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US5562838A Expired / Lapsed US ⏱️ 0.0 years remaining

Optical light pipe and microwave waveguide interconnects in multichip modules formed using adaptive lithography

Assignee: Lockheed Martin Corp
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Filing: 1993-03-29
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Granted: 1996-10-08
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Expires: 2013-03-29
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Abstract

Abstract HDI fabrication techniques are employed to form a variety of optical waveguide structures in polymer materials. Adaptive optical connections are formed, taking into account the actual position and orientation of devices which may deviate from the ideal. Structures include solid light-conducting structures, hollow light-conducting structures which are also suitable for conducting cooling fluid, and optical switching devices employing liquid crystal material. A "shrink back" method may be used to form a tunnel in polymer material which is then filled with an uncured polymer material that shrinks upon curing.

Inventors

  • 👤 Robert J. Wojnarowski
  • 👤 Herbert S. Cole
  • 👤 John L. Henkes

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 18:14
CPC Classifications
B; B29; B29D; B29D11/00; B29D11/00663; B29D11/00701; G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/1221; G02B6/13; G02B6/24; G02B6/42; G02B6/4201; G02B6/4204; G02B6/421; G02B6/43; G02B2006/12166; G02B2006/12173; G02B2006/12176; H; H10; H10W; H10W70/00; H10W70/60; H10W70/67; H10W70/68; H10W70/682; H10W72/00; H10W72/851; H10W72/874; H10W72/90; H10W72/941; H10W72/9413

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 181 words
A method for forming a fiber optic light guide, comprising the steps of: providing a first electro-optic component having a first light port, and a second electro-optic component having a second light port; providing a body of a first polymer material, having a surface; mounting each of the first and second components in the first polymer body, near a predetermined ideal position and orientation; finding an actual location and orientation of each of the first and second light ports, between which ports the light guide is to be formed; adaptively forming a groove in the body of the first polymer material through the surface thereof and between a first port site, determined by the first actual location and orientation, and a second port site, determined by the second actual location and orientation; forming a liner, within the adaptively-formed groove in said first polymer material, of a liner material having a relatively low index of refraction; and filling the groove and liner, between the first and second port sites, with a transparent second polymer material having a relatively high index of refraction.
Claim 2
Independent Claim 181 words
A method for forming a fiber optic light guide, comprising the steps of: providing a first electro-optic component having a first light port, and a second electro-optic component having a second light port; providing a body of a first polymer material, having a surface; mounting each of the first and second components in the first polymer body, near a predetermined ideal position and orientation; finding an actual location and orientation of each of the first and second light ports, between which ports the light guide is to be formed; adaptively forming a groove in the body of the first polymer material through the surface thereof and between a first port site, determined by the first actual location and orientation, and a second port site, determined by the second actual location and orientation; forming a liner, within the adaptively-formed groove in said first polymer material, of a liner material having a relatively low index of refraction; and filling the groove and liner, between the first and second port sites, with a transparent second polymer material having a relatively high index of refraction.
Claim 3
Dependent Claim 26 words
The method in accordance with claim 1, wherein the step of forming a liner comprises chemical vapor depositing the relatively low index of refraction liner material.
Claim 4
Dependent Claim 28 words
The method in accordance with claim 1, wherein the step of forming a liner comprises atomic layer epitaxy deposition of the relatively low index of refraction liner material.
Claim 5
Dependent Claim 29 words
The method in accordance with claim 1, wherein the step of forming a groove in the surface of the first polymer material body comprises laser-ablating the first polymer material.
Claim 6
Dependent Claim 19 words
The method in accordance with claim 1, wherein the first polymer material body comprises a layer of a polyimide.
Claim 7
Dependent Claim 25 words
The method in accordance with claim 1, wherein the liner material comprises a polymer material selected from the group consisting of p-methyl methacrylate and polystyrene.
Claim 8
Dependent Claim 36 words
The method in accordance with claim 6, wherein the step of filling the groove and liner comprises filling the groove and liner with a second polymer material selected from the group consisting of: polyetherimide and polyimide.
Claim 9
Independent Claim 180 words
A method for forming a fiber optic light guide, comprising the steps of: providing a first electro-optic component having a first light port, and a second electro-optic component having a second light port; providing a substrate having a surface; mounting each of the first and second components on the substrate, near a predetermined ideal position and orientation; finding an actual location and orientation of each of the first and second light ports, between which ports the light guide is to be formed; adaptively forming a groove into the substrate through the surface thereof and between a first port site, determined by the first actual location and orientation, and a second port site, determined by the second actual location and orientation; filling the groove with an uncured polymer material which shrinks upon curing and has an index of refraction greater than that of air; and allowing the polymer material within the groove to cure and to shrink to form a solid light-conducting structure smaller than the groove so as to form a gap between the solid light-conducting structure and the groove.
Claim 10
Independent Claim 180 words
A method for forming a fiber optic light guide, comprising the steps of: providing a first electro-optic component having a first light port, and a second electro-optic component having a second light port; providing a substrate having a surface; mounting each of the first and second components on the substrate, near a predetermined ideal position and orientation; finding an actual location and orientation of each of the first and second light ports, between which ports the light guide is to be formed; adaptively forming a groove into the substrate through the surface thereof and between a first port site, determined by the first actual location and orientation, and a second port site, determined by the second actual location and orientation; filling the groove with an uncured polymer material which shrinks upon curing and has an index of refraction greater than that of air; and allowing the polymer material within the groove to cure and to shrink to form a solid light-conducting structure smaller than the groove so as to form a gap between the solid light-conducting structure and the groove.
Claim 11
Dependent Claim 57 words
The method in accordance with claim 8, which further comprises the steps of: applying a cover layer over the surface of the substrate to form a cover for the groove; and then allowing the polymer material within the groove to shrink upon curing, to form an additional gap situated between the solid light-conducting structure and the cover.
Claim 12
Dependent Claim 14 words
The method in accordance with claim 8, wherein the substrate comprises a polyimide material.
Claim 13
Dependent Claim 26 words
The method in accordance with claim 8, wherein the uncured polymer material comprises a material selected from the group consisting of polyester resin and epoxy resin.
Claim 14
Dependent Claim 22 words
The method in accordance with claim 10, wherein the step of forming a groove in the surface comprises laser-ablating the polyimide material.

References Cited (Backward Citations)

US3641332A Cited
US4883743A Cited
JPH0287105A Cited
US5061020A Cited
US5170448A Cited
US5317082A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1999-10-08 2000-04-08 2000-10-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2003-10-08 2004-04-08 2004-10-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2007-10-08 2008-04-08 2008-10-08 $7700.00 Window Closed / Lapsed

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