US5576831A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer alignment sensor
Assignee: Tencor Instruments Inc
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Filing: 1994-06-20
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Granted: 1996-11-19
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Expires: 2014-06-20
Abstract
Abstract A surface height detection and positioning device for use in a surface inspection system. An incident beam of light impinges obliquely upon the surface, and a position detector is disposed to receive light reflected from the surface. The position detector has a sensitivity characteristic graded along a direction transverse to the surface, so that the output of the position detector is used to determine a height of the surface. The device can be incorporated into a particle detection system that scans patterned wafers with obliquely incident light to search for particles with a particle detector positioned to receive scattered light. In one embodiment, the position detector can have a width that is graded along the direction transverse to the surface, so that a scan line on the surface that is focused upon the position detector crosses the width of that detector in a time that varies as a function of the height of the surface. This time can be measured as an electrical pulse from the position detector that can be used for various purposes, including adjusting the height of the surface during scanning. In another embodiment, the position detector can have a periodic variance in light sensitivity that is graded, so that varying a height of the surface varies a phase of the output from the position detector.
Inventors
- 👤 Mehrdad Nikoonahad
- 👤 James A. Tebelskis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 14:02
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/302; G01R31/308; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/9501; G01R31/282; G01R31/2831; H; H10; H10P; H10P74/00; H10P74/20; H10P74/203
Claims Analysis
Total Claims: 42
Claim 1
Independent Claim
148 words
A system for detecting a height of a body to be optically inspected comprising, an incident beam of light directed obliquely at a surface of said body, said incident beam being at least partly reflected from said surface as a reflected beam, a scanning means for deflecting said incident beam across said surface in a line, a focusing means for focusing said reflected beam, and a first sensor disposed in a path of said reflected beam near an image plane of said surface formed by said focusing means, said sensor having a light sensitivity with a periodic variance along a direction transverse to said line and along which a position of an image of said line varies with a height of said surface, whereby a variation in said height of said surface results in a corresponding variation in phase, frequency or waveform of an output from said sensor.
Claim 2
Independent Claim
148 words
A system for detecting a height of a body to be optically inspected comprising, an incident beam of light directed obliquely at a surface of said body, said incident beam being at least partly reflected from said surface as a reflected beam, a scanning means for deflecting said incident beam across said surface in a line, a focusing means for focusing said reflected beam, and a first sensor disposed in a path of said reflected beam near an image plane of said surface formed by said focusing means, said sensor having a light sensitivity with a periodic variance along a direction transverse to said line and along which a position of an image of said line varies with a height of said surface, whereby a variation in said height of said surface results in a corresponding variation in phase, frequency or waveform of an output from said sensor.
Claim 3
Dependent Claim
140 words
The system of claim 1 further comprising, a reference second sensor with a periodic variance in light sensitivity, a beam splitter disposed in said path of said reflected beam and having means for diverting a first portion of said reflected beam toward said first sensor and a second portion of said reflected beam toward said reference second sensor, such that a first image of said line impinges upon said first sensor, and a second image of said line impinges upon said reference second sensor across a periodic variance in light sensitivity that is essentially unchanged along an orientation in which said second image of said line varies with said change in said height of said surface, and means for comparing an output of said position and said reference second sensor such that said height of said surface may be calculated.
Claim 4
Dependent Claim
23 words
The system of claim 2 wherein said periodic variance of said first sensor substantially matches said periodic variance of said reference second sensor.
Claim 5
Dependent Claim
44 words
The system of claim 2 wherein said first sensor comprises a photodetector and a mask defining an aperture adjoining the photodetector and disposed between said focusing means and said photodetector, said aperture spanned with lines and having a width oriented transversely to said direction.
Claim 6
Dependent Claim
31 words
The system of claim 1 wherein said first sensor comprises a photodetector and a mask defining a sawtooth edge adjoining the photodetector and disposed between said focusing means and said photodetector.
Claim 7
Dependent Claim
31 words
The system of claim 1 wherein said first sensor comprises a photodetector and a mask defining a serpentine edge adjoining the photodetector and disposed between said focusing means and said photodetector.
Claim 8
Dependent Claim
26 words
The system of claim 1 further comprising a plate defining a spatial filter disposed near a Fourier transform plane of said means for focusing said light.
Claim 9
Dependent Claim
25 words
The system of claim 1 further comprising a means for moving said surface in response to said variation of light detected by said first sensor.
Claim 10
Dependent Claim
179 words
A surface inspection system with height adjustment of the surface comprising, a signal responsive means for controlling a position of a body having a surface, means for impinging an incident beam of light at an oblique angle upon said surface, such that said incident beam is at least partly reflected from said surface as reflected light, means for focusing said reflected light at an image plane of said surface, a first detector disposed near said image plane, said first detector having a light sensitivity along a direction of said image plane wherein a location or an image of said surface varies with a change in a height of said surface, such that a signal from said first detector varies with said height, whereby said height of said surface may be determined and adjusted by said means for controlling said position of said body, and a surface feature detector disposed distal to said incident beam and said reflected light, whereby light from said incident beam that is scattered by a surface feature may be detected by said surface feature detector.
