Patent US5544256A successfully refreshed from Google Patents.
US5544256A
Expired / Lapsed
US
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Automated defect classification system
Assignee: International Business Machines Corp
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Filing: 1993-10-22
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Granted: 1996-08-06
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Expires: 2013-10-22
Abstract
Abstract An integrated visual defect detection and classification system. The invention includes adaptive defect detection and image labeling, defect feature measures, and a knowledge based inference shell/engine for classification based on fuzzy logic. The combination of these elements comprises a method and system for providing detection and analysis of product defects in many application domains, such as semiconductor and electronic packaging manufacturing.
Inventors
- 👤 Virginia H. Brecher
- 👤 Chou Paul B.-L
- 👤 Robert W. Hall
- 👤 Debra M. Parisi
- 👤 Ravishankar Rao
- 👤 Stuart L. Riley
- 👤 Martin C. Sturzenbecker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 17:03
CPC Classifications
G; G06; G06T; G06T7/00; G06T7/0002; G06T7/0004; G06T7/0006; G06T7/001; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/89; G01N21/892; G01N21/898; G01N21/8986; G01N21/95; G01N21/9501; G06T2207/00; G06T2207/10; G06T2207/10056; G06T2207/30; G06T2207/30108; G06T2207/30148; Y; Y10; Y10S; Y10S706/00; Y10S706/90
Claims Analysis
Total Claims: 54
Claim 1
Independent Claim
141 words
A digital computer for automatically classifying defects in an object comprising: means for forming a defect image from a digital input image of an object; means for forming an adaptively labeled defect image from said digital input image and a reference label image of aid object; means for creating a plurality of defect feature measurements of a defect from at least said defect image, and said adaptively labeled image; fuzzy logic inference engine means having a plurality of if-then defect class rules each based on a plurality of fuzzy sets of fuzzy logic parameters, means for converting said defect feature measurements into fuzzy logic parameters and applying said converted parameters to said if-then rules to compute a delete class fuzzy set for each defect; and means lot deriving output data from each said defect class fuzzy set which classifies each defect.
Claim 2
Dependent Claim
141 words
A digital computer for automatically classifying defects in an object comprising: means for forming a defect image from a digital input image of an object; means for forming an adaptively labeled defect image from said digital input image and a reference label image of aid object; means for creating a plurality of defect feature measurements of a defect from at least said defect image, and said adaptively labeled image; fuzzy logic inference engine means having a plurality of if-then defect class rules each based on a plurality of fuzzy sets of fuzzy logic parameters, means for converting said defect feature measurements into fuzzy logic parameters and applying said converted parameters to said if-then rules to compute a delete class fuzzy set for each defect; and means lot deriving output data from each said defect class fuzzy set which classifies each defect.
Claim 3
Dependent Claim
21 words
The system of claim 1 further including means for forming said digital input image from an optical image of said object.
Claim 4
Dependent Claim
45 words
The system of claim 1 wherein said defect detecting means includes means for aligning and comparing said digital input image with a digital reference image to produce a binary defect image where ones correspond to defect pixels and all other pixels are set to zero.
Claim 5
Dependent Claim
36 words
The system of claim 3 wherein said defect detecting means includes means for labelling each pixel of said binary defect image with a label that identifies which element of said object is represented by said pixel.
Claim 6
Dependent Claim
37 words
The system of claim 4 wherein said labelling means comprises means for labelling each non-defect pixel with the same label for that pixel in a labelled digital reference image and means for adaptively labelling said defect pixels.
Claim 7
Dependent Claim
88 words
The system of claim 5 wherein said adaptive labelling means comprises means for forming a label distribution of each type of label of non-defect pixels in the vicinity of the location of defect pixel from said labelled digital reference image, means for measuring a distribution similarity parameter of said defect pixel and means for comparing the measurement of said distribution similarity parameter and said label distributions for each type of label to produce a similarity result and means for labelling said defect pixel based on said similarity result.
Claim 8
Dependent Claim
20 words
The system of claim 6 wherein said adaptive labelling means includes means for adaptively forming said labelled digital reference image.
Claim 9
Dependent Claim
20 words
The system of claim 4 wherein said feature measurement means includes means for grouping connected defect pixels into defect regions.
Claim 10
Dependent Claim
28 words
The system of claim 8 wherein said feature measurement means include means for grouping said defect region into defect clusters based on one or more region grouping criteria.
Claim 11
Dependent Claim
21 words
The system of claim 9 wherein said feature measurement means includes means for measuring and storing defect region feature measurement data.
Claim 12
Dependent Claim
27 words
The system of claim 10 wherein defect region measurement means includes means for measuring one or more of location, area, perimeter and shape of the defect regions.
Claim 13
Dependent Claim
19 words
The system of claim 11 wherein said region grouping criteria are based on said defect region feature measurement data.
Claim 14
Dependent Claim
25 words
The system of claim 12 wherein said defect regions are grouped into defect clusters based on the spatial proximity within said labelled binary defect image.
Claim 15
Dependent Claim
30 words
The system of claim 9 wherein said defect region grouping means includes means for using a union-find algorithm to compare similarities of the defect regions based on the grouping criteria.
Claim 16
Dependent Claim
21 words
The system of claim 10 wherein said feature measurement means includes means for measuring and storing defect cluster feature measurement data.
Claim 17
Dependent Claim
30 words
The system of claim 15 wherein said defect cluster feature measurement means includes means for combining the defect region feature measurement data for all defect regions within a defect cluster.
Claim 18
Dependent Claim
35 words
The system of claim 15 wherein said defect cluster feature measurement means includes means for calculating a bounding curve for all defect regions within a defect cluster measuring feature measurement data of the bounding curve.
Claim 19
Dependent Claim
32 words
The system of claim 15 wherein said defect cluster feature measurement means includes means for measuring one or more of size, shape, texture, location, composition, color and contrast of the defect cluster.
Claim 20
Dependent Claim
144 words
The system of claim 1 wherein said fuzzy logic inference engine means comprises: means for storing one or more feature fuzzy sets for each of said plurality of defect feature measurements; means for storing said plurality of if-then class rules, said rules having an output class derived from said one or more feature fuzzy sets; means for converting said defect feature measurements into fuzzy logic parameters; means for comparing said fuzzy logic parameters with each feature fuzzy set of each class rule to produce a degree of match for each feature fuzzy set for each class rule; means for combining the degree of match for each fuzzy set of each class rule to produce a degree of match for each class rule; means for combining the degree of match for each class rule to produce a defect class fuzzy set for each object defect.
Claim 21
Dependent Claim
38 words
The system of claim 19 wherein said fuzzy logic inference engine means further includes means for multiplying said degree of match for each class rule by a weighing factor to produce a scale factor for each class rule.
Claim 22
Dependent Claim
37 words
The system of claim 20 wherein said fuzzy logic inference engine means further includes means for combining the scale factor with the output class for each rule to produce an output class fuzzy set for each rule.
Claim 23
Dependent Claim
28 words
The system of claim 21 further including means for defuzzifying said defect class fuzzy set to classify the object defect as one of a plurality of defect classes.
Claim 24
Dependent Claim
17 words
The system of claim 19 wherein said plurality of if-then class rules includes supportive and exclusionary rules.
Claim 25
Dependent Claim
48 words
The system of claim 19 wherein said fuzzy logic inference engine means includes control means for producing class outputs for a subset of if-then rules based on one or more conditional expressions and means for producing said defect class fuzzy set based on the subset of class outputs.
Claim 26
Dependent Claim
17 words
The system of claim 24 wherein said conditional expressions include fuzzy operations, arithmetic operations and/or logical operations.
Claim 27
Independent Claim
118 words
A method for automatically classifying defects in an object comprising the steps of: forming a defect image from a digital input image of the object; forming an adaptively labeled defect image from said digital input image and a reference label image; creating a plurality of defect feature measurements of a defect from at least said defect image, and said adaptively labeled image; converting said defect feature measurements into fuzzy logic parameters; applying said converted parameters to a plurality of if-then rules each based on a plurality of fuzzy sets of fuzzy logic parameters; computing a defect class fuzzy set for each defect; and deriving output data from each of said defect class fuzzy sets for classifying each defect.
Claim 28
Independent Claim
118 words
A method for automatically classifying defects in an object comprising the steps of: forming a defect image from a digital input image of the object; forming an adaptively labeled defect image from said digital input image and a reference label image; creating a plurality of defect feature measurements of a defect from at least said defect image, and said adaptively labeled image; converting said defect feature measurements into fuzzy logic parameters; applying said converted parameters to a plurality of if-then rules each based on a plurality of fuzzy sets of fuzzy logic parameters; computing a defect class fuzzy set for each defect; and deriving output data from each of said defect class fuzzy sets for classifying each defect.
Claim 29
Dependent Claim
21 words
The method of claim 26 including the step of forming said digital input image from an optical image of said object.
Claim 30
Dependent Claim
43 words
The method of claim 26 wherein said defect detecting step includes aligning and comparing said digital input image with a digital reference image to produce a binary defect image where ones correspond to defect pixels and all other pixels are set to zero.
Claim 31
Dependent Claim
34 words
The method of claim 28 wherein said defect detecting step includes labelling each pixel of said binary defect image with a label that identifies which element of said object is represented by said pixel.
