Patent DE875853C successfully refreshed from Google Patents.
Patent US5552996A successfully refreshed from Google Patents.
US5552996A
Expired / Lapsed
US
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Method and system using the design pattern of IC chips in the processing thereof
Assignee: International Business Machines Corp
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Filing: 1995-02-16
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Granted: 1996-09-03
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Expires: 2015-02-16
Abstract
Abstract The techniques of the present invention facilitate the control of an IC chip fabrication level of a fabrication process based upon the design pattern of the IC chip being fabricated. A grid having multiple sections is imposed over the design pattern of a fabrication level of the IC chip. Then, pattern density values are automatically established for the design pattern contained in each section of the grid. The IC chip fabrication level is then controlled based upon the pattern density values. For example, the established pattern density values facilitate the automatic determination of a CMP process stop parameter, or the automatic compensation for etch rate variations caused by pattern density differences across the design pattern of the IC chip.
Inventors
- 👤 Cheryl A. Hoffman
- 👤 Mark A. Lavin
- 👤 William Leipold
- 👤 Kathleen McGroddy
- 👤 Daniel J. Nickel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 20:18
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/04; B24B37/042; B24B49/00; H; H10; H10P; H10P74/00; H10P74/23; Y; Y10; Y10S; Y10S438/00; Y10S438/941
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
115 words
A method, using a programmed computer, for controlling a fabrication level of a fabrication process to produce an integrated circuit ("IC") chip, said fabrication level proceeding according to a design pattern, said method comprising the steps of: (a) imposing a grid over said design pattern, said grid having a plurality of sections, each section of said plurality of sections having a portion of said design pattern contained therein; (b) automatically establishing a pattern density value for each section of said plurality of sections based upon said portion of said design pattern contained therein; and (c) controlling said fabrication level based upon said pattern density values established in said step (b) to improve said fabrication process.
Claim 2
Independent Claim
115 words
A method, using a programmed computer, for controlling a fabrication level of a fabrication process to produce an integrated circuit ("IC") chip, said fabrication level proceeding according to a design pattern, said method comprising the steps of: (a) imposing a grid over said design pattern, said grid having a plurality of sections, each section of said plurality of sections having a portion of said design pattern contained therein; (b) automatically establishing a pattern density value for each section of said plurality of sections based upon said portion of said design pattern contained therein; and (c) controlling said fabrication level based upon said pattern density values established in said step (b) to improve said fabrication process.
Claim 3
Dependent Claim
42 words
The method of claim 1, wherein said fabrication level comprises chemical mechanical polishing ("CMP"), and wherein said controlling step (c) further comprises automatically establishing a CMP process stop parameter as a function of said pattern density values established is said step (b).
Claim 4
Dependent Claim
45 words
The method of claim 2, wherein said method further includes automatically performing a statistical analysis of said pattern density values established in said step (b), said controlling step (c) further comprising automatically establishing said CMP process stop parameter as a function of said statistical analysis.
Claim 5
Dependent Claim
42 words
The method of claim 3, wherein said statistical analysis comprises determining a mean and a variance for said pattern density values, said controlling step (c) comprising automatically establishing said CMP process stop parameter as a function of said mean and said variance.
Claim 6
Dependent Claim
37 words
The method of claim 4, wherein said CMP process stop parameter comprises CMP process time such that said controlling step (c) comprises automatically establishing said CMP process time as a function of said mean and said variance.
Claim 7
Dependent Claim
21 words
The method of claim 5, wherein said function of said controlling step (c) comprises a*(mean/variance)+b, wherein a and b are constants.
Claim 8
Dependent Claim
60 words
The method of claim 4, wherein said CMP process stop parameter comprises a CMP target removal value such that said controlling step (c) comprises automatically establishing said CMP target removal value as a function of said mean and said variance, wherein said target removal value comprises an amount of insulation to be removed from a wafer test site during CMP.
Claim 9
Dependent Claim
21 words
The method of claim 7, wherein said function of said controlling step (c) comprises a*exp(b,(1-mean)/variance)), wherein a and b are constants.
Claim 10
Dependent Claim
60 words
The method of claim 1, wherein said IC chip fabrication level comprises photolithographically controlled etching, and wherein said method further comprises, prior to said controlling step (c), automatically adjusting said design pattern as a function of said pattern density values established in said step (b) such that etching errors due to pattern density based etch rate variations are automatically reduced.