Claim 11
Dependent Claim
179 words
A surface inspection system with height adjustment of the surface comprising, a signal responsive means for controlling a position of a body having a surface, means for impinging an incident beam of light at an oblique angle upon said surface, such that said incident beam is at least partly reflected from said surface as reflected light, means for focusing said reflected light at an image plane of said surface, a first detector disposed near said image plane, said first detector having a light sensitivity along a direction of said image plane wherein a location or an image of said surface varies with a change in a height of said surface, such that a signal from said first detector varies with said height, whereby said height of said surface may be determined and adjusted by said means for controlling said position of said body, and a surface feature detector disposed distal to said incident beam and said reflected light, whereby light from said incident beam that is scattered by a surface feature may be detected by said surface feature detector.
Claim 12
Dependent Claim
24 words
The system of claim 9 further comprising a spatial filter disposed near a Fourier transform plane of said means for focusing said reflected light.
Claim 13
Dependent Claim
52 words
The system of claim 9 further comprising, a beam splitter means for diverting part of said reflected light toward a reference second detector, means for comparing light detected by said first detector with light detected by said reference second detector, wherein variations in an intensity of said reflected light can be adjusted.
Claim 14
Dependent Claim
27 words
The system of claim 11 further comprising means for scanning said incident beam across said surface along a line transverse to an axis of said incident beam.
Claim 15
Dependent Claim
41 words
The system of claim 12 wherein said first detector comprises a photodetector and an opaque body defining an aperture adjoining the photodetector and disposed between said focusing means and said photodetector, said aperture having a width oriented transversely to said direction.
Claim 16
Dependent Claim
20 words
The system of claim 12 wherein said first detector has a periodic variance in light sensitivity transverse to said direction.
Claim 17
Dependent Claim
72 words
The system of claim 12 wherein said first detector has a periodic variance in light sensitivity transverse to said direction, and said reference second detector has a periodic variance in sensitivity substantially matching said periodic variance of said first detector and oriented such that an image of said surface impinges upon said reference second detector at a phase of said periodic variance that is essentially constant over different heights of said surface.
Claim 18
Independent Claim
88 words
A method for detecting surface features with active surface realignment for surface inspection comprising, scanning an incident beam of light across a surface at an oblique angle, detecting a reflection of said incident beam such that an alignment of said surface and said beam is determined, detecting whether said incident beam is scattered, thereby determining whether a feature is located at a spot on said surface, and realigning said surface, during said scanning, such that a location of a spot on said surface may be more precisely determined.
Claim 19
Independent Claim
88 words
A method for detecting surface features with active surface realignment for surface inspection comprising, scanning an incident beam of light across a surface at an oblique angle, detecting a reflection of said incident beam such that an alignment of said surface and said beam is determined, detecting whether said incident beam is scattered, thereby determining whether a feature is located at a spot on said surface, and realigning said surface, during said scanning, such that a location of a spot on said surface may be more precisely determined.
Claim 20
Dependent Claim
53 words
The method of claim 16 wherein said detecting said reflection of said incident beam includes, orienting a first detector having a light sensitivity in a direction such that varying a height of said surface varies an output of said first detector, and focusing said reflection of said incident beam upon said first detector.
Claim 21
Dependent Claim
25 words
The method of claim 16 wherein said detecting said reflection of said incident beam includes detecting a location of said reflection upon said first detector.
Claim 22
Dependent Claim
37 words
The method of claim 17 wherein said first detector has a width along said direction and said detecting said reflection includes impinging said reflection on said first detector and timing a pulse generated by said first detector.
Claim 23
Dependent Claim
46 words
The method of claim 17 wherein said first detector has a light sensitivity that varies periodically transversely to said direction and said detecting said reflection of said incident beam includes impinging said reflection upon said first detector and measuring a wave output by said first detector.
Claim 24
Dependent Claim
50 words
The method of claim 17 further comprising, impinging a portion of said reflection upon a second reference detector, comparing a signal from said first detector with a signal from said reference second detector, and compensating said signal from said first detector based upon said signal from said reference second detector.
Claim 25
Independent Claim
119 words
A system for detecting a height of a body, comprising, an incident beam of light directed obliquely at a surface of said body, said incident beam being at least partly reflected at a spot on said surface as a reflected beam, means for scanning said incident beam across said surface in a scan line; a focusing means for focusing said reflected beam, and a sensor disposed in a path of said reflected beam near an image plane of said surface formed by said focusing means so that an image of at least a portion of the scan line is projected onto the sensor, wherein said sensor provides a pulsed signal whose width varies with a height of said surface.
Claim 26
Independent Claim
119 words
A system for detecting a height of a body, comprising, an incident beam of light directed obliquely at a surface of said body, said incident beam being at least partly reflected at a spot on said surface as a reflected beam, means for scanning said incident beam across said surface in a scan line; a focusing means for focusing said reflected beam, and a sensor disposed in a path of said reflected beam near an image plane of said surface formed by said focusing means so that an image of at least a portion of the scan line is projected onto the sensor, wherein said sensor provides a pulsed signal whose width varies with a height of said surface.
