US5552017A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for improving the process uniformity in a reactor by asymmetrically adjusting the reactant gas flow
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
•
Filing: 1995-11-27
•
Granted: 1996-09-03
•
Expires: 2015-11-27
Abstract
Abstract A method for improving the etch rate uniformity and the chemical vapor deposition uniformity in a single-wafer reaction chamber was achieved. The method utilizes an asymmetric gas distribution system to increase the reactant gas flow over regions of the wafer in an etcher where the etch rates are low, and increases the reactant gas flow in CVD deposition reactors over regions of the wafer where the deposition rates are low. More specifically, a modified shower head having an array of orifices that are varied in size and spacing across the shower face are proposed to optimize the uniformity. The method is particularly useful for improving the uniformity near the wafer flat where the uniformity is known to be exceptionally poor in conventional single-wafer reactors.
Inventors
- 👤 Syun-Ming Jang
- 👤 Chen-Hua Yu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 01:19
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45563; C23C16/45565; C23C16/50; C23C16/505; C23C16/509; C23C16/5096; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/32431; H01J37/3244; H01J37/32449; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0418; H10P72/0421; Y; Y10; Y10S; Y10S438/00; Y10S438/935; Y10S438/941
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
134 words
A method for plasma etching in a single-wafer etching chamber having improved etch rate uniformity, comprising the steps of: providing a single-wafer etching chamber having a pumping system and a throttle valve for evacuating and maintaining a constant low pressure in said chamber; providing gas flow controllers and gas monitor meters connected to said etching chamber, thereby controlling the flow rates of reactant gases into said etching chamber; and providing a gas distribution system in said etching chamber to asymmetrically distribute said reactant gas over a wafer having a wafer flat, said wafer resting on a substrate electrode, thereby improving the etch uniformity near the flat on said wafer during etching; forming a plasma in said reactant gas by coupling radio frequency (RF) power to said reactant gas, and thereby plasma etching said wafer.
Claim 2
Independent Claim
134 words
A method for plasma etching in a single-wafer etching chamber having improved etch rate uniformity, comprising the steps of: providing a single-wafer etching chamber having a pumping system and a throttle valve for evacuating and maintaining a constant low pressure in said chamber; providing gas flow controllers and gas monitor meters connected to said etching chamber, thereby controlling the flow rates of reactant gases into said etching chamber; and providing a gas distribution system in said etching chamber to asymmetrically distribute said reactant gas over a wafer having a wafer flat, said wafer resting on a substrate electrode, thereby improving the etch uniformity near the flat on said wafer during etching; forming a plasma in said reactant gas by coupling radio frequency (RF) power to said reactant gas, and thereby plasma etching said wafer.
Claim 3
Dependent Claim
53 words
The method of claim 1, wherein said gas distribution system in said etching chamber is a shower head having an array of orifices of differing diameters and spacing to provide the necessary gas flow distribution across the surface of said wafer and adjacent to said wafer flat, thereby providing said improved etch uniformity.
Claim 4
Dependent Claim
44 words
The method of claim 2, wherein said shower head also serves as a top electrode aligned over the substrate electrode, and said radio frequency power is applied to said top electrode by means of an impedance matching circuit, and thereby providing said plasma etching.
Claim 5
Dependent Claim
33 words
The method of claim 1, wherein said RF power is applied to the substrate electrode by means of an impedance matching circuit and a blocking capacitor, and thereby provides reactive ion etching (RIE).
Claim 6
Dependent Claim
16 words
The method of claim 3, wherein said RF power is a frequency of 13.56 MHz (megahertz).
Claim 7
Dependent Claim
29 words
The method of claim 4, wherein said RF power is frequency of 13.56 MHz., and the blocking capacitor provides a DC bias on said substrate electrode for anisotropic etching.
Claim 8
Dependent Claim
35 words
The method of claim 1, wherein said asymmetric distribution of said reactant gas also compensates for the etch rate non-uniformity due to variations in the wafer loading-effects and substrate electrode edge-effects near said wafer flat.
Claim 9
Independent Claim
117 words
A method for chemical vapor deposition of a film in a single-wafer reaction chamber having improved film uniformity, comprising the steps of: providing a reaction chamber having a pumping system and a throttle valve for evacuating and maintaining a constant low pressure; providing a gas flow controller and meters connected to said reaction chamber, thereby controlling the flow rates of reactant gases into said reaction chamber; and providing a gas distribution system in said reaction chamber to asymmetrically distribute said reactant gas over a wafer residing on a substrate electrode, thereby improving the film deposition uniformity near the flat on said wafer during deposition; heating said wafer residing on said substrate electrode and thereby depositing said film.
Claim 10
Independent Claim
117 words
A method for chemical vapor deposition of a film in a single-wafer reaction chamber having improved film uniformity, comprising the steps of: providing a reaction chamber having a pumping system and a throttle valve for evacuating and maintaining a constant low pressure; providing a gas flow controller and meters connected to said reaction chamber, thereby controlling the flow rates of reactant gases into said reaction chamber; and providing a gas distribution system in said reaction chamber to asymmetrically distribute said reactant gas over a wafer residing on a substrate electrode, thereby improving the film deposition uniformity near the flat on said wafer during deposition; heating said wafer residing on said substrate electrode and thereby depositing said film.
Claim 11
Dependent Claim
55 words
The method of claim 8, wherein said gas distribution system in said deposition chamber is a shower head having an array of orifices of differing diameters and spacing to provide the necessary gas rate distribution across the surface of said wafer and adjacent to said wafer flat to provide the improved uniformity of said film.
Claim 12
Dependent Claim
22 words
The method of claim 8, wherein said substrate electrode is heated to a temperature of between about 360° to 440 ° C.
Claim 13
Dependent Claim
33 words
The method of claim 8, wherein said asymmetric distribution of said reactant gas also compensates for non-uniform deposition resulting from variations in said wafer temperature and reactant gas depletion-effects at said wafer flat.
Claim 14
Dependent Claim
31 words
The method of claim 8, wherein RF power applied to said shower head electrode through an impedance matching circuit provides a means for depositing plasma enhanced chemical vapor deposited (PECVD) films.
Claim 15
Dependent Claim
124 words
A single-wafer etching apparatus having improved etch rate uniformity, comprising of: a single-wafer etching chamber having a pumping system and a throttle valve for evacuating and maintaining a constant low pressure in said chamber; gas flow controllers and gas flow monitor meters connected to said etching chamber, thereby controlling the flow rates of reactant gases into said etching chamber; and a gas distribution system in said etching chamber to asymmetrically distribute said reactant gas over a wafer having a wafer flat, said wafer residing on a substrate electrode, thereby improving the etch uniformity near the flat on said wafer during etching; a plasma in said reactant gas formed by coupling radio frequency (RF) power to said reactant gas, and thereby plasma etching said wafer.
Claim 16
Dependent Claim
124 words
A single-wafer etching apparatus having improved etch rate uniformity, comprising of: a single-wafer etching chamber having a pumping system and a throttle valve for evacuating and maintaining a constant low pressure in said chamber; gas flow controllers and gas flow monitor meters connected to said etching chamber, thereby controlling the flow rates of reactant gases into said etching chamber; and a gas distribution system in said etching chamber to asymmetrically distribute said reactant gas over a wafer having a wafer flat, said wafer residing on a substrate electrode, thereby improving the etch uniformity near the flat on said wafer during etching; a plasma in said reactant gas formed by coupling radio frequency (RF) power to said reactant gas, and thereby plasma etching said wafer.
Claim 17
Dependent Claim
54 words
The etching apparatus of claim 13, wherein said gas distribution system in said etching chamber is a shower head having an array of orifices of differing diameters and spacing to provide the necessary gas flow distribution across the surface of said wafer and adjacent to said wafer flat, thereby providing said improved etch uniformity.
Claim 18
Dependent Claim
45 words
The etching apparatus of claim 14, wherein said shower head also serves as a top electrode aligned over the substrate electrode, and said radio frequency power is applied to said top electrode by means of an impedance matching circuit, and thereby providing said plasma etching.
Claim 19
Dependent Claim
97 words
A chemical vapor deposition apparatus providing films with improved film uniformity, comprising of: a single-wafer reaction chamber having a pumping system and a throttle valve for evacuating and maintaining a constant low pressure in said chamber; gas flow controllers and flow monitor meters connected to said reaction chamber, thereby controlling the flow rates of said reactant gases into said reaction chamber; a gas distribution system in said reaction chamber to asymmetrically distribute said reactant gas over a wafer residing on a heated substrate electrode, thereby improving the deposition uniformity near the flat on said wafer during deposition.
Claim 20
Dependent Claim
97 words
A chemical vapor deposition apparatus providing films with improved film uniformity, comprising of: a single-wafer reaction chamber having a pumping system and a throttle valve for evacuating and maintaining a constant low pressure in said chamber; gas flow controllers and flow monitor meters connected to said reaction chamber, thereby controlling the flow rates of said reactant gases into said reaction chamber; a gas distribution system in said reaction chamber to asymmetrically distribute said reactant gas over a wafer residing on a heated substrate electrode, thereby improving the deposition uniformity near the flat on said wafer during deposition.
Claim 21
Dependent Claim
58 words
The chemical vapor deposition apparatus of claim 16, wherein said gas distribution system in said reaction chamber is a shower head having an array of orifices of differing diameters and spacing to provide the necessary gas rate distribution across the surface of said wafer and adjacent to said wafer flat to provide the improved uniformity of said film.
Claim 22
Dependent Claim
25 words
The chemical vapor deposition apparatus of claim 16, wherein said substrate electrode is heated to a temperature of between about 360° to 440 ° C.
Claim 23
Dependent Claim
41 words
The chemical vapor deposition apparatus of claim 16, wherein RF power applied to said shower head/electrode through an impedance matching circuit provides a means for depositing plasma enhanced chemical vapor deposited (PECVD) films having improved film uniformity near the wafer flat.
Claim 24
Dependent Claim
31 words
The chemical vapor deposition apparatus of claim 18, wherein said wafer on said substrate electrode is heated to a temperature in the range of between about 360° to 440 ° C.
Claim 25
Dependent Claim
24 words
The chemical vapor deposition apparatus of claim 18, wherein said RF power is at a frequency of between about 450 kHz to 13.56 MHz.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-09-03 | 2000-03-04 | 2000-09-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-09-03 | 2004-03-04 | 2004-09-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-09-03 | 2008-03-04 | 2008-09-03 | $7700.00 | Window Closed / Lapsed |