satisfies either of the following relations: L≃mLc (m=1, 2, . . . ) L≃Lc(2m+1)/2 (m=0, 1, 2, . . . ), where L is the length of said first optical waveguide, and Lc is the fully coupled length in which a phase difference between an even mode and an odd mode in said first optical waveguide is 180°.

Claim 34

Dependent Claim 37 words

Light information detecting device according to claim 27, wherein said first optical waveguide is a light channel waveguide formed on a substrate which has an electro-optical effect and has an electrode disposed on the light channel waveguide.

Claim 35

Dependent Claim 112 words

Light information detecting device according to claim 29, further comprising power source means for applying an electric voltage to the electrode disposed on the light channel waveguide, and wherein, by applying an electric voltage to the electrode disposed on the light channel waveguide, the fully coupled length Lc in which a phase difference between an even mode and an odd mode in the light channel waveguide is 180° is varied to Lc 1 and Lc 2 , and either of the following relations: L≈mLc 1 (m=1, 2, . . . ) L≈Lc.sub.2 (2m+1)/2 (m=0, 1, 2, . . . ) for a predetermined length L of the light channel waveguide, is established.

Claim 36

Dependent Claim 160 words

Light information detecting method for detecting information of a light flux condensed on a detecting face at an end of a first optical waveguide, comprising: a step for exciting an even mode and an odd mode in accordance with light incident on the detecting face at said end of said first optical waveguide and propagating an excited mode along a predetermined length of said first optical waveguide; and a step for detecting light propagated in said first optical waveguide, and for providing information dependent upon a distribution of light in a widthwise direction of said first optical waveguide by interference between an even mode and an odd mode in said first optical waveguide, said detecting step including forking another end of said first optical waveguide into a plurality of optical waveguides, detecting light from the plurality of optical waveguides by a plurality of light detectors corresponding to the plurality of optical waveguides, respectively, and processing outputs from said light detectors.

Claim 37

Dependent Claim 160 words

Light information detecting method for detecting information of a light flux condensed on a detecting face at an end of a first optical waveguide, comprising: a step for exciting an even mode and an odd mode in accordance with light incident on the detecting face at said end of said first optical waveguide and propagating an excited mode along a predetermined length of said first optical waveguide; and a step for detecting light propagated in said first optical waveguide, and for providing information dependent upon a distribution of light in a widthwise direction of said first optical waveguide by interference between an even mode and an odd mode in said first optical waveguide, said detecting step including forking another end of said first optical waveguide into a plurality of optical waveguides, detecting light from the plurality of optical waveguides by a plurality of light detectors corresponding to the plurality of optical waveguides, respectively, and processing outputs from said light detectors.

Claim 38

Dependent Claim 62 words

Light information detecting method according to claim 31, wherein said first optical waveguide satisfies either of the following relations: L≃mLc (m=1, 2, . . . ) L≃Lc (2m+1)/2 (m=0, 1, 2, . . . ) where L is the length of said first optical waveguide, and Lc is the fully coupled length of even and odd modes in said first optical waveguide.

Claim 39

Dependent Claim 42 words

Light information detecting method according to claim 31, further comprising a step for varying, based on an electro-optical effect of said first optical waveguide, an optical length of said first optical waveguide by applying an electric voltage to said first optical waveguide.

Claim 40

Dependent Claim 105 words

Light information detecting method according to claim 33, wherein said step for varying the optical length of said first optical waveguide includes a step for, by applying an electric voltage to an electrode disposed on said first optical waveguide, varying the fully coupled length Lc in which a phase difference between an even mode and an odd mode in said first optical waveguide is 180° to Lc 1 and Lc 2 and satisfying either of the following relations: L≃mLc 1 (m=1, 2, . . . ) L≃Lc.sub.2 (2m+1)/2 (m=0, 1, 2, . . . ) for a predetermined length L of said first optical waveguide.

