US5554566A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method to eliminate polycide peeling
Assignee: United Microelectronics Corp
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Filing: 1994-09-06
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Granted: 1996-09-10
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Expires: 2014-09-06
Abstract
Abstract A method for forming MOSFET devices, with an improved polycide gate has been accomplished. The polycide structure, made with metal silicide on polysilicon has a reduced rate of adhesion loss or peeling of the metal silicide from the underlying polysilicon, due to the unique surface of the polysilicon. The desired surface of the polysilicon, that will reduce the peeling phenomena, is a wavy or undulated surface. This is accomplished by either depositing the polysilicon at conditions that result in a hemi-spherical grained surface, or obtaining a similar wavy or undulated surface by treating smooth polysilicon in either phosphoric acid or by anodization in hydrofluoric acid. The adhesion of the subsequent metal silicide to the wavy surface of the polysilicon is improved to a point where peeling of the metal silicide from the underlying polysilicon is eliminated.
Inventors
- 👤 Water Lur
- 👤 Cheng H. Huang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 11:39
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/064; H10W20/066; H10D; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01306; H10D64/01308; H10D64/01312
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
79 words
A method for forming an improved polycide structure including a polysilicon layer and a metal silicide layer comprising: forming said polysilicon layer by chemical vapor deposition at a temperature between about 580° to 600° C., at a pressure below about 300 mTorr, to a thickness between about 500 to 4000 Angstroms and resulting in a hemispherical grained polysilicon surface as deposited: depositing said metal silicide layer on said hemispherical grained polysilicon surface; and patterning to form said polycide structure.
Claim 2
Independent Claim
79 words
A method for forming an improved polycide structure including a polysilicon layer and a metal silicide layer comprising: forming said polysilicon layer by chemical vapor deposition at a temperature between about 580° to 600° C., at a pressure below about 300 mTorr, to a thickness between about 500 to 4000 Angstroms and resulting in a hemispherical grained polysilicon surface as deposited: depositing said metal silicide layer on said hemispherical grained polysilicon surface; and patterning to form said polycide structure.
Claim 3
Independent Claim
104 words
A method for fabricating a device on a semiconductor substrate, with a polycide structure, comprising: forming a polysilicon layer by chemical vapor deposition at a temperature below 580° C. or above 600° C., at a pressure below 300 mTorr, to a thickness of about 500 to 4000 Angstroms, and resulting in a non-hemispherical polysilicon surface as deposited; dipping said polysilicon layer in a solution of phosphoric acid at a temperature between about 130° to 180° C., to convert surface of said polysilicon layer from non-hemispherical to a hemispherical surface; depositing a metal silicide on said polysilicon layer; and patterning to form said polycide structure.
Claim 4
Independent Claim
104 words
A method for fabricating a device on a semiconductor substrate, with a polycide structure, comprising: forming a polysilicon layer by chemical vapor deposition at a temperature below 580° C. or above 600° C., at a pressure below 300 mTorr, to a thickness of about 500 to 4000 Angstroms, and resulting in a non-hemispherical polysilicon surface as deposited; dipping said polysilicon layer in a solution of phosphoric acid at a temperature between about 130° to 180° C., to convert surface of said polysilicon layer from non-hemispherical to a hemispherical surface; depositing a metal silicide on said polysilicon layer; and patterning to form said polycide structure.
Claim 5
Independent Claim
99 words
A method for fabricating a device on a semiconductor substrate, with a polycide structure in which the metal silicide is deposited on a hemispherical grained polysilicon surface, comprising: forming said polysilicon layer by chemical vapor deposition at a temperature between about 580° to 600° C., at a pressure below about 300 mTorr, to a thickness of about 500 to 4000 Angstroms and resulting in a hemispherical grained polysilicon surface; modifying the said hemispherical grained polysilicon surface to increase the level of the hemispherical grains; depositing metal silicide on said hemispherical grained polysilicon; and patterning to form said polycide structure.
Claim 6
Independent Claim
99 words
A method for fabricating a device on a semiconductor substrate, with a polycide structure in which the metal silicide is deposited on a hemispherical grained polysilicon surface, comprising: forming said polysilicon layer by chemical vapor deposition at a temperature between about 580° to 600° C., at a pressure below about 300 mTorr, to a thickness of about 500 to 4000 Angstroms and resulting in a hemispherical grained polysilicon surface; modifying the said hemispherical grained polysilicon surface to increase the level of the hemispherical grains; depositing metal silicide on said hemispherical grained polysilicon; and patterning to form said polycide structure.
