US5554249A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Magnetron plasma processing system
Assignee: Tokyo Electron Ltd
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Filing: 1995-02-28
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Granted: 1996-09-10
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Expires: 2015-02-28
Abstract
Abstract A magnetron plasma etching system has a plurality of processing chambers connected to a common transfer chamber. Each processing chamber has a pair of counter electrodes for generating an electric field and a magnet mechanism for generating a magnetic field having an N-S axis crossing the electric field. All magnetic fields are rotated in the same plane. The rotation of the magnetic fields is controlled by a controller. When one of the magnetic fields is rotated, the other magnetic fields are rotated at equal speed such that the directions of N-S axes thereof are parallel and identical to that of the one of the magnetic fields.
Inventors
- 👤 Makoto Hasegawa
- 👤 Tsuyoshi Saito
- 👤 Fumihiko Higuchi
- 👤 Hideaki Amano
- 👤 Katsunori Naitoh
- 👤 Takashi Tozawa
- 👤 Tatsuya Nakagome
- 👤 Keiki Ito
- 👤 Kouji Suzuki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:11
CPC Classifications
H; H10; H10P; H10P50/00; H10P72/00; H10P72/04; H10P72/0451; H10P72/0452; H10P72/0454; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; C23C16/00; C23C16/44; C23C16/50; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/32431; H01J37/3266; H10P72/0402; H10P72/0418; H10P72/0421; H10P72/0464
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
212 words
A system for processing a target surface of a substrate using a plasma, said system comprising: a container defining a vacuum processing space for storing and processing said substrate; a supply system for introducing a gas into said container, said gas to be made into a plasma; an exhaust system for exhausting said container; a pair of counter electrodes facing each other within said container; a support member, disposed within said container, for supporting said substrate such that said target surface is exposed to said processing space; a power supply for applying a voltage between said counter electrodes, thereby generating an electric field; a first magnet mechanism driven by a first motor for generating a first magnetic field between said counter electrodes, said first magnetic field having a N-S axis crossing said electric field and rotating; a second magnet mechanism driven by a second motor for generating a second magnetic field in a separate second chamber having a rotating N-S axis, said first and second magnetic fields having parallel rotational planes; and a controller for controlling said first and second motors with respect to rotation of said first and second magnetic fields, such that when one of the first and second magnetic fields is rotated, the other is rotated at equal speed.
Claim 2
Independent Claim
212 words
A system for processing a target surface of a substrate using a plasma, said system comprising: a container defining a vacuum processing space for storing and processing said substrate; a supply system for introducing a gas into said container, said gas to be made into a plasma; an exhaust system for exhausting said container; a pair of counter electrodes facing each other within said container; a support member, disposed within said container, for supporting said substrate such that said target surface is exposed to said processing space; a power supply for applying a voltage between said counter electrodes, thereby generating an electric field; a first magnet mechanism driven by a first motor for generating a first magnetic field between said counter electrodes, said first magnetic field having a N-S axis crossing said electric field and rotating; a second magnet mechanism driven by a second motor for generating a second magnetic field in a separate second chamber having a rotating N-S axis, said first and second magnetic fields having parallel rotational planes; and a controller for controlling said first and second motors with respect to rotation of said first and second magnetic fields, such that when one of the first and second magnetic fields is rotated, the other is rotated at equal speed.
Claim 3
Dependent Claim
37 words
The system according to claim 1, wherein said first and second magnetic fields are rotated at equal speed such that the directions of the N-S axes of the first and second magnetic fields are parallel and identical.
Claim 4
Dependent Claim
80 words
The system according to claim 2, further comprising a third magnet mechanism driven by a third motor for generating a third magnetic field having a rotating N-S axis, wherein said first, second and third magnetic fields have parallel rotational planes, and said controller controls said third motor with respect to rotation of the third magnetic field, such that when one of the first, second and third magnetic fields is rotated, the other two magnetic fields are rotated at equal speed.
Claim 5
Dependent Claim
23 words
The system according to claim 2, wherein said rotational planes of said first and second magnetic fields are located in the same plane.
Claim 6
Dependent Claim
40 words
The system according to claim 1, wherein said first and second magnetic fields are rotated at equal speed such that the directions of the N-S axes of the first and second magnetic fields are parallel and opposite to each other.
Claim 7
Dependent Claim
23 words
The system according to claim 5, wherein said rotational planes of said first and second magnetic fields are located in the same plane.