Claim 41

Dependent Claim 163 words

Light information detecting device for detecting information of light flux condensed on a detecting surface, comprising: a main optical waveguide of a predetermined length for exciting an even mode and an odd mode in accordance with light incident on a first end surface of the main optical waveguide and propagating an excited mode toward a second end surface of the main optical waveguide; a middle optical waveguide disposed at the second end surface of said main optical waveguide; first and second side optical waveguides disposed, with said middle optical waveguide being located therebetween, at the second end surface of said main optical waveguide; light source means for supplying illumination light through said middle optical waveguide to said main optical waveguide and from the first end surface of said main optical waveguide to a detection surface; and light detecting means for detecting, respectively, lights passing through the first and second side optical waveguides in accordance with a mode excited in said main optical waveguide.

Claim 42

Dependent Claim 163 words

Light information detecting device for detecting information of light flux condensed on a detecting surface, comprising: a main optical waveguide of a predetermined length for exciting an even mode and an odd mode in accordance with light incident on a first end surface of the main optical waveguide and propagating an excited mode toward a second end surface of the main optical waveguide; a middle optical waveguide disposed at the second end surface of said main optical waveguide; first and second side optical waveguides disposed, with said middle optical waveguide being located therebetween, at the second end surface of said main optical waveguide; light source means for supplying illumination light through said middle optical waveguide to said main optical waveguide and from the first end surface of said main optical waveguide to a detection surface; and light detecting means for detecting, respectively, lights passing through the first and second side optical waveguides in accordance with a mode excited in said main optical waveguide.

Claim 43

Dependent Claim 72 words

Light information detecting device according to claim 35, wherein said main optical waveguide satisfies either of the following relations: L≃mLc (m=1, 2, . . . ) L≃Lc (2m+1)/2 (m=0, 1, 2, . . . ), where L is the length of said main optical waveguide, and Lc is the fully coupled length in which a phase difference between an even mode and an odd mode in said main optical waveguide is 180°.

Claim 44

Dependent Claim 37 words

Light information detecting device according to claim 36, wherein said main optical waveguide is a light channel waveguide formed on a substrate which has an electro-optical effect and has an electrode provided on the light channel waveguide.

Claim 45

Dependent Claim 95 words

Light information detecting device for detecting information on light flux condensed on a detecting surface, comprising: an optical waveguide for exciting an even mode and an odd mode in accordance with light incident on the detecting surface, the optical waveguide having a predetermined length propagating an excited mode; and a detecting unit for dividedly detecting light from different widthwise portions of said optical waveguide to provide information dependent upon a distribution of light in the widthwise direction of said optical waveguide by interference between an even mode and an odd mode in said optical waveguide.

Claim 46

Dependent Claim 95 words

Light information detecting device for detecting information on light flux condensed on a detecting surface, comprising: an optical waveguide for exciting an even mode and an odd mode in accordance with light incident on the detecting surface, the optical waveguide having a predetermined length propagating an excited mode; and a detecting unit for dividedly detecting light from different widthwise portions of said optical waveguide to provide information dependent upon a distribution of light in the widthwise direction of said optical waveguide by interference between an even mode and an odd mode in said optical waveguide.

Claim 47

Dependent Claim 69 words

Light information detecting device according to claim 38, wherein said optical waveguide satisfies either of the following relations: L≃mLc (m=1, 2, . . . ) L≃Lc (2m+1)/2 (m=0, 1, 2, . . . ), where L is the length of said optical waveguide, and Lc is the fully coupled length in which a phase difference between an even mode and an odd mode in said optical waveguide is 180°.

Claim 48

Dependent Claim 36 words

Light information detecting device according to claim 39, wherein said optical waveguide is a light channel waveguide formed on a substrate which has an electro-optical effect and has an electrode provided on the light channel waveguide.

Claim 49

Dependent Claim 114 words

Light information detecting method for detecting information of a light flux condensed on a detecting face at an end of an optical waveguide, comprising: a step for exciting an even mode and an odd mode in accordance with light incident on the detecting face at said end of said optical waveguide and propagating an excited mode along a predetermined length of said optical waveguide; and a step for dividedly detecting light from different widthwise portions of said optical waveguide and outputting a detection result providing information dependent upon a distribution of light in a widthwise direction of said optical waveguide by interference between an even mode and an odd mode in said optical waveguide.

