US5573596A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Arc suppression in a plasma processing system
Assignee: Applied Materials Inc
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Filing: 1994-01-28
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Granted: 1996-11-12
•
Expires: 2014-01-28
Abstract
Abstract A reactive ion etching or magnetically enhanced reactive ion etching system consists of a cathode support structure, a shield structure disposed around the cathode, an insulator disposed between the cathode and the shield structure, and a clamping ring capable of mating with the top edge of the insulator. The insulator has a generally cylindrical shape with a flange that extends outward between the shield structure and the clamping ring. A gap between the clamping ring and the top edge of the insulator is controlled to 20 thousandths of an inch or less to restrict an RF coupling path between the shield and the cathode. In addition, the flange acts to interrupt the plasma conduction path between the shield structure and the cathode. By inhibiting plasma conduction between the shield and the cathode, reactive ion etching systems in accordance with the present invention operate in a higher pressure, higher power regime without arcing or exciting a secondary plasma.
Inventors
- 👤 Gerald Z. Yin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:25
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32623; H01J37/32715; H01J37/32532; H01J37/32651; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0418; H10P72/0421; H01J2237/00; H01J2237/02; H01J2237/0203; H01J2237/0206
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
143 words
An etching system defining a controlled subatmospheric environment containing ionizable gas, and for use with a high frequency power source, comprising: a cathode within said controlled subatmospheric environment coupled to the high frequency power source and capable of exciting a plasma; a shield structure disposed adjacent to and about at least a portion of said cathode, wherein said shield structure may be maintained at an electrical potential different from said cathode; and an insulating structure disposed between said cathode and shield structure, with any gaps within said insulating structure, or between said insulating structure and said cathode or shield structure, which may define a gas conduction path between said cathode and shield structure being limited over at least a portion of any such path to less than the threshold thickness which would allow the generation of a secondary plasma within such a path.
Claim 2
Dependent Claim
143 words
An etching system defining a controlled subatmospheric environment containing ionizable gas, and for use with a high frequency power source, comprising: a cathode within said controlled subatmospheric environment coupled to the high frequency power source and capable of exciting a plasma; a shield structure disposed adjacent to and about at least a portion of said cathode, wherein said shield structure may be maintained at an electrical potential different from said cathode; and an insulating structure disposed between said cathode and shield structure, with any gaps within said insulating structure, or between said insulating structure and said cathode or shield structure, which may define a gas conduction path between said cathode and shield structure being limited over at least a portion of any such path to less than the threshold thickness which would allow the generation of a secondary plasma within such a path.
Claim 3
Dependent Claim
30 words
An etching system as in claim 1, in which said insulating structure between said cathode and shield structure extends outwardly at least to the outer perimeter of said shield structure.
Claim 4
Dependent Claim
33 words
An etching system as in claim 1, wherein the thickness of any said gap is limited to less than about twenty thousandths of an inch over at least a portion of said path.
Claim 5
Dependent Claim
23 words
An etching system as in claim 1, wherein said controlled subatmospheric environment is maintained at a pressure of less than about 250 milliTorr.
Claim 6
Dependent Claim
30 words
An etching system as in claim 1, wherein said controlled subatmospheric environment is maintained at a pressure within the range of greater than about 150 milliTorr to about 300 milliTorr.
Claim 7
Dependent Claim
26 words
An etching system as in claim 5, wherein the power input by said high frequency power source to said cathode is in excess of 600 Watts.
Claim 8
Dependent Claim
153 words
An etching system comprising: a high frequency power source; a cathode coupled to said high frequency power source so that said cathode is capable of exciting a plasma in a region adjacent to said cathode; a shield structure disposed adjacent to and enclosing at least a portion of said cathode, wherein said shield structure may be maintained at an electrical potential different from said cathode; and an insulating assembly disposed between said cathode and said shield structure, said insulating assembly having a projecting portion extending at least to the outer perimeter of said shield structure, wherein said insulating assembly defines one or more gaps therein, or between said insulating assembly and said cathode or said shield structure, said one or more gaps comprising at least a portion of a gas conduction path between said shield structure and said cathode, and wherein said projecting portion of said insulating assembly interrupts said gas conduction path.
