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US5569544A Expired / Lapsed US ⏱️ 0.0 years remaining

Magnetoresistive structure comprising ferromagnetic thin films and intermediate layers of less than 30 angstroms formed of alloys having immiscible components

Assignee: NVE Corp
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Filing: 1994-01-18
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Granted: 1996-10-29
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Expires: 2014-01-18
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Abstract

Abstract A magnetoresistive layered structure having on a substrate two or more magnetoresistive, anisotropic ferromagnetic thin-films each two of which are separated by an intermediate layer on a substrate of less than 50 Å thickness formed of a substantially nonmagnetic, conductive alloy having two immiscible components therein. A further component to provide temperature stability in some circumstances is to be at least partially miscible in the first two components. Such structures can be formed as a sensor by having them electrically connected together with one positioned in a gap between magnetic material masses and one shielded by one of such masses.

Inventors

  • 👤 James M. Daughton

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 22:54
CPC Classifications
G; G01; G01R; G01R33/00; G01R33/02; G01R33/06; G01R33/09; G01R33/093; B; B82; B82Y; B82Y25/00; B82Y10/00; G11; G11B; G11B5/00; G11B5/127; G11B5/33; G11B5/39; G11B5/3903; G11B5/3906; G11B5/3945; G11B5/3948; H; H01; H01F; H01F10/00; H01F10/32; H01F10/324; H01F10/325; H10; H10N; H10N50/00; H10N50/10; H10N50/80; H10N50/85; G11B2005/3996; Y; Y10; Y10S; Y10S428/00; Y10S428/90; Y10S428/922; Y10S428/9265; Y10S428/928; Y10T; Y10T428/00; Y10T428/11; Y10T428/1107; Y10T428/1121; Y10T428/1129; Y10T428/12; Y10T428/12493; Y10T428/12632; Y10T428/12771; Y10T428/12861; Y10T428/12903; Y10T428/1291; Y10T428/12931

