← Back to Patent Explorer
US5550435A Expired / Lapsed US ⏱️ 0.0 years remaining

Field emission cathode apparatus

Assignee: NEC Corp
•
Filing: 1994-10-28
•
Granted: 1996-08-27
•
Expires: 2014-10-28
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract It is the object of the invention to provide a field emission cathode apparatus comprising plural electron-emitters which eliminates nonuniformity of electric emission density over an emissive area, controls emission currents by active devices, and improves reliability of the apparatus. P-type silicon 5 and n-type silicon 4 are formed on n + -type silicon 6. On n-type silicon 4, an electron-emitter 1 made of Mo is formed, and electron-emitter 1 is surrounded by a grid electrode 2 and an insulator layer 3. N-type silicon 4 serves as a channel region of a junction gate field effect transistor, and a current flowing through it is controlled by a voltage applied to p-type silicon 5. Accordingly, an electron current emitted from electron-emitter 1 is also controlled by this transistor, and by setting up an operation region of this transistor in a saturation current region, nonuniformity of electron emissions from electron-emitters can be improved. Even when a portion of cathodes is damaged, the damage is not magnified to the whole apparatus, and the life of the field emission cathode can be prolonged.

Inventors

  • 👤 Toshihide Kuriyama
  • 👤 Hideo Makishima

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 12:11
CPC Classifications
H; H01; H01J; H01J17/00; H01J17/38; H01J17/40; H01J1/00; H01J1/02; H01J1/30; H01J1/304; H01J1/3042; H01J2201/00; H01J2201/30; H01J2201/319

Claims Analysis

Total Claims: 18
Claim 1
Independent Claim 76 words
A field emission cathode apparatus, comprising: an electron-emitter having a micropoint at a tip portion thereof; an active device connected in series to said electron-emitter; and means for applying a predetermined voltage across said electron-emitter and said active device to emit electrons from said micropoint of said electron-emitter; wherein a current flowing through said electron-emitter is modulated by said active device; and said active device has a breakdown voltage that is greater than said predetermined voltage.
Claim 2
Dependent Claim 76 words
A field emission cathode apparatus, comprising: an electron-emitter having a micropoint at a tip portion thereof; an active device connected in series to said electron-emitter; and means for applying a predetermined voltage across said electron-emitter and said active device to emit electrons from said micropoint of said electron-emitter; wherein a current flowing through said electron-emitter is modulated by said active device; and said active device has a breakdown voltage that is greater than said predetermined voltage.
Claim 3
Dependent Claim 20 words
A field emission cathode apparatus according to claim 1, wherein said active device is a junction gate field effect transistor.
Claim 4
Dependent Claim 20 words
A field emission cathode apparatus according to claim 1, wherein said active device is an insulated gate field effect transistor.
Claim 5
Dependent Claim 17 words
A field emission cathode apparatus according to claim 1, wherein said active device is a bipolar transistor.
Claim 6
Dependent Claim 25 words
A field emission cathode apparatus, according to claim 4, wherein: said bipolar transistor includes an emitter-collector path that is connected in series to said electron-emitter.
Claim 7
Dependent Claim 25 words
The field emission cathode apparatus according to claim 2, wherein a source-drain path of said active device is connected in series to said electron emitter.
Claim 8
Dependent Claim 24 words
The field emission cathode apparatus of claim 3, wherein a source-drain path of said active device is connected in series to said electron emitter.
Claim 9
Dependent Claim 37 words
The field emission cathode apparatus of claim 1, further comprising an n-type silicon located under said electron-emitter so that said n-type silicon provides a pinch-off resistance to limit short circuit current when there is a short circuit.
Claim 10
Dependent Claim 88 words
A field emission cathode apparatus, comprising: an electron-emitter having a micropoint at a tip portion thereof; a grid electrode; an active device connected in series to said electron-emitter; and means for applying a predetermined voltage across said grid electrode and an n + -type source of said active device to emit electrons from said micropoint of said electron emitter; wherein a current flowing through said electron emitter is modulated by said active device and said active device has a breakdown voltage that is greater than said predetermined voltage.
Claim 11
Dependent Claim 88 words
A field emission cathode apparatus, comprising: an electron-emitter having a micropoint at a tip portion thereof; a grid electrode; an active device connected in series to said electron-emitter; and means for applying a predetermined voltage across said grid electrode and an n + -type source of said active device to emit electrons from said micropoint of said electron emitter; wherein a current flowing through said electron emitter is modulated by said active device and said active device has a breakdown voltage that is greater than said predetermined voltage.
Claim 12
Dependent Claim 29 words
A field emission cathode apparatus according to claim 9, wherein said active device includes an n-type drain and is connected in series to said electron-emitter through said n-type drain.
Claim 13
Dependent Claim 33 words
A field emission cathode apparatus according to claim 9, wherein said active device includes an n + -type collector and is connected in series to said electron-emitter through said n + -type collector.
Claim 14
Dependent Claim 20 words
A field emission cathode apparatus according to claim 9, wherein said active device is a junction gate field effect transistor.
Claim 15
Dependent Claim 20 words
A field emission cathode apparatus according to claim 9, wherein said active device is an insulated gate field effect transistor.
Claim 16
Dependent Claim 17 words
A field emission cathode apparatus according to claim 9, wherein said active device is a bipolar transistor.
Claim 17
Dependent Claim 25 words
A field emission cathode apparatus according to claim 14, wherein said bipolar transistor includes an emitter-collector path that is connected in series to said electron-emitter.
Claim 18
Dependent Claim 38 words
A field emission cathode apparatus according to claim 9, further comprising an n-type silicon located under said electron-emitter so that said n-type silicon provides a pinch-off resistance to limit short circuit current when there is a short circuit.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1999-08-27 2000-02-26 2000-08-27 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2003-08-27 2004-02-26 2004-08-27 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2007-08-27 2008-02-26 2008-08-27 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag