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US5580428A
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PVD sputter system having nonplanar target configuration and methods for constructing same
Assignee: Advanced Micro Devices Inc
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Filing: 1995-06-01
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Granted: 1996-12-03
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Expires: 2015-06-01
Abstract
Abstract A PVD sputter system having a nonplanar target surface is disclosed. The configuration of the nonplanar target surface is adjusted to provide improved uniformity in deposition film thickness and step coverage at the peripheral boundary regions of the substrate. Emission-inducing power is distributed independently to different portions of the nonplanar target surface so as to modify the deposition profile according to substrate size and other factors.
Inventors
- 👤 Zoran Krivokapic
- 👤 David S. Bang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 08:39
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
208 words
A method for constructing a sputter deposition apparatus having a nonplanar target configuration, comprising the steps of: (a) defining a figure of merit having the general form: M.sub.k =Σa.sub.i ·(f.sub.ik /f.sub.iR) wherein i designates an ith deposition attribute selected from a plurality of predefined deposition attributes, wherein k designates a kth nonplanar target configuration selected from a plurality of predefined different nonplanar target configurations under consideration, f ik defines a modeled ith deposition attribute of nonplanar target configuration k, f ir defines a modeled ith deposition attribute of a fixed reference configuration R, and a i is a predefined weight attached to the ith deposition attribute, at least one of weights a i for a respective value of i being other than zero; (b) determining M k for each of said plurality of predefined nonplanar target configurations; (c) identifying one or more of said configurations having the relatively highest figures of merit; and (d) configuring the nonplanar target in accordance with one of the one or more configurations identified as having the relatively highest figures of merit; wherein each of said plurality of predefined deposition attributes provides a quantitative measure corresponding to: (d.1) a rate of deposition; (d.2) a thickness of deposition; or (d.3) a uniformity of deposition.
Claim 2
Independent Claim
208 words
A method for constructing a sputter deposition apparatus having a nonplanar target configuration, comprising the steps of: (a) defining a figure of merit having the general form: M.sub.k =Σa.sub.i ·(f.sub.ik /f.sub.iR) wherein i designates an ith deposition attribute selected from a plurality of predefined deposition attributes, wherein k designates a kth nonplanar target configuration selected from a plurality of predefined different nonplanar target configurations under consideration, f ik defines a modeled ith deposition attribute of nonplanar target configuration k, f ir defines a modeled ith deposition attribute of a fixed reference configuration R, and a i is a predefined weight attached to the ith deposition attribute, at least one of weights a i for a respective value of i being other than zero; (b) determining M k for each of said plurality of predefined nonplanar target configurations; (c) identifying one or more of said configurations having the relatively highest figures of merit; and (d) configuring the nonplanar target in accordance with one of the one or more configurations identified as having the relatively highest figures of merit; wherein each of said plurality of predefined deposition attributes provides a quantitative measure corresponding to: (d.1) a rate of deposition; (d.2) a thickness of deposition; or (d.3) a uniformity of deposition.
Claim 3
Dependent Claim
53 words
The construction method of claim 1 wherein the plurality of predefined deposition attributes is selected from the group consisting of: (a) average deposition rate; (b) average bottom coverage; (c) flat coverage uniformity; (d) bottom coverage uniformity; (e) minimum sidewall bottom thickness; (f) step coverage; and (g) step coverage uniformity; (h) film thickness uniformity.
Claim 4
Dependent Claim
98 words
The construction method of claim 1 wherein: said plurality of predefined nonplanar target configurations under consideration each contain multiple target members disposed at respective heights relative to a deposition receiving surface; each target member has a respective active width; each target member has a respective power level; and said plurality of predefined nonplanar target configurations differ from one another with respect to at least one configuration parameter in the group consisting of: (a.1) target member heights; (a.2) target member active widths; (a.3) target member power levels; (a.4) number of target members; and (a.5) geometry of each target member.
Claim 5
Dependent Claim
128 words
The construction method of claim 3 wherein said step of identifying one or more of said configurations having the relatively highest figures of merit includes: (c.1) assigning one of different colors to each value of merit, where darker or otherwise more pronounced colors are assigned to respectively higher values of merit; (c.2) in a plotting space having at least two axes each representing a different one of said configuration parameters, for each determined figure of merit M k , plotting the correspondingly assigned color at a point in the plotting space corresponding to the respective target configuration k; and (c.3) after said plotting, locating regions within the plotting space having the darkest or otherwise more pronounced colors; and (c.4) identifying the respective target configurations of the located regions.
Claim 6
Dependent Claim
32 words
The construction method of claim 3 wherein said fixed reference configuration R constitutes a planar target having an effective emission width equal to the combined active emission widths of said multiple targets.
Claim 7
Dependent Claim
19 words
The construction method of claim 1 wherein the number of considered nonplanar target configurations is at least a thousand.
Claim 8
Dependent Claim
25 words
The construction method of claim 1 wherein at least two of weights a i for a respective two values of i are other than zero.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-12-03 | 2000-06-03 | 2000-12-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-12-03 | 2004-06-03 | 2004-12-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-12-03 | 2008-06-03 | 2008-12-03 | $7700.00 | Window Closed / Lapsed |