Claims Analysis

Total Claims: 47
Claim 1
Independent Claim 83 words
A magnetoresistive thin-film layered structure, said structure comprising: a substrate having a major surface portion; a magnetoresistive, anisotropic, first ferromagnetic thin-film provided on said substrate major surface portion; an intermediate layer provided on said first ferromagnetic thin-film with a thickness of less than 30 Å, said intermediate layer being formed of a substantially nonmagnetic, conductive alloy having two substantially immiscible components therein and a third at least partially miscible component therein; and a magnetoresistive, anisotropic, second ferromagnetic thin-film provided on said intermediate layer.
Claim 2
Dependent Claim 83 words
A magnetoresistive thin-film layered structure, said structure comprising: a substrate having a major surface portion; a magnetoresistive, anisotropic, first ferromagnetic thin-film provided on said substrate major surface portion; an intermediate layer provided on said first ferromagnetic thin-film with a thickness of less than 30 Å, said intermediate layer being formed of a substantially nonmagnetic, conductive alloy having two substantially immiscible components therein and a third at least partially miscible component therein; and a magnetoresistive, anisotropic, second ferromagnetic thin-film provided on said intermediate layer.
Claim 3
Dependent Claim 14 words
The structure of claim 1 wherein said substrate major surface portion is electrically insulative.
Claim 4
Dependent Claim 18 words
The structure of claim 1 wherein said first ferromagnetic thin-film has a thickness of less than 100 Å.
Claim 5
Dependent Claim 32 words
The structure of claim 1 wherein said first ferromagnetic thin-film is a two strata film with that strata thereof at said intermediate layer having a greater magnetic moment than that strata remaining.
Claim 6
Dependent Claim 26 words
The structure of claim 1 wherein said intermediate layer has substantially that same form in that same crystal lattice class as does said first ferromagnetic thin-film.
Claim 7
Dependent Claim 57 words
The structure of claim 1 wherein said alloy has one said immiscible component therein in greater proportion than that one remaining and in greater proportion than said at least partially miscible component, and with these latter two components being present in said alloy in amounts sufficient to permit antiferromagnetic coupling between said first and second ferromagnetic thin-films.
Claim 8
Dependent Claim 14 words
The structure of claim 1 wherein said substantially immiscible components are copper and silver.
Claim 9
Dependent Claim 14 words
The structure of claim 1 wherein said at least partially miscible component is gold.
Claim 10
Dependent Claim 18 words
The structure of claim 1 wherein said second ferromagnetic thin-film has a thickness of less than 100 Å.
Claim 11
Dependent Claim 32 words
The structure of claim 1 wherein said second ferromagnetic thin-film is a two strata film with that strata thereof at said intermediate layer having a greater magnetic moment than that strata remaining.
Claim 12
Dependent Claim 25 words
The structure of claim 1 wherein said first ferromagnetic thin-film has that same form in that same crystal lattice class as does said intermediate layer.
Claim 13
Dependent Claim 34 words
The structure of claim 1 wherein there is a plurality of similar intermediate layers with sufficient further magnetoresistive, anisotropic, ferromagnetic thin-films so as to have one on each side of each said intermediate layer.
Claim 14
Dependent Claim 51 words
The structure of claim 1 wherein said magnetoresistive thin-film layered structure is a first structure and is one of a plurality of structures each comprising a succession of layers like those in that succession of said first ferromagnetic layer, said intermediate layer, and said second ferromagnetic layer in said first structure.
Claim 15
Dependent Claim 18 words
The structure of claim 2 wherein said substrate is an amorphous material at said major surface portion thereof.
Claim 16
Dependent Claim 18 words
The structure of claim 2 wherein said substrate is a crystalline material at said major surface portion thereof.
Claim 17
Dependent Claim 47 words
The structure of claim 4 wherein said first strata of said first ferromagnetic thin-film is on said substrate major surface and comprises a mixture of cobalt, iron and nickel, and wherein said second strata thereof supports said intermediate layer and comprises a mixture of cobalt and iron.
Claim 18
Dependent Claim 55 words
The structure of claim 4 wherein said first strata of said first ferromagnetic thin-film is on said substrate major surface and has a particular form in a crystal lattice class, and wherein said second strata thereof supports said intermediate layer and has that same form in that same crystal class as does said first strata.
Claim 19
Dependent Claim 20 words
The structure of claim 5 wherein said intermediate layer and said first ferromagnetic thin-film each have approximately equal lattice constants.
Claim 20
Dependent Claim 14 words
The structure of claim 7 wherein said at least partially miscible component is gold.
Claim 21
Dependent Claim 48 words
The structure of claim 10 wherein said first strata of said second ferromagnetic thin-film is on said intermediate layer and comprises a mixture of cobalt and iron, and wherein said second strata thereof is on said first strata thereof and comprises a mixture of cobalt, iron and nickel.
Claim 22
Dependent Claim 61 words
The structure of claim 10 wherein said first strata of said second ferromagnetic thin-film is on said intermediate layer and has that same form in that same crystal class as does said intermediate layer, and wherein said second strata thereof is on said first strata thereof and has that same form in that same crystal class as does said first strata.
Claim 23
Dependent Claim 20 words
The structure of claim 11 wherein said intermediate layer and said first ferromagnetic thin-film each have approximately equal lattice constants.
Claim 24
Dependent Claim 41 words
