Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
117 words
A method of producing a plurality of nozzle assemblies, comprising: forming a first member to have a first generally planar surface and a plurality of grooves formed within said first generally planar surface; forming a second member to have a second generally planar surface; joining said first member and said second member along said first generally planar surface and said second generally planar surface to form a composite structure; and separating said composite structure into individual composite portions to form individual nozzle assemblies, wherein each of said nozzle assemblies comprises a nozzle intake, a nozzle outlet and a channel connecting said nozzle intake and said nozzle outlet in fluid flow communication formed from said plurality of grooves.
Claim 2
Independent Claim
117 words
A method of producing a plurality of nozzle assemblies, comprising: forming a first member to have a first generally planar surface and a plurality of grooves formed within said first generally planar surface; forming a second member to have a second generally planar surface; joining said first member and said second member along said first generally planar surface and said second generally planar surface to form a composite structure; and separating said composite structure into individual composite portions to form individual nozzle assemblies, wherein each of said nozzle assemblies comprises a nozzle intake, a nozzle outlet and a channel connecting said nozzle intake and said nozzle outlet in fluid flow communication formed from said plurality of grooves.
Claim 3
Dependent Claim
22 words
The method of claim 1, wherein said step of separating said composite structure comprises: sawing said composite structure using a rotary saw.
Claim 4
Dependent Claim
20 words
The method of claim 1, wherein said step of separating said composite structure comprises: slitting and breaking said composite structure.
Claim 5
Dependent Claim
27 words
The method of claim 1, wherein said step of forming a first member comprises: selectively removing material from said first member to form said plurality of grooves.
Claim 6
Dependent Claim
19 words
The method of claim 4, wherein said step of selectively removing material comprises: etching material from said first member.
Claim 7
Dependent Claim
27 words
The method of claim 1, wherein said step of forming said first member is carried out by combining an optical lithographic method and an ion-supplemented etching method.
Claim 8
Dependent Claim
27 words
The method of claim 1, wherein said step of forming said first member is carried out by combining an optical lithographic method and a wet-chemical etching method.
Claim 9
Dependent Claim
26 words
The method of claim 1, wherein said step of joining said first member and said second member is carried out through application of an electrostatic field.
Claim 10
Dependent Claim
24 words
The method of claim 1, wherein said step of joining said first member and said second member is carried out through an adhesion process.
Claim 11
Dependent Claim
22 words
The method of claim 1, wherein said step of joining said first member and said second member is carried out by welding.
Claim 12
Dependent Claim
18 words
The method of claim 1, wherein said step of forming said first member comprises: etching a silicon wafer.
Claim 13
Dependent Claim
24 words
The method of claim 11, further comprising: applying an oxide layer to said silicon wafer; and applying a plastic layer over said oxide layer.
Claim 14
Dependent Claim
20 words
The method of claim 11, wherein said step of forming said second member is carried out using a glass plate.
Claim 15
Independent Claim
127 words
A method for producing a nozzle assembly, comprising: forming a first member to have a fluid inlet, a fluid outlet having a cross-sectional area of approximately 25 to 500 square micrometers, and a channel formed in a first face of said first member, said channel connecting said fluid inlet and said fluid outlet in fluid flow communication, wherein said fluid inlet, said fluid outlet, and said channel are formed by selectively removing material from said first face of said first member; forming a second member having a second face; and securing said second member to said first member so that said second face cooperates with said fluid inlet, said fluid outlet, and said channel in said first face to form fluid flow paths for the nozzle assembly.
Claim 16
Independent Claim
127 words
A method for producing a nozzle assembly, comprising: forming a first member to have a fluid inlet, a fluid outlet having a cross-sectional area of approximately 25 to 500 square micrometers, and a channel formed in a first face of said first member, said channel connecting said fluid inlet and said fluid outlet in fluid flow communication, wherein said fluid inlet, said fluid outlet, and said channel are formed by selectively removing material from said first face of said first member; forming a second member having a second face; and securing said second member to said first member so that said second face cooperates with said fluid inlet, said fluid outlet, and said channel in said first face to form fluid flow paths for the nozzle assembly.
Claim 17
Dependent Claim
18 words
The method of claim 14, wherein material is selectively removed from said first face using an etching process.
Claim 18
Dependent Claim
29 words
The method of claim 15, wherein said step of forming said first member further comprises: forming a plurality of filter passageways by selectively removing material from said first face.
Claim 19
Dependent Claim
24 words
The method of claim 14, wherein said step of securing said second member to said first member is carried out using an adhesion process.
Claim 20
Dependent Claim
22 words
The method of claim 14, wherein said step of securing said second member to said first member is carried out by welding.
Claim 21
Dependent Claim
23 words
The method of claim 14, wherein said step of securing said second member to said first member is carried out by diffusion bonding.