Claim 9
Dependent Claim
153 words
An etching system comprising: a high frequency power source; a cathode coupled to said high frequency power source so that said cathode is capable of exciting a plasma in a region adjacent to said cathode; a shield structure disposed adjacent to and enclosing at least a portion of said cathode, wherein said shield structure may be maintained at an electrical potential different from said cathode; and an insulating assembly disposed between said cathode and said shield structure, said insulating assembly having a projecting portion extending at least to the outer perimeter of said shield structure, wherein said insulating assembly defines one or more gaps therein, or between said insulating assembly and said cathode or said shield structure, said one or more gaps comprising at least a portion of a gas conduction path between said shield structure and said cathode, and wherein said projecting portion of said insulating assembly interrupts said gas conduction path.
Claim 10
Dependent Claim
45 words
The etching system of claim 7 wherein the thickness of at least a portion of said gas conduction path is less than the threshold thickness necessary to allow the generation of a secondary plasma within said at least a portion of said gas conduction path.
Claim 11
Dependent Claim
28 words
The etching system of claim 7 wherein the thickness of at least a portion of said gas conduction path is less than about twenty thousandths of an inch.
Claim 12
Dependent Claim
23 words
The etching system of claim 7 wherein said insulating assembly substantially blocks said gas conduction path between said shield structure and said cathode.
Claim 13
Dependent Claim
27 words
The etching system of claim 7 wherein said insulating assembly acts to divert said gas conduction path through a region having a low density of ionized gas.
Claim 14
Dependent Claim
33 words
The etching system of claim 7 wherein said insulating assembly comprises a substantially cylindrical body of dielectric material and wherein said projecting portion of said insulating assembly has a generally rectangular cross section.
Claim 15
Dependent Claim
29 words
The etching system of claim 12 wherein said projecting portion of said insulating assembly extends beyond both the perimeter of said cathode and the perimeter of said shield structure.
Claim 16
Dependent Claim
157 words
An etching system comprising: a high frequency power source; a cathode coupled to said high frequency power source so that said cathode is capable of exciting a plasma in region adjacent to said cathode; a shield structure disposed adjacent to at least a portion of said cathode, wherein said shield structure may be maintained at an electrical potential different from said cathode; an insulating structure disposed between said cathode and said shield structure, said insulating structure having an edge extending beyond either an edge of said cathode or an edge of said shield structure; and a cap structure disposed adjacent to an edge of said cathode, wherein said cap structure is fitted to said edge of said insulating structure so that said cap structure is separated from said edge of said insulating structure by a sufficiently thin gap so that a secondary plasma is not generated within said gap at operating pressures in excess of 150 milliTorr.
Claim 17
Dependent Claim
157 words
An etching system comprising: a high frequency power source; a cathode coupled to said high frequency power source so that said cathode is capable of exciting a plasma in region adjacent to said cathode; a shield structure disposed adjacent to at least a portion of said cathode, wherein said shield structure may be maintained at an electrical potential different from said cathode; an insulating structure disposed between said cathode and said shield structure, said insulating structure having an edge extending beyond either an edge of said cathode or an edge of said shield structure; and a cap structure disposed adjacent to an edge of said cathode, wherein said cap structure is fitted to said edge of said insulating structure so that said cap structure is separated from said edge of said insulating structure by a sufficiently thin gap so that a secondary plasma is not generated within said gap at operating pressures in excess of 150 milliTorr.
Claim 18
Dependent Claim
21 words
The etching system of claim 14 wherein said cap structure comprises a channel disposed about said edge of said insulating structure.
