US5548964A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for cooling a vacuum device
Assignee: Applied Materials Inc
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Filing: 1994-06-27
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Granted: 1996-08-27
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Expires: 2014-06-27
Abstract
Abstract A cooling structure for a vacuum device includes an external frame portion positioned between vacuum chamber flange and cryopump flange; a cooling panel formed in a partition surrounded by said external frame, the cooling panel having an opening that allows a fluid flow between said vacuum chamber and said cryopump; a cooling means positioned in contact with an exposed peripheral cooling panel surface for cooling said cooling panel; and a coolant feeding means for supplying coolant to the cooling means.
Inventors
- 👤 Takeshi Jinbo
- 👤 Hiroyuki Takahama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 02:26
CPC Classifications
F; F04; F04B; F04B37/00; F04B37/06; F04B37/08; Y; Y10; Y10S; Y10S417/00; Y10S417/901
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
77 words
An apparatus for cooling a vacuum structure that includes a vacuum chamber and a vacuum pump, comprising: a central cooling panel positioned between a vacuum chamber flange and a suction pump flange, said cooling panel having at least one opening formed therethrough and adapted to pass a fluid flow between said vacuum chamber and said suction pump; at least one spoke projecting radially from said central cooling panel; and cooling means adapted to cool said cooling panel.
Claim 2
Independent Claim
77 words
An apparatus for cooling a vacuum structure that includes a vacuum chamber and a vacuum pump, comprising: a central cooling panel positioned between a vacuum chamber flange and a suction pump flange, said cooling panel having at least one opening formed therethrough and adapted to pass a fluid flow between said vacuum chamber and said suction pump; at least one spoke projecting radially from said central cooling panel; and cooling means adapted to cool said cooling panel.
Claim 3
Dependent Claim
35 words
The apparatus of claim 1, further comprising: a cooling pipe arranged in contact with an exposed portion of a cooling panel outer surface; and coolant feed means for circulating a coolant in said cooling pipe.
Claim 4
Dependent Claim
30 words
The apparatus of claim 1, said cooling means further comprising: a cooling pipe opening inside said cooling panel; and coolant feed means for circulating a coolant in said cooling pipe.
Claim 5
Independent Claim
79 words
An apparatus for cooling a vacuum structure that includes a vacuum chamber and a vacuum pump, comprising: a cooling panel positioned between a vacuum chamber flange and a suction pump flange, said cooling panel having at least one opening formed therethrough and adapted to pass a fluid flow between said vacuum chamber and said suction pump; cooling means adapted to cool said cooling panel; and a partition with multiple apertures having inner peripheral surfaces formed through said cooling panel.
Claim 6
Independent Claim
79 words
An apparatus for cooling a vacuum structure that includes a vacuum chamber and a vacuum pump, comprising: a cooling panel positioned between a vacuum chamber flange and a suction pump flange, said cooling panel having at least one opening formed therethrough and adapted to pass a fluid flow between said vacuum chamber and said suction pump; cooling means adapted to cool said cooling panel; and a partition with multiple apertures having inner peripheral surfaces formed through said cooling panel.
Claim 7
Dependent Claim
20 words
The apparatus of claim 4, wherein multiple dips and bumps are formed on said inner peripheral surfaces of said apertures.
Claim 8
Independent Claim
88 words
An apparatus for cooling a vacuum structure that includes a vacuum chamber and a vacuum pump, comprising: a cooling panel positioned between a vacuum chamber flange and a suction pump flange said cooling panel having at least one opening formed therethrough and adapted to pass a fluid flow between said vacuum chamber and said suction pump; cooling means adapted to cool said cooling panel; and a cross-shaped partition inside said cooling panel, said partition defining tubes to form an integrated cooling pipe connected to said coolant feed means.
Claim 9
Independent Claim
88 words
An apparatus for cooling a vacuum structure that includes a vacuum chamber and a vacuum pump, comprising: a cooling panel positioned between a vacuum chamber flange and a suction pump flange said cooling panel having at least one opening formed therethrough and adapted to pass a fluid flow between said vacuum chamber and said suction pump; cooling means adapted to cool said cooling panel; and a cross-shaped partition inside said cooling panel, said partition defining tubes to form an integrated cooling pipe connected to said coolant feed means.
