US5578501A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing a solar cell by formation of a zinc oxide transparent conductive layer
Assignee: Canon Inc
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Filing: 1995-03-10
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Granted: 1996-11-26
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Expires: 2015-03-10
Abstract
Abstract A solar cell has a semiconductor layer sandwiched between first and second electrodes, wherein a zinc oxide layer containing carbon atoms, nitrogen atoms, or carbon and nitrogen atoms is located between the semiconductor layer and at least one of the first and second electrodes. The density of carbon atoms, nitrogen atoms, or carbon and nitrogen atoms in the zinc oxide layer is constant or continuously changed within the range of 5 atm % or less.
Inventors
- 👤 Mitsuyuki Niwa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 08:47
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/20; H10F77/206; H10F77/211; H10F10/00; H10F10/10; H10F10/17; H10F71/00; H10F71/10; H10F71/103; H10F77/244; H10F77/251; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/547; Y02E10/548; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
121 words
A method of forming a solar cell comprising the following sequential steps: providing a conductive substrate, said substrate being a first electrode; forming a transparent conductive layer on said substrate, said transparent conductive layer being a first layer of zinc oxide containing at least one of carbon atoms and nitrogen atoms; annealing said first layer of zinc oxide transparent conductive layer; forming a solar cell element comprising at least one semiconductor photoelectric conversion layer on said first zinc oxide transparent conductive layer; forming a second zinc oxide transparent conductive layer on the solar element and annealing the second zinc oxide layer; forming a second, transparent electrode on the second zinc oxide layer; and forming a collector electrode on the second electrode.
Claim 2
Independent Claim
121 words
A method of forming a solar cell comprising the following sequential steps: providing a conductive substrate, said substrate being a first electrode; forming a transparent conductive layer on said substrate, said transparent conductive layer being a first layer of zinc oxide containing at least one of carbon atoms and nitrogen atoms; annealing said first layer of zinc oxide transparent conductive layer; forming a solar cell element comprising at least one semiconductor photoelectric conversion layer on said first zinc oxide transparent conductive layer; forming a second zinc oxide transparent conductive layer on the solar element and annealing the second zinc oxide layer; forming a second, transparent electrode on the second zinc oxide layer; and forming a collector electrode on the second electrode.
Claim 3
Dependent Claim
45 words
The method of forming a solar cell according to claim 1, wherein said zinc oxide transparent conductive layers are formed by at least one method selected from a vacuum depositing method, a sputtering method, and a thermal method after spraying of a metallic salt solution.
Claim 4
Dependent Claim
24 words
The method of forming a solar cell according to claim 2, wherein said zinc oxide transparent conductive layers are formed by the sputtering method.
Claim 5
Dependent Claim
20 words
The method of forming a solar cell according to claim 3, wherein said sputtering method is a reactive sputtering method.
Claim 6
Dependent Claim
20 words
The method of forming a solar cell according to claim 3, wherein said sputtering method is a magnetron sputtering method.
Claim 7
Dependent Claim
20 words
The method of forming a solar cell according to claim 3, wherein said sputtering method is an RF sputtering method.
Claim 8
Dependent Claim
46 words
The method of forming a solar cell according to claim 3, wherein said zinc oxide transparent conductive layers are formed within a vacuum apparatus in which the pressure of background gas before forming said zinc oxide transparent conductive layers are not more than 10 -4 Torr.
Claim 9
Dependent Claim
35 words
The method of forming a solar cell according to claim 7, wherein said zinc oxide transparent conductive layers are formed under a pressure of not less than 1 mTorr to not more than 1 Torr.
Claim 10
Dependent Claim
29 words
The method of forming a solar cell according to claim 1, wherein said second zinc oxide transparent conductive layer contains at least one of carbon atoms and nitrogen atoms.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-11-26 | 2000-05-27 | 2000-11-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-11-26 | 2004-05-27 | 2004-11-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-11-26 | 2008-05-27 | 2008-11-26 | $7700.00 | Window Closed / Lapsed |