Torsional vibrators and light deflectors using the torsional vibrator

Claim 2

A torsional vibrator with at least two degrees of freedom, comprising: a first vibrator having a plate member and a first torsional spring, said first vibrator having a first resonant frequency; a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part connected to said first vibrator, and a second torsional spring, said second torsional spring being coaxial with said first torsional spring; and, drive means for rotatingly vibrating said responsively acting part substantially at the first resonant frequency of said first vibrator.

Claim 3

A light deflector having a torsional vibrator with at least two degrees of freedom, said light deflector comprising: a first vibrator having a light reflection mirror and a first torsional spring, said first vibrator having a first resonant frequency; a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part connected to said first vibrator, and a second torsional spring, said second torsional spring being coaxial with said first torsional spring; and drive means for rotatingly vibrating said responsively acting part substantially at the first resonant frequency of said first vibrator with at least one driving force.

Claim 4

A light deflector having a torsional vibrator with at least two degrees of freedom, said light deflector comprising: a first vibrator having a light reflection mirror and a first torsional spring, said first vibrator having a first resonant frequency; a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part connected to said first vibrator, and a second torsional spring, said second torsional spring being coaxial with said first torsional spring; and drive means for rotatingly vibrating said responsively acting part substantially at the first resonant frequency of said first vibrator with at least one driving force.

Claim 5

A light deflector as claimed in claim 2, wherein said at least one driving force is an electromagnetic force.

Claim 6

A light deflector as claimed in claim 2, wherein said at least one driving force is an electrostatic force.

Claim 7

A light deflector having a torsional vibrator with at least two degrees of freedom, said light deflector comprising: a first vibrator having a light reflection mirror and a first torsional spring, said first vibrator having a first resonant frequency; a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part connected to said first vibrator, and a second torsional spring, said second torsional spring being coaxial with said first torsional spring; and drive means for driving said responsively acting part with a pair of driving forces, said second spring as its center as a driving force, said responsively acting part being thereby rotatingly vibrated substantially at the first resonant frequency of said first vibrator.

Claim 8

A light deflector having a torsional vibrator with at least two degrees of freedom, said light deflector comprising: a first vibrator having a light reflection mirror and a first torsional spring, said first vibrator having a first resonant frequency; a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part connected to said first vibrator, and a second torsional spring, said second torsional spring being coaxial with said first torsional spring; and drive means for driving said responsively acting part with a pair of driving forces, said second spring as its center as a driving force, said responsively acting part being thereby rotatingly vibrated substantially at the first resonant frequency of said first vibrator.

Claim 9

A light deflector as claimed in claim 5, wherein said pair of driving forces are electromagnetic forces.

Claim 10

A light deflector as claimed in claim 5, wherein said pair of driving forces are electrostatic forces.

Claim 11

A light deflector comprising: a torsional vibrator with at least two degrees of freedom made of magnetic material, including: a first vibrator having a light reflection mirror and a pair of first torsional springs, said pair of first torsional springs being formed along a center axis of said light reflection mirror, and a second vibrator having a responsively acting part provided on an outer side of said first vibrator and a pair of second torsional springs, said pair of second torsional springs being formed along said center axis of said light reflection mirror; a plurality of fixing parts each attached to a respective second torsional spring; a substrate for supporting said fixing parts of said torsional vibrator with at least two degrees of freedom; and an electromagnetic driving means for generating an electromagnetic force to rotate said responsively acting part around said center axis of said light reflection mirror, said electromagnetic driving means including first and second yokes and first and second coils arranged opposite to said responsively acting part and on opposite sides of said center axis of said light reflection mirror, said responsively acting part being rotatingly vibrated by said electromagnetic driving means substantially at a resonant frequency of said first vibrator.

Claim 12

A light deflector comprising: a torsional vibrator with at least two degrees of freedom made of magnetic material, including: a first vibrator having a light reflection mirror and a pair of first torsional springs, said pair of first torsional springs being formed along a center axis of said light reflection mirror, and a second vibrator having a responsively acting part provided on an outer side of said first vibrator and a pair of second torsional springs, said pair of second torsional springs being formed along said center axis of said light reflection mirror; a plurality of fixing parts each attached to a respective second torsional spring; a substrate for supporting said fixing parts of said torsional vibrator with at least two degrees of freedom; and an electromagnetic driving means for generating an electromagnetic force to rotate said responsively acting part around said center axis of said light reflection mirror, said electromagnetic driving means including first and second yokes and first and second coils arranged opposite to said responsively acting part and on opposite sides of said center axis of said light reflection mirror, said responsively acting part being rotatingly vibrated by said electromagnetic driving means substantially at a resonant frequency of said first vibrator.