Claim 10
Independent Claim
118 words
An apparatus for cooling a vacuum structure that includes a vacuum chamber and a vacuum pump, comprising: a cooling panel positioned between a vacuum chamber flange and a suction pump flange said cooling panel having at least one opening formed therethrough and adapted to pass a fluid flow between said vacuum chamber and said suction pump; cooling means adapted to cool said cooling panel; and ring-shaped bumps on a cooling panel outer surface, said ring-shaped bumps adapted for complementary engagement with grooves formed on said vacuum chamber flange and on said suction pump flange, wherein said complementary engagement of said bumps with said grooves seals said cooling panel between said vacuum chamber flange and said suction pump flange.
Claim 11
Independent Claim
118 words
An apparatus for cooling a vacuum structure that includes a vacuum chamber and a vacuum pump, comprising: a cooling panel positioned between a vacuum chamber flange and a suction pump flange said cooling panel having at least one opening formed therethrough and adapted to pass a fluid flow between said vacuum chamber and said suction pump; cooling means adapted to cool said cooling panel; and ring-shaped bumps on a cooling panel outer surface, said ring-shaped bumps adapted for complementary engagement with grooves formed on said vacuum chamber flange and on said suction pump flange, wherein said complementary engagement of said bumps with said grooves seals said cooling panel between said vacuum chamber flange and said suction pump flange.
Claim 12
Independent Claim
118 words
An apparatus for cooling a vacuum structure that includes a vacuum chamber and a vacuum pump, comprising: a cooling panel positioned between a vacuum chamber flange and a suction pump flange said cooling panel having at least one opening formed therethrough and adapted to pass a fluid flow between said vacuum chamber and said suction pump; cooling means adapted to cool said cooling panel; and ring-shaped bumps on said cooling panel outer surface, said ring-shaped bumps adapted for complementary engagement with grooves formed on said vacuum chamber flange and on said suction pump flange, wherein said complementary engagement of said bumps against said grooves seals said cooling panel between said vacuum chamber flange and said suction pump flange.
Claim 13
Independent Claim
118 words
An apparatus for cooling a vacuum structure that includes a vacuum chamber and a vacuum pump, comprising: a cooling panel positioned between a vacuum chamber flange and a suction pump flange said cooling panel having at least one opening formed therethrough and adapted to pass a fluid flow between said vacuum chamber and said suction pump; cooling means adapted to cool said cooling panel; and ring-shaped bumps on said cooling panel outer surface, said ring-shaped bumps adapted for complementary engagement with grooves formed on said vacuum chamber flange and on said suction pump flange, wherein said complementary engagement of said bumps against said grooves seals said cooling panel between said vacuum chamber flange and said suction pump flange.
Claim 14
Dependent Claim
35 words
The apparatus of claim 8, further comprising: a cooling pipe arranged in contact with an exposed portion of a cooling panel outer surface; and coolant feed means for circulating a coolant in said cooling pipe.
Claim 15
Dependent Claim
30 words
The apparatus of claim 8, said cooling means further comprising: a cooling pipe opening inside said cooling panel; and coolant feed means for circulating a coolant in said cooling pipe.
Claim 16
Dependent Claim
24 words
The apparatus of claim 8, said cooling panel further comprising: a central panel; and at least one spoke projecting radially from said central panel.
Claim 17
Dependent Claim
17 words
The apparatus of claim 8, said cooling panel further comprising: a partition having multiple apertures formed therethrough.
Claim 18
Dependent Claim
39 words
The apparatus of claim 8, said cooling panel further comprising: a cross-shaped partition inside said cooling panel, said partition defining tubes joined to said cooling pipe arranged in contact with said exposed portion of said cooling panel outer surface.
References Cited (Backward Citations)
US3137551A
Cited
US3188785A
Cited
US3423947A
Cited
US3464223A
Cited
DE1938035A1
Cited
US3557536A
Cited
US3719052A
Cited
US3785162A
Cited
US3902330A
Cited
US4679402A
Cited
US4926648A
Cited
US4873833A
Cited
EP0370702A1
Cited
US5062271A
Cited
US5357760A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-08-27 | 2000-02-26 | 2000-08-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-08-27 | 2004-02-26 | 2004-08-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-08-27 | 2008-02-26 | 2008-08-27 | $7700.00 | Window Closed / Lapsed |