Claim 50

Dependent Claim 114 words

Light information detecting method for detecting information of a light flux condensed on a detecting face at an end of an optical waveguide, comprising: a step for exciting an even mode and an odd mode in accordance with light incident on the detecting face at said end of said optical waveguide and propagating an excited mode along a predetermined length of said optical waveguide; and a step for dividedly detecting light from different widthwise portions of said optical waveguide and outputting a detection result providing information dependent upon a distribution of light in a widthwise direction of said optical waveguide by interference between an even mode and an odd mode in said optical waveguide.

Claim 51

Dependent Claim 59 words

Light information detecting method according to claim 41, wherein said optical waveguide satisfies either of the following relations: L≃mLc (m=1, 2, . . . ) L≃Lc (2m+1)/2 (m=0, 1, 2, . . . ), where L is the length of said optical waveguide, and Lc is the fully coupled length of even and odd modes in said optical waveguide.

Claim 52

Dependent Claim 39 words

Light information detecting method according to claim 42, further comprising a step for varying, based on an electro-optical effect of said optical waveguide, an optical length of said optical waveguide by applying an electric voltage to said optical waveguide.

Claim 53

Dependent Claim 90 words

Light information detecting device, comprising: a substrate; a double mode channel waveguide formed on said substrate, said double mode channel waveguide having an incident end face which receives incident light, and zeroth-order mode light and first-order mode light being excited in said double mode channel waveguide in accordance with light incident on said incident end face; a photodetecting portion for detecting an intensity distribution of light propogating through said double mode channel waveguide; and a device for selectively removing the zeroth-order mode light excited in said double mode channel waveguide.

Claim 54

Dependent Claim 90 words

Light information detecting device, comprising: a substrate; a double mode channel waveguide formed on said substrate, said double mode channel waveguide having an incident end face which receives incident light, and zeroth-order mode light and first-order mode light being excited in said double mode channel waveguide in accordance with light incident on said incident end face; a photodetecting portion for detecting an intensity distribution of light propogating through said double mode channel waveguide; and a device for selectively removing the zeroth-order mode light excited in said double mode channel waveguide.

Claim 55

Dependent Claim 65 words

Light information detecting device according to claim 44, further comprising: a branch-off region which splits light propagating through said double mode channel waveguide and is formed on said substrate; and two light-distribution channel waveguides which guide light components split by said branch-off region, and are formed on said substrate, and wherein said photodetecting portion detects light components respectively emerging from said two light-distribution channel waveguides.

Claim 56

Dependent Claim 95 words

Light information detecting device according to claim 44, wherein said selective removing device includes: a TE/TM mode converter which is arranged on said double mode channel waveguide and performs selective TE/TM mode conversion of a direction of polarization of the zeroth-order mode light excited in said double mode channel waveguide; and a polarization separation device which is arranged between said TE/TM mode converter and said photodetecting portion and blocks the zeroth-order mode light which is TE/TM mode-converted by said TE/TM mode converter, so that the blocked zeroth-order mode light does not reach said photodetecting portion.

Claim 57

Dependent Claim 30 words

Light information detecting device according to claim 46, wherein said TE/TM mode converter comprises an electrode which is arranged on said double mode channel waveguide, and has a periodic structure.

Claim 58

Dependent Claim 26 words

Light information detecting device according to claim 46, wherein said polarization separation device comprises a polarization plate which is arranged in front of said photodetecting portion.

Claim 59

Dependent Claim 26 words

Light information detecting device according to claim 46, wherein said polarization separation device comprises a metal plate which is arranged on said double mode channel waveguide.

Claim 60

Dependent Claim 81 words

Light information detecting device according to claim 46, further comprising: a branch-off region which splits light propagating through said double mode channel waveguide and is formed on said substrate; and two light-distribution channel waveguides which guide light components split by said branch-off region and are formed on said substrate, and wherein said polarization separation device includes a polarization plate arranged in front of said photodetecting portion, and said photodetecting portion detects light components respectively emerging from said two light-distribution channel waveguides.