Claim 8
Independent Claim
332 words
A system for processing target surfaces of first and second substrates using a plasma, said system comprising: a first container defining a vacuum processing space for storing and processing said first substrate; a supply system for introducing a gas into said first container, said gas to be made into a plasma; an exhaust system for exhausting said first container; a pair of first counter electrodes facing each other within said first container; a support member, disposed within said first container, for supporting said first substrate such that said target surface is exposed to said processing space; a power supply for applying a voltage between said first counter electrodes, thereby generating a first electric field; a first magnet mechanism driven by a first motor for generating a first magnetic field between said first counter electrodes, said first magnetic field having a N-S axis crossing said first electric field and rotating; a second container defining a vacuum processing space for storing and processing said second substrate; a supply system for introducing a gas into said second container, said gas to be made into a plasma; an exhaust system for exhausting said second container; a pair of second counter electrodes facing each other within said second container; a support member, disposed within said second container, for supporting said second substrate such that said target surface is exposed to said processing space; a power supply for applying a voltage between said second counter electrodes, thereby generating a second electric field; a second magnet mechanism driven by a second motor for generating a second magnetic field between said second counter electrodes, said second magnetic field having a N-S axis crossing said second electric field and rotating, said first and second magnetic fields having parallel rotational planes; and a controller for controlling said first and second motors with respect to rotation of said first and second magnetic fields, such that when one of the first and second magnetic fields is rotated, the other is rotated at equal speed.
Claim 9
Independent Claim
332 words
A system for processing target surfaces of first and second substrates using a plasma, said system comprising: a first container defining a vacuum processing space for storing and processing said first substrate; a supply system for introducing a gas into said first container, said gas to be made into a plasma; an exhaust system for exhausting said first container; a pair of first counter electrodes facing each other within said first container; a support member, disposed within said first container, for supporting said first substrate such that said target surface is exposed to said processing space; a power supply for applying a voltage between said first counter electrodes, thereby generating a first electric field; a first magnet mechanism driven by a first motor for generating a first magnetic field between said first counter electrodes, said first magnetic field having a N-S axis crossing said first electric field and rotating; a second container defining a vacuum processing space for storing and processing said second substrate; a supply system for introducing a gas into said second container, said gas to be made into a plasma; an exhaust system for exhausting said second container; a pair of second counter electrodes facing each other within said second container; a support member, disposed within said second container, for supporting said second substrate such that said target surface is exposed to said processing space; a power supply for applying a voltage between said second counter electrodes, thereby generating a second electric field; a second magnet mechanism driven by a second motor for generating a second magnetic field between said second counter electrodes, said second magnetic field having a N-S axis crossing said second electric field and rotating, said first and second magnetic fields having parallel rotational planes; and a controller for controlling said first and second motors with respect to rotation of said first and second magnetic fields, such that when one of the first and second magnetic fields is rotated, the other is rotated at equal speed.
Claim 10
Dependent Claim
37 words
The system according to claim 7, wherein said first and second magnetic fields are rotated at equal speed such that the directions of the N-S axes of the first and second magnetic fields are parallel and identical.
Claim 11
Dependent Claim
80 words
The system according to claim 8, further comprising a third magnet mechanism driven by a third motor for generating a third magnetic field having a rotating N-S axis, wherein said first, second and third magnetic fields have parallel rotational planes, and said controller controls said third motor with respect to rotation of the third magnetic field, such that when one of the first, second and third magnetic fields is rotated, the other two magnetic fields are rotated at equal speed.
Claim 12
Dependent Claim
23 words
The system according to claim 8, wherein said rotational planes of said first and second magnetic fields are located in the same plane.
Claim 13
Dependent Claim
40 words
The system according to claim 7, wherein said first and second magnetic fields are rotated at equal speed such that the directions of the N-S axes of the first and second magnetic fields are parallel and opposite to each other.
Claim 14
Dependent Claim
23 words
The system according to claim 11, wherein said rotational planes of said first and second magnetic fields are located in the same plane.
Claim 15
Dependent Claim
63 words
The system according to claim 7, wherein each of said first and second magnet mechanisms has a main magnet and a sub-magnet fixed to each other and rotated as one unit, said main magnet and sub-magnet are arranged such that the directions of N-S axes thereof are opposite to each other, and said main magnet is located closer to the associated processing space.
