Patent US5552925A successfully refreshed from Google Patents.
US5552925A
Expired / Lapsed
US
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Electro-micro-mechanical shutters on transparent substrates
Assignee: Zenith Electronics LLC
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Filing: 1993-09-07
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Granted: 1996-09-03
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Expires: 2013-09-07
Abstract
Abstract A micro-mechanical shutter array using micro-mechanical technology and silicon-on-transparent-substrate technology. The micro-mechanical shutter array is operated by using electro-static forces. Two basic types of shutter movements are described, viz. an electric force/electric counter-force and an electric force/mechanical (spring) counter-force.
Inventors
- 👤 Eugene R. Worley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 17:07
CPC Classifications
G; G02; G02B; G02B26/00; G02B26/02; B; B82; B82Y; B82Y15/00; G09; G09G; G09G3/00; G09G3/20; G09G3/34; G09G3/3433; H; H02; H02N; H02N1/00; H02N1/002; H02N1/004; G09G2300/00; G09G2300/08
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
134 words
Control apparatus for selectively blocking radiation comprising, substrate means which is transparent to a radiation signal, shutter means movably mounted on said substrate means, said shutter means fabricated of a material which is electrically conductive and non-transparent to said radiation signal, electrode means mounted on said substrate means adjacent to said shutter means, said electrode means fabricated of a material which is electrically conductive, gating means mounted on said substrate means and electrically connected to at least one of said shutter means and said electrode means, and signal supplying means mounted on said substrate means for supplying electric signals to said electrode means and to said shutter means via said gating means to selectively apply an electric force to said shutter means in order to move said shutter means relative to said substrate means.
Claim 2
Dependent Claim
134 words
Control apparatus for selectively blocking radiation comprising, substrate means which is transparent to a radiation signal, shutter means movably mounted on said substrate means, said shutter means fabricated of a material which is electrically conductive and non-transparent to said radiation signal, electrode means mounted on said substrate means adjacent to said shutter means, said electrode means fabricated of a material which is electrically conductive, gating means mounted on said substrate means and electrically connected to at least one of said shutter means and said electrode means, and signal supplying means mounted on said substrate means for supplying electric signals to said electrode means and to said shutter means via said gating means to selectively apply an electric force to said shutter means in order to move said shutter means relative to said substrate means.
Claim 3
Dependent Claim
23 words
The control apparatus recited in claim 1 including, mask means disposed substantially parallel to said substrate means and aligned with said shutter means.
Claim 4
Dependent Claim
32 words
The control apparatus recited in claim 2 wherein, said mask means and said shutter means include a plurality of mask units and a plurality of shutter units thereby providing a scanning array.
Claim 5
Dependent Claim
26 words
The control apparatus recited in claim 1 wherein, said substrate means is comprised of one of the materials in the class comprising silicon-on-sapphire, silicon-on-quartz and polysilicon-on-glass.
Claim 6
Dependent Claim
14 words
The control apparatus recited in claim 1 wherein, said gating means comprises MOS-type transistors.
Claim 7
Dependent Claim
17 words
The control apparatus recited in claim 5 wherein, said transistors selectively operate to produce analog voltage signals.
Claim 8
Dependent Claim
25 words
The control apparatus recited in claim 1 wherein, said signal supplying means includes control signal means for selectively applying control signals to said shutter means.
Claim 9
Dependent Claim
29 words
The control apparatus recited in claim 1 wherein, said signal supplying means includes capacitance means to retain a prescribed signal level thereat after the application of a control signal.
Claim 10
Dependent Claim
36 words
The control apparatus recited in claim 1 including, mechanical force applying means connected to said shutter means for supplying a mechanical counter-force to said shutter means which mechanical counter-force is in opposition to said electric force.
Claim 11
Dependent Claim
17 words
The control apparatus recited in claim 9 wherein, said mechanical force applying means comprises a resilient spring.
Claim 12
Dependent Claim
15 words
The control apparatus recited in claim 10 wherein, said resilient spring is a helical spring.
Claim 13
Dependent Claim
16 words
The control apparatus recited in claim 10 wherein, said resilient spring is an elongated, accordion spring.
Claim 14
Dependent Claim
16 words
The control apparatus recited in claim 1 including, calibration circuit means connected to said substrate means.
Claim 15
Dependent Claim
18 words
The control apparatus recited in claim 13 wherein, said calibration circuit means provides an automatic linearity calibration circuit.
Claim 16
Dependent Claim
68 words
The control apparatus recited in claim 14 wherein, said calibration circuit includes at least one calibration cell adjacent to said shutter means on said substrate means, signal means for activating each calibration cell, calibration signal means for supplying a calibration signal representative of radiation passing through said shutter means, and controller means for receiving said calibration signal to calculate weighting coefficients required to produce a linear output signal.
Claim 17
Dependent Claim
33 words
The control apparatus recited in claim 1 including, radiation source means for irradiating said mask means, and projection surface means for receiving radiation which passes through said mask means and said shutter means.
Claim 18
Dependent Claim
16 words
The control apparatus recited in claim 1 wherein, said shutter means comprises a monolithic micro-mechanical shutter.
Claim 19
Dependent Claim
19 words
The control apparatus recited in claim 17 wherein, said signal supplying means is fabricated using conventional integrated circuit techniques.
Claim 20
Dependent Claim
20 words
The control apparatus recited in claim 1 wherein, said shutter means provides a rotary motion relative to said substrate means.
Claim 21
Dependent Claim
20 words
The control apparatus recited in claim 1 wherein, said shutter means provides a sliding motion relative to said substrate means.
Claim 22
Dependent Claim
20 words
The control apparatus recited in claim 1 wherein, said shutter means provides a bending motion relative to said substrate means.
Claim 23
Dependent Claim
20 words
The control apparatus recited in claim 1 wherein, said shutter means provides a cantilevered motion relative to said substrate means.
Claim 24
Dependent Claim
14 words
The control apparatus recited in claim 1 wherein, said electrode means comprise tapered electrodes.
Claim 25
Dependent Claim
15 words
The control apparatus recited in claim 1 wherein, said electrode means surround said shutter means.
Claim 26
Dependent Claim
30 words
The control apparatus recited in claim 24 wherein, said electrode means include a plurality of electrodes which are arranged to alternate in polarity relative to the electric signal supplied thereto.
Claim 27
Dependent Claim
31 words
The control apparatus recited in claim 1 wherein, said signal supplying means comprises row and column conductors connected to said shutter means whereby said shutter means can be selected for operation.
Claim 28
Dependent Claim
57 words
The apparatus recited in claim 1 wherein, said signal supplying means selectively and alternatively supplies signals to said electrode means and to said shutter means via said gating means to apply an electric counterforce to said shutter means to move said shutter means relative to said substrate means in the opposite direction relative to said electric force.
Claim 29
Dependent Claim
27 words
The control apparatus recited in claim 27 wherein, said shutter means is selectively moved to an equilibrium position determined by said electric force and said electric counter-force.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-09-03 | 2000-03-04 | 2000-09-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-09-03 | 2004-03-04 | 2004-09-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-09-03 | 2008-03-04 | 2008-09-03 | $7700.00 | Window Closed / Lapsed |