Claim 61

Dependent Claim 81 words

Light information detecting device according to claim 46, further comprising: a branch-off region which splits light propagating through said double mode channel waveguide and is formed on said substrate; and two light-distribution channel waveguides which guide light components split by said branch-off region and are formed on said substrate, and wherein said polarization separation device includes metal plates respectively arranged on said two light-distribution channel waveguides, and said photodetecting portion detects light components respectively emerging from said two light-distribution channel waveguides.

Claim 62

Dependent Claim 158 words

Light information detecting device according to claim 46, further comprising: a first branch-off region which splits light propagating through said double mode channel waveguide and is formed on said substrate; and two first light-distribution channel waveguides which guide light components split by said first branch-off region and are formed on said substrate, wherein said polarization separation device includes: two polarization separation double mode channel waveguides which are respectively connected to said first light-distribution channel waveguides, have predetermined lengths, and are formed on said substrate; two second branch-off regions which respectively split light components propagating through said polarization separation double mode channel waveguides and are formed on said substrate; and two pairs of second light-distribution channel waveguides which respectively guide light components split by said second branch-off regions and are formed on said substrate, and wherein said photodetecting portion detects light components emerging from two of said second light-distribution channel waveguides which guide light including the first-order mode light.

Claim 63

Dependent Claim 57 words

Light information detecting device according to claim 44, wherein said selective removing device comprises a coupling channel waveguide which is formed on said substrate, is arranged in the vicinity of and to be substantially parallel to said double mode channel waveguide, and can be coupled to the zeroth-order mode light propagating through said double mode channel waveguide.

Claim 64

Dependent Claim 47 words

Light information detecting device according to claim 53, wherein an effective refractive index of said coupling channel waveguide with respect to light propagating therethrough is substantially equal to an effective refractive index of said double mode channel waveguide with respect to the zeroth-order mode light propagating therethrough.

Claim 65

Dependent Claim 40 words

Light information detecting device according to claim 53, wherein said substrate has an electro-optic effect, and an electrode for applying an electric field to said coupling channel waveguide is arranged on or in the vicinity of said coupling channel waveguide.

Claim 66

Dependent Claim 65 words

Light information detecting device according to claim 55, further comprising: a branch-off region which splits light propagating through said double mode channel waveguide and is formed on said substrate; and two light-distribution channel waveguides which guide light components split by said branch-off region and are formed on said substrate, and wherein said photodetecting portion detects light components respectively emerging from said two light-distribution channel waveguides.

Claim 67

Dependent Claim 184 words

Light information detecting device according to claim 44, further comprising: a branch-off region which splits light propagating through said double mode channel waveguide and is formed on said substrate; three light-distribution channel waveguides which guide light components split by said branch-off region and are formed on said substrate, wherein said selective removing device includes: a first TE/TM mode converter which is arranged on said double mode channel waveguide, and performs selective TE/TM mode conversion of a direction of polarization of the zeroth-order mode light excited in said double mode channel waveguide, and a second TE/TM mode converter which is arranged on said double mode channel waveguide, and performs selective TE/TM mode conversion of a direction of polarization of the first-order mode light excited in said double mode channel waveguide, and wherein said photodetecting portion detects respective light components emerging from at least two outer light-distribution channel waveguides of said three light-distribution channel waveguides, and the two outer light-distribution channel waveguides guide only light which has a direction of polarization perpendicular to a direction of polarization of light incident on said double mode channel waveguide.

Claim 68

Dependent Claim 45 words

Light information detecting device according to claim 57, wherein a middle light-distribution channel waveguide of said three light-distribution channel waveguides guides only light which has a direction of polarization perpendicular to the direction of polarization of light propagating through the two outer light-distribution channel waveguides.

Claim 69

Dependent Claim 146 words

Light information detecting device according to claim 44, further comprising: a branch-off region which splits light propagating through said double mode channel waveguide and is formed on said substrate; and three light-distribution channel waveguides which guide light components split by said branch-off region and are formed on said substrate, and wherein said selective removing device includes a TE/TM mode converter which is arranged on said double mode channel waveguide, and which performs selective TE/TM mode conversion of a direction of polarization of the zeroth-order mode light excited in said double mode channel waveguide, said photodetecting portion detects respective light components emerging from at least two outer light-distribution channel waveguides of said three light-distribution channel waveguides, and the two outer light-distribution channel waveguides guide only light which has the same direction of polarization as a direction of polarization of light incident on said double mode channel waveguide.

Claim 70

Dependent Claim 45 words

Light information detecting device according to claim 59, wherein a middle light-distribution channel waveguide of said three light-distribution channel waveguides guides only light which has a direction of polarization perpendicular to the direction of polarization of light propagating through the two outer light-distribution channel waveguides.

Claim 71

Dependent Claim 91 words

Light information detecting device, comprising: a substrate; a double mode channel waveguide formed on said substrate, said double mode channel waveguide having an incident end face which receives incident light, and zeroth-order mode light and first-order mode light being excited in said double mode channel waveguide in accordance with light incident on said incident end face; a photodetecting portion for detecting an intensity distribution of light propagating through said double mode channel waveguide; and a device for selectively removing light which propagates near a center of said double mode channel waveguide.

Claim 72

Dependent Claim 91 words

Light information detecting device, comprising: a substrate; a double mode channel waveguide formed on said substrate, said double mode channel waveguide having an incident end face which receives incident light, and zeroth-order mode light and first-order mode light being excited in said double mode channel waveguide in accordance with light incident on said incident end face; a photodetecting portion for detecting an intensity distribution of light propagating through said double mode channel waveguide; and a device for selectively removing light which propagates near a center of said double mode channel waveguide.

Claim 73

Dependent Claim 65 words

Light information detecting device according to claim 61, further comprising: a branch-off region which splits light propagating through said double mode channel waveguide and is formed on said substrate; and two light-distribution channel waveguides which guide light components split by said branch-off region, and are formed on said substrate, and wherein said photodetecting portion detects light components respectively emerging from said two light-distribution channel waveguides.

Claim 74

Dependent Claim 62 words

Light information detecting device according to claim 61, wherein said selective removing device comprises a stripe-shaped metal plate which has a width smaller than a width of said double mode channel waveguide, and which is arranged on a surface of said double mode channel waveguide so that a center axis thereof coincides with a center axis of said double mode channel waveguide.

Claim 75

Dependent Claim 59 words

Light information detecting device according to claim 61, wherein said selective removing device comprises a selective removal channel waveguide which has a width smaller than a width of said double mode channel waveguide, and is connected to said double mode channel waveguide so that a center axis thereof coincides with a center axis of said double mode channel waveguide.

Claim 76

Dependent Claim 36 words

Light information detecting device according to claim 64, wherein the width of said selective removal channel waveguide is a width with which the first-order mode light propagating through said double mode channel waveguide is cut off.

Claim 77

Dependent Claim 22 words

Light information detecting device according to claim 64, further comprising a photodetector for detecting light emerging from said selective removal channel waveguide.

Claim 78

Dependent Claim 65 words

Light information detecting device according to claim 63, further comprising: a branch-off region which splits light propagating through said double mode channel waveguide and is formed on said substrate; and two light-distribution channel waveguides which guide light components split by said branch-off region and are formed on said substrate, and wherein said photodetecting portion detects light components respectively emerging from said two light-distribution channel waveguides.

Claim 79

Dependent Claim 105 words

Light information detecting device according to claim 64, further comprising: a branch-off region which splits light propagating through said double mode channel waveguide and is formed on said substrate; two light-distribution channel waveguides which guide light components split by said branch-off region, and are formed on said substrate; and a photodetector for detecting light emerging from said selective removal channel waveguide, and wherein the width of said selective removal channel waveguide is a width with which the first-order mode light propagating through said double mode channel waveguide is cut off, and said photodetecting portion detects light components respectively emerging from said two light-distribution channel waveguides.

Claim 80

Independent Claim 172 words

An apparatus for measuring a minute step height on an object to be examined, comprising: a laser source; an illuminating optical system for focusing a light beam from said laser source and forming a light spot on said object; a focusing optical system for condensing the light beam from said object on a detecting surface; and detecting means for detecting the light beam focused on said detecting surface a said detecting means having; a substrate formed with a channel waveguide which includes a double mode channel waveguide region having an entrance end on said detecting surface and at least two branch channel waveguide regions branched from said double mode region, respective detecting elements for detecting lights propagated through said branch channel waveguide regions, adding means for obtaining a sum of signals from said detecting elements, subtracting means for obtaining a difference of signals from said detecting elements, and calculating means for outputting data of said minute step height on said object based on outputs of said adding means and said subtracting means.

