Abstract The apparatus is a rapid response evaporator for material deposition in vapor. The structure is a vessel which is heated to a temperature just above the melting temperature of the liquid which it contains. Inserted into the heated liquid is a funnel shaped evaporator structure in which the vertical tube is a capillary structure to raise the heated liquid from the vessel. The upper diverging portion of the evaporator contains a porous capillary interior coating in contact with the capillary tube, and the exterior is independently heated. Because of the low thermal mass of the upper portion of the evaporator and the liquid in its capillary structure, it can respond to heat changes quickly enough to rapidly vary the rate of evaporation and the thickness of the deposited coating.
An apparatus for controlled generation of vapors comprising: an evaporator structure with a first and a second surface; an evaporator wick attached to and covering the first surface of the evaporator structure; at least one evaporator heater attached to the second surface of the evaporator structure and means to operate each evaporator heater; a capillary tube with a first end of the tube attached to the evaporator structure and a second end remote from the evaporator structure; a capillary wick located within the capillary tube so as to furnish a continuous capillary path from the second end to the first end of the capillary tube and also located so that a portion of the capillary wick is in contact with the evaporator wick; a container with liquid in the container; and the second end of the capillary tube located so that it is immersed in the liquid within the container.
Claim 2
Independent Claim
150 words
An apparatus for controlled generation of vapors comprising: an evaporator structure with a first and a second surface; an evaporator wick attached to and covering the first surface of the evaporator structure; at least one evaporator heater attached to the second surface of the evaporator structure and means to operate each evaporator heater; a capillary tube with a first end of the tube attached to the evaporator structure and a second end remote from the evaporator structure; a capillary wick located within the capillary tube so as to furnish a continuous capillary path from the second end to the first end of the capillary tube and also located so that a portion of the capillary wick is in contact with the evaporator wick; a container with liquid in the container; and the second end of the capillary tube located so that it is immersed in the liquid within the container.
Claim 3
Dependent Claim
34 words
The apparatus of claim 1 further including at least one reservoir heater attached to the container and operating means for the reservoir heater to melt a solid material within the container into a liquid.
Claim 4
Dependent Claim
25 words
The apparatus of claim 1 further including a temperature sensing device attached to the evaporator structure to furnish temperature information for control of the apparatus.
Claim 5
Dependent Claim
14 words
The apparatus of claim 1 further including heat shielding adjacent to the evaporator structure.
Claim 6
Dependent Claim
13 words
The apparatus of claim 1 further including heat shielding adjacent to the container.
Claim 7
Dependent Claim
14 words
The apparatus of claim 1 wherein the evaporator structure is shaped as a cone.
Claim 8
Dependent Claim
21 words
The apparatus of claim 1 wherein the liquid in the container is selected from the group of gallium, aluminum, and indium.
Claim 9
Dependent Claim
19 words
The apparatus of claim 1 further including a cover on the container, with the capillary tube penetrating the cover.