Claim 16
Independent Claim
381 words
A system for processing target surfaces of first and second substrates using a plasma, said system comprising: a transfer chamber capable of forming a reduced-pressure atmosphere therein; a transfer device, arranged within said transfer chamber, for transferring said first and second substrates; a first container defining a vacuum processing space for storing and processing said first substrate, said first container being connected to said transfer chamber via a gate; a supply system for introducing a gas into said first container, said gas to be made into a plasma; an exhaust system for exhausting said first container; a pair of first counter electrodes facing each other within said first container; a support member, disposed within said first container, for supporting said first substrate such that said target surface is exposed to said processing space; a power supply for applying a voltage between said first counter electrodes, thereby generating a first electric field; a first magnet mechanism driven by a first motor for generating a first magnetic field between said first counter electrodes, said first magnetic field having a N-S axis crossing said first electric field and rotating; a second container defining a vacuum processing space for storing and processing said second substrate, said second container being connected to said transfer chamber via a gate; a supply system for introducing a gas into said second container, said gas to be made into a plasma; an exhaust system for exhausting said second container; a pair of second counter electrodes facing each other within said second container; a support member, disposed within said second container, for supporting said second substrate such that said target surface is exposed to said processing space; a power supply for applying a voltage between said second counter electrodes, thereby generating a second electric field; a second magnet mechanism driven by a second motor for generating a second magnetic field between said second counter electrodes, said second magnetic field having a N-S axis crossing said second electric field and rotating, said first and second magnetic fields having parallel rotational planes; and a controller for controlling said first and second motors with respect to rotation of said first and second magnetic fields, such that when one of the first and second magnetic fields is rotated, the other is rotated at equal speed.
Claim 17
Independent Claim
381 words
A system for processing target surfaces of first and second substrates using a plasma, said system comprising: a transfer chamber capable of forming a reduced-pressure atmosphere therein; a transfer device, arranged within said transfer chamber, for transferring said first and second substrates; a first container defining a vacuum processing space for storing and processing said first substrate, said first container being connected to said transfer chamber via a gate; a supply system for introducing a gas into said first container, said gas to be made into a plasma; an exhaust system for exhausting said first container; a pair of first counter electrodes facing each other within said first container; a support member, disposed within said first container, for supporting said first substrate such that said target surface is exposed to said processing space; a power supply for applying a voltage between said first counter electrodes, thereby generating a first electric field; a first magnet mechanism driven by a first motor for generating a first magnetic field between said first counter electrodes, said first magnetic field having a N-S axis crossing said first electric field and rotating; a second container defining a vacuum processing space for storing and processing said second substrate, said second container being connected to said transfer chamber via a gate; a supply system for introducing a gas into said second container, said gas to be made into a plasma; an exhaust system for exhausting said second container; a pair of second counter electrodes facing each other within said second container; a support member, disposed within said second container, for supporting said second substrate such that said target surface is exposed to said processing space; a power supply for applying a voltage between said second counter electrodes, thereby generating a second electric field; a second magnet mechanism driven by a second motor for generating a second magnetic field between said second counter electrodes, said second magnetic field having a N-S axis crossing said second electric field and rotating, said first and second magnetic fields having parallel rotational planes; and a controller for controlling said first and second motors with respect to rotation of said first and second magnetic fields, such that when one of the first and second magnetic fields is rotated, the other is rotated at equal speed.
Claim 18
Dependent Claim
37 words
The system according to claim 14, wherein said first and second magnetic fields are rotated at equal speed such that the directions of the N-S axes of the first and second magnetic fields are parallel and identical.
Claim 19
Dependent Claim
80 words
The system according to claim 15, further comprising a third magnet mechanism driven by a third motor for generating a third magnetic field having a rotating N-S axis, wherein said first, second and third magnetic fields have parallel rotational planes, and said controller controls said third motor with respect to rotation of the third magnetic field, such that when one of the first, second and third magnetic fields is rotated, the other two magnetic fields are rotated at equal speed.
Claim 20
Dependent Claim
23 words
The system according to claim 15, wherein said rotational planes of said first and second magnetic fields are located in the same plane.
Claim 21
Dependent Claim
40 words
The system according to claim 14, wherein said first and second magnetic fields are rotated at equal speed such that the directions of the N-S axes of the first and second magnetic fields are parallel and opposite to each other.
Claim 22
Dependent Claim
23 words
The system according to claim 18, wherein said rotational planes of said first and second magnetic fields are located in the same plane.
Claim 23
Dependent Claim
63 words
The system according to claim 14, wherein each of said first and second magnet mechanisms has a main magnet and a sub-magnet fixed to each other and rotated as one unit, said main magnet and sub-magnet are arranged such that the directions of N-S axes thereof are opposite to each other, and said main magnet is located closer to the associated processing space.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-09-10 | 2000-03-11 | 2000-09-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-09-10 | 2004-03-11 | 2004-09-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-09-10 | 2008-03-11 | 2008-09-10 | $7700.00 | Window Closed / Lapsed |