Claim 27
Dependent Claim
59 words
The system of claim 22 further comprising: a reference sensor; a beam splitter disposed between said surface and said sensor and having means for diverting a portion of said reflected beam toward the reference sensor; and means for comparing light detected by said sensor with that from said reference sensor to compensate for intensity variations of said reflected beam.
Claim 28
Dependent Claim
43 words
The system of claim 22, wherein said sensor comprises: a photodetector; and an aperture adjoining the photodetector and disposed between said focusing means and said photodetector, said aperture having a width oriented transversely to said direction and varying in value along said direction.
Claim 29
Dependent Claim
47 words
The system of claim 21, wherein said aperture comprises an opaque body defining a V-shaped mask hole therein, said hole having a top and a nadir, adjoining the photodetector and disposed between said focusing means and said photodetector, said top spaced from said nadir along said direction.
Claim 30
Dependent Claim
12 words
The system of claim 24, wherein said aperture is sawtooth-shaped or serpentine-shaped.
Claim 31
Dependent Claim
27 words
The system of claim 22, wherein said sensor comprises a photodetective face with a width oriented transversely to said direction and varying in value along said direction.
Claim 32
Dependent Claim
17 words
The system of claim 22, wherein said sensor has periodically variable light sensitivity transverse to said direction.
Claim 33
Dependent Claim
29 words
The system of claim 22, wherein said sensor comprises: a photodetector; and a partly translucent filter adjoining the photodetector, said filter having a translucence that varies along said direction.
Claim 34
Dependent Claim
23 words
The system of claim 22, further comprising a plate defining a spatial filter disposed near a Fourier transform plane of said focusing means.
Claim 35
Dependent Claim
24 words
The system of claim 22 further comprising a means for moving said surface in response to said variation of light detected by said sensor.
Claim 36
Dependent Claim
13 words
The system of claim 22, wherein said direction is transverse to said surface.
Claim 37
Independent Claim
125 words
A system for detecting a height of a body, comprising, an incident beam of light directed obliquely at a surface of said body, said incident beam being at least partly reflected at a line on said surface; focusing means for focusing said at least part reflection of said incident beam to provide an image of said line; and a sensor disposed in a path of said focused reflection near an image plane of said surface formed by said focusing means so that an image of at least a portion of the line is projected onto the sensor, wherein said sensor provides a signal as a function of the length of said image projected onto the sensor, said length varying with a height of said surface.
Claim 38
Independent Claim
125 words
A system for detecting a height of a body, comprising, an incident beam of light directed obliquely at a surface of said body, said incident beam being at least partly reflected at a line on said surface; focusing means for focusing said at least part reflection of said incident beam to provide an image of said line; and a sensor disposed in a path of said focused reflection near an image plane of said surface formed by said focusing means so that an image of at least a portion of the line is projected onto the sensor, wherein said sensor provides a signal as a function of the length of said image projected onto the sensor, said length varying with a height of said surface.
Claim 39
Independent Claim
116 words
A method for detecting a height of a body, comprising the steps of: directing an incident beam of light obliquely at a surface of said body, said incident beam being at least partly reflected at a line on said surface; focusing said at least part reflection of said incident beam to provide an image of said line; and sensing an image of at least a portion of the line in a path of said focused reflection near an image plane of said surface formed by said focusing step, and providing a signal as a function of the length of said at least a portion of the line, said length varying with a height of said surface.
Claim 40
Independent Claim
116 words
A method for detecting a height of a body, comprising the steps of: directing an incident beam of light obliquely at a surface of said body, said incident beam being at least partly reflected at a line on said surface; focusing said at least part reflection of said incident beam to provide an image of said line; and sensing an image of at least a portion of the line in a path of said focused reflection near an image plane of said surface formed by said focusing step, and providing a signal as a function of the length of said at least a portion of the line, said length varying with a height of said surface.
Claim 41
Independent Claim
104 words
A method for detecting a height of a body, comprising the steps of: directing an incident beam of light obliquely at a surface of said body, said incident beam being at least partly reflected at a spot on said surface as a reflected beam; scanning said incident beam across said surface in a scan line; focusing said reflected beam; and sensing an image of at least a portion of the line in a path of said focused reflection near an image plane of said surface formed by said focusing step, and providing a pulsed signal whose width varies with a height of said surface.
Claim 42
Independent Claim
104 words
A method for detecting a height of a body, comprising the steps of: directing an incident beam of light obliquely at a surface of said body, said incident beam being at least partly reflected at a spot on said surface as a reflected beam; scanning said incident beam across said surface in a scan line; focusing said reflected beam; and sensing an image of at least a portion of the line in a path of said focused reflection near an image plane of said surface formed by said focusing step, and providing a pulsed signal whose width varies with a height of said surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-11-19 | 2000-05-20 | 2000-11-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-11-19 | 2004-05-20 | 2004-11-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-11-19 | 2008-05-20 | 2008-11-19 | $7700.00 | Window Closed / Lapsed |