US5580468A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of fabricating head for recording apparatus
Assignee: Canon Inc
•
Filing: 1995-10-16
•
Granted: 1996-12-03
•
Expires: 2015-10-16
Abstract
Abstract A head for an ink jet recording apparatus including: an electro-thermal transducer for generating thermal energy for use to discharge ink; and a circuit portion electrically connected to the electro-thermal transducer, wherein the circuit portion has a first conductive layer, an insulating layer disposed on the first conductive layer, and a second conductive layer disposed on the insulating layer, and an opening portion of the insulating layer is filled with a conductor formed by a selective deposition method so that the first conductive layer and the second conductive layer are connected to each other.
Inventors
- 👤 Takashi Fujikawa
- 👤 Asao Saito
- 👤 Makoto Shibata
- 👤 Junichi Kohayashi
- 👤 Hirokazu Komuro
- 👤 Isao Kimura
- 👤 Kenji Hasegawa
- 👤 Teruo Ozaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 05:29
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/16; B41J2/1601; B41J2/1604; B41J2/14; B41J2/14016; B41J2/14072; B41J2/14088; B41J2/14112; B41J2/14129; B41J2/1621; B41J2/1623; B41J2/1626; B41J2/1628; B41J2/1631; B41J2/1632; B41J2/164; B41J2/1642; B41J2/1646; B41J2202/00; B41J2202/01; B41J2202/13
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
117 words
A method of fabricating a head for an ink jet recording apparatus having an electro-thermal transducer for generating thermal energy for use to discharge ink, and a wiring portion electrically connected to said electro-thermal transducer, which comprises the steps of: forming a first conductive layer on a substrate; forming an insulating layer on said first conductive layer; forming an opening portion in said insulating layer in which at least portion of said conductive layer is exposed therethrough; forming a conductor in said opening portion by a selective deposition method; and forming a second conductive layer on said insulating layer and said conductive layer and connecting said first conductive layer and said second conductive layer to each other.
Claim 2
Independent Claim
117 words
A method of fabricating a head for an ink jet recording apparatus having an electro-thermal transducer for generating thermal energy for use to discharge ink, and a wiring portion electrically connected to said electro-thermal transducer, which comprises the steps of: forming a first conductive layer on a substrate; forming an insulating layer on said first conductive layer; forming an opening portion in said insulating layer in which at least portion of said conductive layer is exposed therethrough; forming a conductor in said opening portion by a selective deposition method; and forming a second conductive layer on said insulating layer and said conductive layer and connecting said first conductive layer and said second conductive layer to each other.
Claim 3
Independent Claim
120 words
A method of fabricating a head for an ink jet recording apparatus having an electro-thermal transducer for generating thermal energy for use to discharge ink, and a wiring portion electrically connected to said electro-thermal transducer, which comprises the steps of: forming an insulating layer on a substrate having a conductive surface; forming an opening portion in said insulating layer in which said conductive surface is exposed therethrough; embedding a conductor in said opening portion by a selective deposition method; forming a heat-generating resistance layer on said conductor and a portion of said insulating layer to electrically connect said conductive surface to said heat-generating resistance layer; and forming a conductive layer connected to said heat-generating resistance layer on said insulating layer.
Claim 4
Independent Claim
120 words
A method of fabricating a head for an ink jet recording apparatus having an electro-thermal transducer for generating thermal energy for use to discharge ink, and a wiring portion electrically connected to said electro-thermal transducer, which comprises the steps of: forming an insulating layer on a substrate having a conductive surface; forming an opening portion in said insulating layer in which said conductive surface is exposed therethrough; embedding a conductor in said opening portion by a selective deposition method; forming a heat-generating resistance layer on said conductor and a portion of said insulating layer to electrically connect said conductive surface to said heat-generating resistance layer; and forming a conductive layer connected to said heat-generating resistance layer on said insulating layer.
Claim 5
Independent Claim
119 words
A method of fabricating a head for an ink jet recording apparatus having an electro-thermal transducer for generating thermal energy for use to discharge ink, and a wiring portion electrically connected to said electro-thermal transducer, which comprises the steps of: forming a plurality of semiconductor regions defined by semiconductor junctions on the surface of a semiconductor substrate; forming an insulating layer on said semiconductor substrate; forming a plurality of opening portions in said insulating layer in each of which said semiconductor regions is exposed therethrough; embedding conductors in said opening portions of said insulating layer by a selective deposition method; and forming a heat-generating resistance layer on a portion of said conductor and a portion of said insulating layer.
Claim 6
Independent Claim
119 words
A method of fabricating a head for an ink jet recording apparatus having an electro-thermal transducer for generating thermal energy for use to discharge ink, and a wiring portion electrically connected to said electro-thermal transducer, which comprises the steps of: forming a plurality of semiconductor regions defined by semiconductor junctions on the surface of a semiconductor substrate; forming an insulating layer on said semiconductor substrate; forming a plurality of opening portions in said insulating layer in each of which said semiconductor regions is exposed therethrough; embedding conductors in said opening portions of said insulating layer by a selective deposition method; and forming a heat-generating resistance layer on a portion of said conductor and a portion of said insulating layer.
Claim 7
Independent Claim
96 words
A method of fabricating a head for an ink jet recording apparatus having an electro-thermal transducer for generating thermal energy for use to discharge ink, and a wiring portion electrically connected to said electro-thermal transducer, wherein said wiring portion has a substrate having the surface of a semiconductor, an insulating layer formed on said substrate, and a heat-generating resistance layer formed on said insulating layer, and a pair of opening portion of said insulating layer are filled with conductors formed by a selective deposition method so that said heat-generating resistance layer is connected to said conductor.
Claim 8
Independent Claim
96 words
A method of fabricating a head for an ink jet recording apparatus having an electro-thermal transducer for generating thermal energy for use to discharge ink, and a wiring portion electrically connected to said electro-thermal transducer, wherein said wiring portion has a substrate having the surface of a semiconductor, an insulating layer formed on said substrate, and a heat-generating resistance layer formed on said insulating layer, and a pair of opening portion of said insulating layer are filled with conductors formed by a selective deposition method so that said heat-generating resistance layer is connected to said conductor.
Claim 9
Independent Claim
101 words
A method of fabricating a head for an ink jet recording apparatus having an electro-thermal transducer for generating thermal energy for use to discharge ink, and a wiring portion electrically connected to said electro-thermal transducer, which comprises the steps of: forming a pair of recessed portions in a substrate having an insulating surface; forming a pair of conductors in a pair of said recessed portion by a selective deposition method, a pair of said conductors being substantially flat with respect to said surface; and forming a heat-generating resistance layer on a pair of said conductors and a portion of said surface.
Claim 10
Independent Claim
101 words
A method of fabricating a head for an ink jet recording apparatus having an electro-thermal transducer for generating thermal energy for use to discharge ink, and a wiring portion electrically connected to said electro-thermal transducer, which comprises the steps of: forming a pair of recessed portions in a substrate having an insulating surface; forming a pair of conductors in a pair of said recessed portion by a selective deposition method, a pair of said conductors being substantially flat with respect to said surface; and forming a heat-generating resistance layer on a pair of said conductors and a portion of said surface.
Claim 11
Independent Claim
103 words
A method of fabricating a head for an ink jet recording apparatus having an electro-thermal transducer for generating thermal energy for use to discharge ink, and a wiring portion electrically connected to said electro-thermal transducer, which comprises the steps of: forming a heat-generating resistance layer on a substrate; forming a pair of conductive layers on said heat-generating resistance layer; forming an insulating layer on a pair of said conductive layers; forming an opening portion in said insulating layer in which at least portion of said conductive layer is exposed therethrough; and forming a conductor in said opening portion by a selective deposition method.
Claim 12
Independent Claim
103 words
A method of fabricating a head for an ink jet recording apparatus having an electro-thermal transducer for generating thermal energy for use to discharge ink, and a wiring portion electrically connected to said electro-thermal transducer, which comprises the steps of: forming a heat-generating resistance layer on a substrate; forming a pair of conductive layers on said heat-generating resistance layer; forming an insulating layer on a pair of said conductive layers; forming an opening portion in said insulating layer in which at least portion of said conductive layer is exposed therethrough; and forming a conductor in said opening portion by a selective deposition method.
Claim 13
Independent Claim
80 words
A method of fabricating a head for an ink jet recording apparatus having an electro-thermal transducer for generating thermal energy for use to discharge ink, and a wiring portion electrically connected to said electro-thermal transducer, which comprises the steps of: forming an undercoat layer on a substrate on the two sides of said heat-generating resistance layer for defining said electro-thermal transducer at an interval; selectively depositing a conductor on said undercoat layer; and forming a protection layer on said conductor.
Claim 14
Independent Claim
80 words
A method of fabricating a head for an ink jet recording apparatus having an electro-thermal transducer for generating thermal energy for use to discharge ink, and a wiring portion electrically connected to said electro-thermal transducer, which comprises the steps of: forming an undercoat layer on a substrate on the two sides of said heat-generating resistance layer for defining said electro-thermal transducer at an interval; selectively depositing a conductor on said undercoat layer; and forming a protection layer on said conductor.
Claim 15
Independent Claim
32 words
A method of fabricating a head for an ink jet recording apparatus according to any one of claims 1 to 7, wherein said selective deposition method is a chemical vapor deposition method.
Claim 16
Independent Claim
33 words
A method of fabricating a head for an ink jet recording apparatus according to any one of claims 1 to 7 further comprising a step of injecting ink into an ink storing portion.
References Cited (Backward Citations)
US4740796A
Cited
US4723129A
Cited
JPS5456847A
Cited
US4459600A
Cited
US4345262A
Cited
US4463359A
Cited
US4313124A
Cited
US4417251A
Cited
US4558333A
Cited
JPS59123670A
Cited
JPS59138461A
Cited
JPS6071260A
Cited
JPS61125858A
Cited
US4936952A
Cited
US5030317A
Cited
US5081474A
Cited
US5036897A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-12-03 | 2000-06-03 | 2000-12-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-12-03 | 2004-06-03 | 2004-12-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-12-03 | 2008-06-03 | 2008-12-03 | $7700.00 | Window Closed / Lapsed |