Claim 32
Dependent Claim
33 words
The method of claim 29 wherein said labelling step comprises labelling each non-defect pixel with the same label for that pixel in a labelled digital reference image and adaptively labelling said defect pixels.
Claim 33
Dependent Claim
80 words
The method of claim 30 wherein said adaptive labelling step comprises forming a label distribution of each type of label of non-defect pixels in the vicinity of the location of the defect pixel from said labelled digital reference image, measuring a distribution similarity parameter of said defect pixel, comparing the measurement of said distribution similarity parameter and said label distributions for each type of label to produce a similarity result, and labelling said defect pixel based on said similarity result.
Claim 34
Dependent Claim
18 words
The method of claim 31 wherein said adaptive labelling step includes adaptively forming said labelled digital reference image.
Claim 35
Dependent Claim
18 words
The method of claim 29 wherein said feature measurement step includes grouping connected defect pixels into defect regions.
Claim 36
Dependent Claim
26 words
The method of claim 33 wherein said feature measurement step includes grouping said defect region into defect clusters based on one or more region grouping criteria.
Claim 37
Dependent Claim
19 words
The method of claim 34 wherein said feature measurement step includes measuring and storing defect region feature measurement data.
Claim 38
Dependent Claim
25 words
The method of claim 35 wherein defect region measurement step includes measuring one or more of location, area, perimeter and shape of the defect regions.
Claim 39
Dependent Claim
19 words
The method of claim 36 wherein said region grouping criteria are based on said defect region feature measurement data.
Claim 40
Dependent Claim
25 words
The method of claim 37 wherein said defect regions are grouped into defect clusters based on the spatial proximity within said labelled binary defect image.
Claim 41
Dependent Claim
28 words
The method of claim 34 wherein said defect cluster grouping step includes using a union-find algorithm to compare similarities of the defect regions based on the grouping criteria.
Claim 42
Dependent Claim
19 words
The method of claim 35 wherein said feature measurement step includes measuring and storing defect cluster feature measurement data.
Claim 43
Dependent Claim
28 words
The method of claim 40 wherein said defect cluster feature measurement step includes combining the defect region feature measurement data for all defect regions within a defect cluster.
Claim 44
Dependent Claim
34 words
The method of claim 40 wherein said defect cluster feature measurement step includes calculating a bounding curve for all defect regions within a defect cluster and measuring feature measurement data of the bounding curve.
Claim 45
Dependent Claim
31 words
The method of claim 40 wherein said defect cluster feature measurement step includes measuring one or more of size, shape, texture, location, composition, color and contrast features of the defect cluster.
Claim 46
Dependent Claim
130 words
The method of claim 26 wherein said classifying step comprises: storing one or more feature fuzzy sets for each of said plurality of defect feature measurements; storing said plurality of if-then class rules, said rules having an output class derived from said one or more feature fuzzy sets; converting said defect feature measurements into fuzzy logic parameters; comparing said fuzzy logic parameters with each feature fuzzy set of each class rule to produce a degree of match for each feature fuzzy set for each class rule; combining the degree of match for each fuzzy set of each class rule to produce a degree of match for each class rule; and combining the degree of match for each class rule to produce a defect class fuzzy set for each object defect.
Claim 47
Dependent Claim
33 words
The method of claim 44 wherein said classifying step further includes multiplying said degree of match for each class rule by a weighing factor to produce a scale factor for each class rule.
Claim 48
Dependent Claim
32 words
The method of claim 45 wherein said classifying step further includes combining the scale factor with the output class for each rule to produce an output class fuzzy set for each rule.
Claim 49
Dependent Claim
29 words
The method of claim 43 further including the step of defuzzifying said defect class fuzzy set to classify the object defect as one of a plurality of defect classes.
Claim 50
Dependent Claim
17 words
The method of claim 44 wherein said plurality of if-then class rules includes supportive and exclusionary rules.
Claim 51
Dependent Claim
40 words
The method of claim 44 wherein said classifying step includes producing class outputs for a subset of if-then rules based on one or more conditional expressions and producing said defect class fuzzy sets based on the subset of class outputs.
Claim 52
Dependent Claim
17 words
The method of claim 49 wherein said conditional expressions include fuzzy operations, arithmetic operations and/or logical operations.
Claim 53
Dependent Claim
28 words
The digital computer of claim 1 wherein said plurality of defect feature measurements are created from said defect image, said adaptively labeled image and said reference label image.
Claim 54
Dependent Claim
26 words
The method of claim 26 wherein said plurality defect feature measurements are created from said defect image, said adaptively labeled image and said reference label image.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-08-06 | 2000-02-05 | 2000-08-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-08-06 | 2004-02-05 | 2004-08-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-08-06 | 2008-02-05 | 2008-08-06 | $7700.00 | Window Closed / Lapsed |