The structure of claim 13 wherein at least two of said plurality of structures are electrically connected to one another and with each also being electrically connected to a terminal means suited for electrical connection to a source of electrical energy.
Claim 25
Dependent Claim 46 words
The structure of claim 19 wherein said alloy has said copper therein in greater proportion than said silver and said gold with said silver and said gold being present in said alloy in amounts sufficient to permit antiferromagnetic coupling between said first and second ferromagnetic thin-films.
Claim 26
Dependent Claim 65 words
The structure of claim 23 wherein one of said two electrically connected structures is positioned on said substrate in a gap between two permeable material masses, and that one remaining is positioned near a side of one of said permeable material masses between surface locations thereon intersected by an axis substantially parallel to said substrate passing through both said permeable material masses and said gap.
Claim 27
Dependent Claim 28 words
The structure of claim 23 wherein said two electrically connected structures are positioned on said substrate by a source of a localized magnetic field which differs for each.
Claim 28
Dependent Claim 17 words
The structure of claim 23 wherein four of said structures are electrically connected in a bridge circuit.
Claim 29
Dependent Claim 17 words
The structure of claim 24 wherein said alloy has said silver in greater proportion than said gold.
Claim 30
Dependent Claim 74 words
The structure of claim 27 wherein a pair of said four structures, separated in said bridge circuit by that pair remaining, is positioned on said substrate in a gap between two permeable material masses, and that said pair remaining is positioned near a side of one of said permeable material masses between surface locations thereon intersected by an axis substantially parallel to said substrate passing through both said permeable material masses and said gap.
Claim 31
Dependent Claim 30 words
The structure of claim 27 wherein said two pairs of said four structures are positioned on said substrate by a source of a localized magnetic field which differs for each.
Claim 32
Dependent Claim 123 words
A magnetoresistive thin-film layered structure, said structure comprising: a substrate having a major surface portion; a magnetoresistive, anisotropic, first ferromagnetic thin-film provided on said substrate major surface portion; an intermediate layer provided on said first ferromagnetic thin-film with a thickness of less than 30 Å, said intermediate layer being formed of a substantially nonmagnetic, conductive alloy having two substantially immiscible components therein and a third at least partially miscible component therein, said alloy having one said component therein in greater proportion than those others therein, and with those said other components therein being present in said alloy in amounts sufficient to permit antiferromagnetic coupling between said first and second ferromagnetic thin-films; and a magnetoresistive, anisotropic, second ferromagnetic thin-film provided on said intermediate layer.
Claim 33
Dependent Claim 123 words
A magnetoresistive thin-film layered structure, said structure comprising: a substrate having a major surface portion; a magnetoresistive, anisotropic, first ferromagnetic thin-film provided on said substrate major surface portion; an intermediate layer provided on said first ferromagnetic thin-film with a thickness of less than 30 Å, said intermediate layer being formed of a substantially nonmagnetic, conductive alloy having two substantially immiscible components therein and a third at least partially miscible component therein, said alloy having one said component therein in greater proportion than those others therein, and with those said other components therein being present in said alloy in amounts sufficient to permit antiferromagnetic coupling between said first and second ferromagnetic thin-films; and a magnetoresistive, anisotropic, second ferromagnetic thin-film provided on said intermediate layer.
Claim 34
Dependent Claim 32 words
The structure of claim 31 wherein said first ferromagnetic thin-film is a two strata film with that strata thereof at said intermediate layer having a greater magnetic moment than that strata remaining.
Claim 35
Dependent Claim 24 words
The structure of claim 31 wherein said substantially immiscible components are copper and silver, and wherein said at least partially miscible component is gold.
Claim 36
Dependent Claim 20 words
The structure of claim 31 wherein said first and second ferromagnetic thin-films have a thickness of less than 100 Å.
Claim 37
Dependent Claim 32 words
The structure of claim 31 wherein said second ferromagnetic thin-film is a two strata film with that strata thereof at said intermediate layer having a greater magnetic moment than that strata remaining.
Claim 38
Dependent Claim 51 words
The structure of claim 31 wherein said magnetoresistive thin-film layered structure is a first structure and is one of a plurality of structures each comprising a succession of layers like those in that succession of said first ferromagnetic layer, said intermediate layer, and said second ferromagnetic layer in said first structure.
Claim 39
Dependent Claim 41 words
The structure of claim 36 wherein at least two of said plurality of structures are electrically connected to one another and with each also being electrically connected to a terminal means suited for electrical connection to a source of electrical energy.
Claim 40
Dependent Claim 65 words
The structure of claim 37 wherein one of said two electrically connected structures is positioned on said substrate in a gap between two permeable material masses, and that one remaining is positioned near a side of one of said permeable material masses between surface locations thereon intersected by an axis substantially parallel to said substrate passing through both said permeable material masses and said gap.
Claim 41
Dependent Claim 28 words
The structure of claim 37 wherein said two electrically connected structures are positioned on said substrate by a source of a localized magnetic field which differs for each.
Claim 42
Dependent Claim 164 words
A magnetic field sensor comprising: a substrate having a major surface portion; a pair of magnetoresistive thin-film layered structures provided on said substrate electrically connected to one another and with each also being electrically connected to a terminal means suited for electrical connection to a source of electrical energy, said pair of magnetoresistive thin-film layered structures comprising magnetoresistive, anisotropic, first and second ferromagnetic thin-films separated by an intermediate layer having a thickness of less than thirty Å and formed of a substantially non-magnetic, conductive alloy having two substantially immiscible components therein and a third at least partially miscible component therein; and a pair of permeable material masses provided on said substrate with one of said two electrically connected structures being positioned in a gap therebetween, and with that one remaining positioned near a side of one of said permeable material masses between surface locations thereon intersected by an axis substantially parallel to said substrate passing through both said permeable material masses and said gap.
Claim 43
Dependent Claim 164 words
A magnetic field sensor comprising: a substrate having a major surface portion; a pair of magnetoresistive thin-film layered structures provided on said substrate electrically connected to one another and with each also being electrically connected to a terminal means suited for electrical connection to a source of electrical energy, said pair of magnetoresistive thin-film layered structures comprising magnetoresistive, anisotropic, first and second ferromagnetic thin-films separated by an intermediate layer having a thickness of less than thirty Å and formed of a substantially non-magnetic, conductive alloy having two substantially immiscible components therein and a third at least partially miscible component therein; and a pair of permeable material masses provided on said substrate with one of said two electrically connected structures being positioned in a gap therebetween, and with that one remaining positioned near a side of one of said permeable material masses between surface locations thereon intersected by an axis substantially parallel to said substrate passing through both said permeable material masses and said gap.
Claim 44
Dependent Claim 75 words
A magnetoresistive thin-film layered structure, said structure comprising: a substrate having a major surface portion; a magnetoresistive, anisotropic, first ferromagnetic thin-film provided on said substrate major surface portion; an intermediate layer provided on said first ferromagnetic thin-film with a thickness of less than 30 Å, said intermediate layer being formed of a substantially non-magnetic, conductive alloy having copper, silver and gold components therein; and a magnetoresistive, anisotropic, second ferromagnetic thin-film provided on said intermediate layer.
Claim 45
Dependent Claim 75 words
A magnetoresistive thin-film layered structure, said structure comprising: a substrate having a major surface portion; a magnetoresistive, anisotropic, first ferromagnetic thin-film provided on said substrate major surface portion; an intermediate layer provided on said first ferromagnetic thin-film with a thickness of less than 30 Å, said intermediate layer being formed of a substantially non-magnetic, conductive alloy having copper, silver and gold components therein; and a magnetoresistive, anisotropic, second ferromagnetic thin-film provided on said intermediate layer.
Claim 46
Dependent Claim 163 words
A magnetic field sensor comprising: a substrate having a major surface portion; a pair of magnetoresistive thin-film layered structures provided on said substrate electrically connected to one another and with each also being electrically connected to a terminal means suited for electrical connection to a source of electrical energy, said pair of magnetoresistive thin-film layered structures comprising magnetoresistive, anisotropic, first and second ferromagnetic thin-films provided on said substrate major surface portion separated by an intermediate layer with a thickness of less than 30 Å and formed of a substantially non-magnetic, conductive alloy having copper, silver and gold components therein; and a pair of permeable material masses provided on said substrate with one of said two electrically connected structures being positioned in a gap therebetween, and with that one remaining positioned near a side of one of said permeable material masses between surface locations thereon intersected by an axis substantially parallel to said substrate passing through both said permeable material masses and said gap.
Claim 47
Dependent Claim 163 words
A magnetic field sensor comprising: a substrate having a major surface portion; a pair of magnetoresistive thin-film layered structures provided on said substrate electrically connected to one another and with each also being electrically connected to a terminal means suited for electrical connection to a source of electrical energy, said pair of magnetoresistive thin-film layered structures comprising magnetoresistive, anisotropic, first and second ferromagnetic thin-films provided on said substrate major surface portion separated by an intermediate layer with a thickness of less than 30 Å and formed of a substantially non-magnetic, conductive alloy having copper, silver and gold components therein; and a pair of permeable material masses provided on said substrate with one of said two electrically connected structures being positioned in a gap therebetween, and with that one remaining positioned near a side of one of said permeable material masses between surface locations thereon intersected by an axis substantially parallel to said substrate passing through both said permeable material masses and said gap.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1999-10-29 2000-04-29 2000-10-29 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2003-10-29 2004-04-29 2004-10-29 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2007-10-29 2008-04-29 2008-10-29 $7700.00 Window Closed / Lapsed

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