Claim 81

Independent Claim 172 words

An apparatus for measuring a minute step height on an object to be examined, comprising: a laser source; an illuminating optical system for focusing a light beam from said laser source and forming a light spot on said object; a focusing optical system for condensing the light beam from said object on a detecting surface; and detecting means for detecting the light beam focused on said detecting surface a said detecting means having; a substrate formed with a channel waveguide which includes a double mode channel waveguide region having an entrance end on said detecting surface and at least two branch channel waveguide regions branched from said double mode region, respective detecting elements for detecting lights propagated through said branch channel waveguide regions, adding means for obtaining a sum of signals from said detecting elements, subtracting means for obtaining a difference of signals from said detecting elements, and calculating means for outputting data of said minute step height on said object based on outputs of said adding means and said subtracting means.

Claim 82

Dependent Claim 43 words

An apparatus according to claim 69, wherein when a fully coupled length of both modes in said double mode region is Lc, the length of said double mode region L is given by L=Lc (2m+1)/2 (m=0, 1, 2, . . . . ).

Claim 83

Dependent Claim 21 words

An apparatus according to claim 70, further comprising scanning means for relatively shifting the light spot with respect to the object.

Claim 84

Dependent Claim 56 words

An apparatus according to claim 71, wherein said calculating means obtains the minute step height on said object based on output data W(s 0 ) of said adding means and output data S(s 0 ) of said subtracting means by the following equation: φ.sub.0 =C.sub.p ·S(s.sub.0)/W(s.sub.0), wherein C p is an eigen constant of said apparatus.

Claim 85

Independent Claim 137 words

A method of measuring a minute step height on an object to be examined, comprising the steps of: forming a light spot on said object by focusing a light beam from a laser source; focusing the light beam from said object on a detecting surface; and detecting the light beam focused on said detecting surface; said detecting step including the steps of: detecting intensity of lights which are propagated from an entrance end of said detecting surface through a double mode channel waveguide region and at least two branch channel waveguide regions branched from said double mode channel waveguide region; obtaining a difference and a sum of signals of the respective intensities; and calculating a signal of said minute step height on the object based on a signal of the difference and a signal of the sum.

Claim 86

Independent Claim 137 words

A method of measuring a minute step height on an object to be examined, comprising the steps of: forming a light spot on said object by focusing a light beam from a laser source; focusing the light beam from said object on a detecting surface; and detecting the light beam focused on said detecting surface; said detecting step including the steps of: detecting intensity of lights which are propagated from an entrance end of said detecting surface through a double mode channel waveguide region and at least two branch channel waveguide regions branched from said double mode channel waveguide region; obtaining a difference and a sum of signals of the respective intensities; and calculating a signal of said minute step height on the object based on a signal of the difference and a signal of the sum.

Claim 87

Dependent Claim 43 words

A method according to claim 73, wherein when a fully coupled length of both modes in said double mode region is Lc, a length of said double mode region L is given by L=Lc (2m+1)/2 (m=0, 1, 2, . . . . ).

Claim 88

Dependent Claim 21 words

A method according to claim 74, further comprising the step of relatively shifting said light spot with respect to said object.

Claim 89

Dependent Claim 56 words

A method according to claim 75, wherein said calculating step obtains the minute step height φ 0 on said object based on difference signal data S(s 0 ) and sum signal data W(s 0 ) by the following equation: φ.sub.0 =C.sub.p ·S(s.sub.0)/W(s.sub.0), wherein C p is an eigen constant of an apparatus for performing said method.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1999-12-03	2000-06-03	2000-12-03	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2003-12-03	2004-06-03	2004-12-03	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2007-12-03	2008-06-03	2008-12-03	$7700.00	Window Closed / Lapsed

Confocal laser scanning mode interference contrast microscope, and method of measuring minute step height and apparatus with said microscope

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