US5573975A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Surface-normal semiconductor optical cavity devices
Assignee: Avago Technologies International Sales Pte Ltd
•
Filing: 1995-04-06
•
Granted: 1996-11-12
•
Expires: 2015-04-06
Abstract
Abstract A semiconductor device is provided that includes an optical cavity that is designed to provide a prescribed resonant optical wavelength. The optical cavity includes a mirror structure deposited on top of a substrate and a multi-layer region such as an electroabsorptive region, for example, deposited over the mirror structure. A partial antireflective coating is deposited over the multi-layer region. The mirror structure and the multilayer region have a thickness variation sufficient to yield a resonant optical wavelength that deviates from the prescribed resonant wavelength. The partial antireflective coating has a non-uniform thickness variation that causes the resonant optical wavelength to shift substantially toward the prescribed resonant optical wavelength.
Inventors
- 👤 John E. Cunningham
- 👤 Keith W. Goossen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 16:20
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/84; G; G02; G02F; G02F1/00; G02F1/01; G02F1/21; G02F1/218; H01; H01S; H01S5/00; H01S5/10; H01S5/18; H01S5/183; H01S5/18361; H10H20/81; H10H20/814; H10H20/8142; H01S5/0014; H01S5/0042
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
74 words
A method for fabricating a semiconductor optical cavity device, comprising: successively depositing layers that constitute a mirror structure onto a substrate; successively depositing layers that constitute a multi-layer region onto said mirror structure; providing a partial antireflective coating over said multi-layer region such that said coating has a thickness variation over its extent that is equal in sign to, but greater in magnitude than, thickness variations in the multi-layer region and the mirror structure.
Claim 2
Independent Claim
74 words
A method for fabricating a semiconductor optical cavity device, comprising: successively depositing layers that constitute a mirror structure onto a substrate; successively depositing layers that constitute a multi-layer region onto said mirror structure; providing a partial antireflective coating over said multi-layer region such that said coating has a thickness variation over its extent that is equal in sign to, but greater in magnitude than, thickness variations in the multi-layer region and the mirror structure.
Claim 3
Dependent Claim
23 words
The method of claim 1 wherein the step of providing a partial antireflective coating comprises the step of depositing the partial antireflective coating.
Claim 4
Dependent Claim
29 words
The method of claim 2 wherein said partial antireflective coating is deposited so that it has a thickness variation at least equal to approximately 10% over its entire extent.
Claim 5
Dependent Claim
24 words
The method of claim 1 wherein the deposition step further comprises the step of etching the partial reflective coating to achieve said thickness variation.
Claim 6
Dependent Claim
15 words
The method of claim 1 wherein the deposition steps are performed by molecular beam epitaxy.
Claim 7
Dependent Claim
20 words
The method of claim 5 wherein the step of providing the partial antireflective coating is performed by chemical vapor deposition.
Claim 8
Dependent Claim
38 words
The method of claim 5 wherein the step of providing the partial antireflective coating comprises the step of depositing the coating from a source positioned closer to the substrate than a source employed to deposit the multi-layer region.
References Cited (Backward Citations)
JPS61208259A
Cited
US5005058A
Cited
US5077587A
Cited
US5177581A
Cited
US5293392A
Cited
US5298454A
Cited
US5397739A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-11-12 | 2000-05-13 | 2000-11-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-11-12 | 2004-05-13 | 2004-11-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-11-12 | 2008-05-13 | 2008-11-12 | $7700.00 | Window Closed / Lapsed |