Claim 7
Dependent Claim
44 words
The method of claim 1, wherein said polysilicon layer is doped to be conductive by a method selected from the group consisting of in-situ doping during deposition, post deposition doping using thermal diffusion, and post deposition doping using ion implantation followed by thermal activation.
Claim 8
Dependent Claim
36 words
The method of claim 4, wherein said conductive polysilicon layer is in-situ doped with an impurity selected from the group consisting of arsenic, phosphorus, and boron, to a concentration of between about 1E19 to 1E21/cubic cm.
Claim 9
Dependent Claim
39 words
The method of claim 4, wherein said conductive polysilicon layer is post-deposition doped using thermal diffusion with an impurity selected from the group consisting of arsenic, phosphorus, and boron, to a concentration of between about 1E19 to 1E21/cubic cm.
Claim 10
Dependent Claim
52 words
The method of claim 4, wherein said conductive polysilicon layer is formed by ion implantation with ions selected from the group consisting of phosphorus, arsenic, boron, and BF 2 , at an energy of between about 10 to 200 Kev and a dose of 5E14 to 1E16/square cm., followed by thermal activation.
Claim 11
Dependent Claim
30 words
The method of claim 1, wherein said polysilicon layer with hemi-spherical grained surface is treated in a solution of phosphoric acid at a temperature between about 130° to 180° C.
Claim 12
Dependent Claim
39 words
The method of claim 1, wherein said polysilicon layer with hemi-spherical grained surface is anodized in hydrofluoric acid at a temperature between about 10° to 150° C. at a current density of between about 5 to 50 mA/square cm.
Claim 13
Dependent Claim
18 words
The method of claim 1, wherein said metal silicide is deposited at a temperature below about 500° C.
Claim 14
Dependent Claim
37 words
The method of claim 1, wherein said metal silicide is comprised substantially of silicides from the group consisting of titanium silicide, molybdenum silicide, tantalum silicide and tungsten silicide, to a thickness of about 500 to 3000 Angstroms.
Claim 15
Independent Claim
109 words
A method for fabricating a device on a semiconductor substrate, with a polycide structure, comprising: forming a polysilicon layer by chemical vapor deposition at a temperature below 580° C., or above 600° C., at a pressure below 300 mTorr, to a thickness between about 500 to 4000 Angstroms, resulting in a non-hemispherical polysilicon surface as deposited; anodizing in hydrofluoric acid at a temperature between about 10° to 150° C., at a current density between about 5 to 50 mA/cm 2 , to convert surface of said polysilicon layer from non-hemispherical to a hemispherical surface; depositing a metal silicide on said polysilicon layer; and patterning to form said polycide structure.
Claim 16
Independent Claim
109 words
A method for fabricating a device on a semiconductor substrate, with a polycide structure, comprising: forming a polysilicon layer by chemical vapor deposition at a temperature below 580° C., or above 600° C., at a pressure below 300 mTorr, to a thickness between about 500 to 4000 Angstroms, resulting in a non-hemispherical polysilicon surface as deposited; anodizing in hydrofluoric acid at a temperature between about 10° to 150° C., at a current density between about 5 to 50 mA/cm 2 , to convert surface of said polysilicon layer from non-hemispherical to a hemispherical surface; depositing a metal silicide on said polysilicon layer; and patterning to form said polycide structure.
Claim 17
Independent Claim
116 words
A method for fabricating a device on a semiconductor substrate, with a polycide structure, comprising: forming a polysilicon layer by chemical vapor deposition at a temperature below 580° C., or above 600° C., at a pressure below 300 mTorr, to a thickness between about 500 to 4000 Angstroms, resulting in a non-hemispherical polysilicon surface as deposited; removal of a native oxide from the surface of said polysilicon layer; annealing at a temperature between about 550° to 650° C., at a pressure below about 10 -6 Torr, to convert the surface of said polysilicon layer from a non-hemispherical to a hemispherical surface; depositing a metal silicide on said polysilicon layer; and patterning to form said polycide structure.
Claim 18
Independent Claim
116 words
A method for fabricating a device on a semiconductor substrate, with a polycide structure, comprising: forming a polysilicon layer by chemical vapor deposition at a temperature below 580° C., or above 600° C., at a pressure below 300 mTorr, to a thickness between about 500 to 4000 Angstroms, resulting in a non-hemispherical polysilicon surface as deposited; removal of a native oxide from the surface of said polysilicon layer; annealing at a temperature between about 550° to 650° C., at a pressure below about 10 -6 Torr, to convert the surface of said polysilicon layer from a non-hemispherical to a hemispherical surface; depositing a metal silicide on said polysilicon layer; and patterning to form said polycide structure.
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