Claim 11
Dependent Claim
62 words
The method of claim 9, wherein said method further includes automatically establishing, for each section of said plurality of sections of the grid, a first density range as a function of the density value for that section of the grid, said automatically adjusting of said design pattern further comprising automatically adjusting said design pattern as a function of said first density ranges.
Claim 12
Dependent Claim
74 words
The method of claim 10, wherein said design pattern defines a plurality of circuit structures of said IC chip, said method further including assigning a second density range to each circuit structure as a function of said first density ranges of said plurality of sections of said grid, said second density ranges of said circuit structures facilitating said step of automatically adjusting said design pattern to reduce said pattern density based etch rate variations.
Claim 13
Dependent Claim
42 words
The method of claim 11, wherein for each circuit structure, said assigning of said second density range to the circuit structure comprises assigning a maximum density range of said first density ranges of sections of said grid contacted by the circuit structure.
Claim 14
Dependent Claim
71 words
The method of claim 12, wherein each circuit structure of said plurality of circuit structures is defined by a corresponding portion of the design pattern, and wherein said automatically adjusting of said design pattern includes, for each circuit structure of said plurality of circuit structures, adjusting the corresponding portion of the design pattern if the second density range of the circuit structure is within a first plurality of second density ranges.
Claim 15
Dependent Claim
80 words
The method of claim 13, wherein the corresponding portion of the design pattern for each circuit structure of said plurality of circuit structures includes at least one line, and wherein for each of said plurality of circuit structures, said adjusting of said design pattern includes adjusting a width of said at least one line as a function of the second density range of the circuit structure if the second density range is within said first plurality of second density ranges.
Claim 16
Dependent Claim
55 words
The method of claim 14, wherein said adjusting of said design pattern includes for each circuit structure adjusting the design pattern for the circuit structure such that the width of the at least one line is increased a first amount if the second density range of the circuit structure comprises a first predefined density range.
Claim 17
Dependent Claim
55 words
The method of claim 15, wherein said adjusting of said design pattern includes for each circuit structure adjusting the design pattern for the circuit structure such that the width of the at least one line is increased a second amount if the second density range of the circuit structure comprises a second predefined density range.
Claim 18
Dependent Claim
36 words
The method of claim 14, wherein, for each circuit structure, said method includes preserving the design pattern of the circuit structure if the second density range of the circuit structure comprises a third predefined density range.
Claim 19
Dependent Claim
19 words
The method of claim 1, further in combination with completing said fabrication process, subsequent to said controlling step (c).
Claim 20
Independent Claim
106 words
A system for controlling a fabrication level of a fabrication process to produce an integrated circuit ("IC") chip, said fabrication level proceeding according to a design pattern, said system comprising: means for imposing a grid over said design pattern, said grid having a plurality of sections, each section of said plurality of sections having a portion of said design pattern contained therein; means for automatically establishing a pattern density value for each section of said plurality of sections based upon said portion of said design pattern contained therein; and means for controlling said fabrication level based upon said pattern density values to improve said fabrication process.
Claim 21
Independent Claim
106 words
A system for controlling a fabrication level of a fabrication process to produce an integrated circuit ("IC") chip, said fabrication level proceeding according to a design pattern, said system comprising: means for imposing a grid over said design pattern, said grid having a plurality of sections, each section of said plurality of sections having a portion of said design pattern contained therein; means for automatically establishing a pattern density value for each section of said plurality of sections based upon said portion of said design pattern contained therein; and means for controlling said fabrication level based upon said pattern density values to improve said fabrication process.
Claim 22
Dependent Claim
38 words
The system of claim 19, wherein said fabrication process comprises chemical mechanical polishing ("CMP"), and wherein said means for controlling comprises means for automatically establishing a CMP process stop parameter as a function of said pattern density values.
Claim 23
Dependent Claim
60 words
The system of claim 19, wherein said fabrication process comprises photolithographically controlled etching, and wherein said means for controlling comprises means for automatically adjusting said design pattern as a function of said pattern density values prior to said photolithographic etching such that etching errors due to pattern density based etch rate variations are automatically reduced during said photolithographically controlled etching.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-09-03 | 2000-03-04 | 2000-09-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-09-03 | 2004-03-04 | 2004-09-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-09-03 | 2008-03-04 | 2008-09-03 | $7700.00 | Window Closed / Lapsed |