US5548140A
Expired / Lapsed
US
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High-Speed, low-noise millimeterwave hemt and pseudomorphic hemt
Assignee: The AT&T MVPD Group LLC
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Filing: 1995-06-06
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Granted: 1996-08-20
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Expires: 2015-06-06
Abstract
Abstract An epitaxial structure and method of manufacture for a field-effect transistor capable of high-speed low-noise microwave, submillimeterwave and millimeterwave applications. Preferably, the epitaxial structure includes a donor layer and/or buffer layer made from a semiconductor material having the formula AlP 0 .39+y Sb 0 .61-y.
Inventors
- 👤 Chanh Nguyen
- 👤 Takyiu Liu
- 👤 Mehran Matloubian
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 13:28
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/015; H10D30/40; H10D30/47; H10D30/471; H10D30/473; H10D30/4732; H10D62/00; H10D62/80; H10D62/82; H10D62/824; H10D62/85; H10D62/852
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
101 words
An epitaxial structure for a field-effect transistor comprising: a first quantum well barrier layer over a semiconductive support, said first quantum well barrier layer comprising a first wide-bandgap semiconductor material; a channel layer over the first quantum well barrier layer, said channel layer comprising a narrow-bandgap semiconductor material; a second quantum well barrier layer over the channel layer, said second quantum well barrier layer comprising a second wide-bandgap semiconductor material; a barrier layer over the second quantum well barrier layer, said barrier layer comprising AlP 0 .39+y Sb 0 .61-y, wherein y has a value between about 0 and about 0.39.
Claim 2
Dependent Claim
101 words
An epitaxial structure for a field-effect transistor comprising: a first quantum well barrier layer over a semiconductive support, said first quantum well barrier layer comprising a first wide-bandgap semiconductor material; a channel layer over the first quantum well barrier layer, said channel layer comprising a narrow-bandgap semiconductor material; a second quantum well barrier layer over the channel layer, said second quantum well barrier layer comprising a second wide-bandgap semiconductor material; a barrier layer over the second quantum well barrier layer, said barrier layer comprising AlP 0 .39+y Sb 0 .61-y, wherein y has a value between about 0 and about 0.39.
Claim 3
Dependent Claim
31 words
The epitaxial structure of claim 1 further comprising a donor layer between the second quantum well barrier layer and the barrier layer, said donor layer comprising a third wide-bandgap semiconductor material.
Claim 4
Dependent Claim
15 words
The epitaxial structure of claim 1 wherein the barrier layer further comprises a first dopant.
Claim 5
Dependent Claim
15 words
The epitaxial structure of claim 2 wherein the donor layer further comprises a second dopant.
Claim 6
Dependent Claim
29 words
The epitaxial structure of claim 2 further comprising a buffer layer between the first quantum well barrier layer and the semiconductive support, said buffer layer comprising a semiconductor material.
Claim 7
Dependent Claim
106 words
The epitaxial structure of claim 5 wherein: said semiconductor material is AlP 0 .39+y Sb 0 .61-y, wherein y has a value between about 0 and about 0.39; said first wide-bandgap semiconductor material and said second wide-bandgap semiconductor material are compounds selected from the group consisting essentially of AlIn 0 .48+z As 0 .52-z and AlP 0 .39+y Sb 0 .61-y, wherein z has a value between about 0 and about 0.52 and y has a value between about 0 and about 0.39; said narrow-bandgap semiconductor material is Ga 0 .47-x In 0 .53+x As, wherein x has a value between about 0 and about 0.47.
Claim 8
Dependent Claim
14 words
The epitaxial structure of claim 6 wherein the semiconductive support comprises an InP substrate.
Claim 9
Dependent Claim
116 words
An epitaxial structure for a field-effect transistor comprising: a buffer layer over a semiconductive support, said buffer layer comprising AlP 0 .39+y Sb 0 .61-y, wherein y has a value between about 0 and about 0.39; a first quantum well barrier layer over the buffer layer, said first quantum well barrier layer comprising a first wide-bandgap semiconductor material; a channel layer over the first quantum well barrier layer, said channel layer comprising a narrow-bandgap semiconductor material; a second quantum well barrier layer over the channel layer, said second quantum well barrier layer comprising a second wide-bandgap semiconductor material; a barrier layer over the second quantum well barrier layer, said barrier layer comprising a wide-bandgap semiconductor material.
Claim 10
Dependent Claim
116 words
An epitaxial structure for a field-effect transistor comprising: a buffer layer over a semiconductive support, said buffer layer comprising AlP 0 .39+y Sb 0 .61-y, wherein y has a value between about 0 and about 0.39; a first quantum well barrier layer over the buffer layer, said first quantum well barrier layer comprising a first wide-bandgap semiconductor material; a channel layer over the first quantum well barrier layer, said channel layer comprising a narrow-bandgap semiconductor material; a second quantum well barrier layer over the channel layer, said second quantum well barrier layer comprising a second wide-bandgap semiconductor material; a barrier layer over the second quantum well barrier layer, said barrier layer comprising a wide-bandgap semiconductor material.
Claim 11
Dependent Claim
31 words
The epitaxial structure of claim 8 further comprising a donor layer between the second quantum well barrier layer and the barrier layer, said donor layer comprising a third wide-bandgap semiconductor material.
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