Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
317 words
A probing device, comprising: object mounting means for supporting an object to be inspected, having a silicon substrate with electrode pads; measuring means; a probe card having contacts electrically connected to said measuring means and arranged so as to face said object, said probe card being formed of silicon nitride at at least one surface thereof facing said object; supporting means for supporting a circumferential portion of said probe card; a wiring substrate connected to said measuring means and provided so as to face the probe card supported by said supporting means; connecting conductor means provided in a circumferential portion of the probe card and electrically connected to said contacts; means for moving said mounting means relative to said probe card so that the contacts can be brought into contact with the electrode pads of the object mounted on said mounting means; means for changing the temperature of the object; interim connecting means for electrically connecting said connecting conductor means to said wiring substrate, said interim connecting means including a first connecting means provided on a side of said probe card and a second connecting means provided on a side of the wiring substrate, said first and second connecting means being removably connected to each other, said first connecting means including a first block body formed with a first through hole, said second connecting means including a second block body formed with a second through hole which is coaxial with said first through hole; a first hollow insulating member fitted in said first through hole; a second hollow insulating member fitted in said second through hole; and a first conductive axle extending through said first insulating member and electrically connected to said connecting conductor means; a second conductive axle extending through said second insulating member and electrically connected to said wiring substrate; and said first and second conductive axles having mutually adjoining ends that are separably connected.
Claim 2
Dependent Claim
317 words
A probing device, comprising: object mounting means for supporting an object to be inspected, having a silicon substrate with electrode pads; measuring means; a probe card having contacts electrically connected to said measuring means and arranged so as to face said object, said probe card being formed of silicon nitride at at least one surface thereof facing said object; supporting means for supporting a circumferential portion of said probe card; a wiring substrate connected to said measuring means and provided so as to face the probe card supported by said supporting means; connecting conductor means provided in a circumferential portion of the probe card and electrically connected to said contacts; means for moving said mounting means relative to said probe card so that the contacts can be brought into contact with the electrode pads of the object mounted on said mounting means; means for changing the temperature of the object; interim connecting means for electrically connecting said connecting conductor means to said wiring substrate, said interim connecting means including a first connecting means provided on a side of said probe card and a second connecting means provided on a side of the wiring substrate, said first and second connecting means being removably connected to each other, said first connecting means including a first block body formed with a first through hole, said second connecting means including a second block body formed with a second through hole which is coaxial with said first through hole; a first hollow insulating member fitted in said first through hole; a second hollow insulating member fitted in said second through hole; and a first conductive axle extending through said first insulating member and electrically connected to said connecting conductor means; a second conductive axle extending through said second insulating member and electrically connected to said wiring substrate; and said first and second conductive axles having mutually adjoining ends that are separably connected.
Claim 3
Dependent Claim
42 words
The probing device of claim 1, wherein one of said mutually adjoining ends of the first and second conductive axles has a male shape and the other has a female shape, and the adjoining ends are joined removably by a male-female engagement.
Claim 4
Dependent Claim
41 words
The probing device of claim 1, wherein said first and second insulating members have adjoining ends, respectively, one of the adjoining ends having a male shape and the other having a female shape, the male and female shapes being removably fitted.
Claim 5
Dependent Claim
59 words
The probing device of claim 1, wherein said probe card is composed of a wiring substrate and a silicon nitride substrate fixed to the wiring substrate on the surface side thereof facing the inspected object; and the wiring substrate is formed with an insulating substrate and a conductive layer formed in parallel to a surface of the insulating substrate.
Claim 6
Dependent Claim
12 words
The probing device of claim 1, wherein the insulating substrate is flexible.
Claim 7
Dependent Claim
26 words
The probing device of claim 1, wherein the contacts are arranged on a surface of the silicon nitride substrate and connected to the conductive layer electrically.
Claim 8
Dependent Claim
16 words
The probing device of claim 1, wherein said probe card includes at least one ground layer.