Claim 19
Dependent Claim
18 words
The etching system of claim 14 wherein said gap is less than about 20 thousandths of an inch.
Claim 20
Dependent Claim
26 words
The etching system of claim 14 further comprising a flange extending from said insulating structure between said cap structure and said edge of said shield structure.
Claim 21
Dependent Claim
32 words
The etching system of claim 17 wherein said insulating structure comprises a substantially cylindrical body of dielectric material and wherein said edge of said insulating structure has a generally rectangular cross section.
Claim 22
Dependent Claim
28 words
The etching system of claim 17 wherein said edge of said insulating structure extends beyond both said edge of said cathode and said edge of said shield structure.
Claim 23
Dependent Claim
29 words
The etching system of claim 18 wherein said cap structure comprises a clamping ring for holding a semiconductor wafer on a surface of said cathode during an etching operation.
Claim 24
Dependent Claim
15 words
The etching system of claim 20 wherein said insulating structure and said flange comprise quartz.
Claim 25
Dependent Claim
29 words
The etching system of claim 17 wherein said cap structure comprises a channel having a generally rectangular cross section capable of mating to said edge of said insulating structure.
Claim 26
Dependent Claim
33 words
The etching system of claim 17 wherein a surface of said flange is disposed adjacent to said cap structure and wherein another surface of said flange is disposed adjacent to said shield structure.
Claim 27
Dependent Claim
31 words
The etching system of claim 23 wherein said flange has a generally rectangular cross section and wherein a surface of said flange is flush with a surface of said shield structure.
Claim 28
Dependent Claim
114 words
A shielded cathode etching system comprising: a cathode coupled to a high frequency power source capable of exciting a plasma; a shield structure disposed adjacent to at least a portion of said cathode, wherein said shield structure may be maintained at an electrical potential different from said cathode; an insulating structure disposed between said cathode and said shield structure, said insulating structure comprising, an edge extending beyond either an edge of said cathode or an edge of said shield structure, and means for restricting plasma conduction between said cathode and said shield structure at operating pressures of 150 milliTorr or greater; and means for temporarily holding a substrate in place during an etching operation.
Claim 29
Dependent Claim
114 words
A shielded cathode etching system comprising: a cathode coupled to a high frequency power source capable of exciting a plasma; a shield structure disposed adjacent to at least a portion of said cathode, wherein said shield structure may be maintained at an electrical potential different from said cathode; an insulating structure disposed between said cathode and said shield structure, said insulating structure comprising, an edge extending beyond either an edge of said cathode or an edge of said shield structure, and means for restricting plasma conduction between said cathode and said shield structure at operating pressures of 150 milliTorr or greater; and means for temporarily holding a substrate in place during an etching operation.
Claim 30
Dependent Claim
31 words
The shielded cathode etching system of claim 25 wherein said means for restricting plasma conduction comprises means for restricting plasma conduction at input RF power levels in excess of 500 Watts.
Claim 31
Dependent Claim
34 words
The shielded cathode etching system of claim 25 wherein said means for restricting plasma conduction comprises a dielectric structure disposed so as to substantially block plasma conduction between said cathode and said shield structure.
Claim 32
Dependent Claim
31 words
The shielded cathode etching system of claim 25 wherein said means for restricting plasma conduction comprises a dielectric structure defining a gas conduction path between said cathode and said shield structure.
Claim 33
Dependent Claim
26 words
The shielded cathode etching system of claim 28 wherein at least a portion of said gas conduction path has a width smaller than a threshold width.
Claim 34
Dependent Claim
29 words
The shielded cathode etching system of claim 28 wherein at least a portion of said gas conduction path has a width smaller than about twenty thousandths of an inch.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-11-12 | 2000-05-13 | 2000-11-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-11-12 | 2004-05-13 | 2004-11-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-11-12 | 2008-05-13 | 2008-11-12 | $7700.00 | Window Closed / Lapsed |