Claim 13

A light defelctor comprising: a torsional vibrator with two degrees of freedom made of electrically conductive material, including: a first vibrator having a light reflection mirror and a pair of first torsional springs, said pair of first torsional springs being formed along a center axis of said light reflection mirror, said first vibrator having a first resonant frequency, and a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part provided on an outer side of said first vibrator, and a pair of second torsional springs, said pair of second torsional springs being formed along said center axis of said light reflection mirror so as to be coaxial with said pair of first torsional springs; a substrate for supporting fixed parts of said torsional vibrator with two degrees of freedom; and an electrostatic driving means for generating an electrostatic force to rotate said responsively acting part around said center axis of said light reflection mirror, said electrostatic driving means including a pair of fixed electrodes arranged opposite to said responsively acting part and on opposite sides of said center axis of said light reflection mirror, said responsively acting part being rotatingly vibrated by said electrostatic driving means substantially at the first resonant frequency of said first vibrator.

Claim 14

A light defelctor comprising: a torsional vibrator with two degrees of freedom made of electrically conductive material, including: a first vibrator having a light reflection mirror and a pair of first torsional springs, said pair of first torsional springs being formed along a center axis of said light reflection mirror, said first vibrator having a first resonant frequency, and a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part provided on an outer side of said first vibrator, and a pair of second torsional springs, said pair of second torsional springs being formed along said center axis of said light reflection mirror so as to be coaxial with said pair of first torsional springs; a substrate for supporting fixed parts of said torsional vibrator with two degrees of freedom; and an electrostatic driving means for generating an electrostatic force to rotate said responsively acting part around said center axis of said light reflection mirror, said electrostatic driving means including a pair of fixed electrodes arranged opposite to said responsively acting part and on opposite sides of said center axis of said light reflection mirror, said responsively acting part being rotatingly vibrated by said electrostatic driving means substantially at the first resonant frequency of said first vibrator.

Claim 15

A light deflector comprising: a torsional vibrator with two degrees of freedom made of electrically conductive material, including: a first vibrator having a light reflection mirror and a pair of first torsional springs, said pair of first torsional springs being formed along a center axis of said light reflection mirror, said first vibrator having a first resonant frequency, and a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part provided on an outer side of said first vibrator, and a pair of second torsional springs, said pair of second torsional springs being formed along said center axis of said light reflection mirror so as to be coaxial with said pair of first torsional springs; a substrate for supporting fixed parts of said torsional vibrator with two degrees of freedom; and an electrostatic driving means for generating a pair of electrostatic forces to rotate said responsively acting part around said center axis of said light reflection mirror, said electrostatic driving means including two pairs of fixed electrodes arranged on opposite sides of front and rear surfaces of said responsively acting part and on opposite sides of said center axis of said light reflecting mirror, said responsively acting part being provided with said pair of electrostatic forces and rotatingly vibrated by said electrostatic driving means substantially at the first resonant frequency of said first vibrator.

Claim 16

A light deflector comprising: a torsional vibrator with two degrees of freedom made of electrically conductive material, including: a first vibrator having a light reflection mirror and a pair of first torsional springs, said pair of first torsional springs being formed along a center axis of said light reflection mirror, said first vibrator having a first resonant frequency, and a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part provided on an outer side of said first vibrator, and a pair of second torsional springs, said pair of second torsional springs being formed along said center axis of said light reflection mirror so as to be coaxial with said pair of first torsional springs; a substrate for supporting fixed parts of said torsional vibrator with two degrees of freedom; and an electrostatic driving means for generating a pair of electrostatic forces to rotate said responsively acting part around said center axis of said light reflection mirror, said electrostatic driving means including two pairs of fixed electrodes arranged on opposite sides of front and rear surfaces of said responsively acting part and on opposite sides of said center axis of said light reflecting mirror, said responsively acting part being provided with said pair of electrostatic forces and rotatingly vibrated by said electrostatic driving means substantially at the first resonant frequency of said first vibrator.

Claim 17

A light deflector comprising: a torsional vibrator with two degrees of freedom, including: a first vibrator having a light reflection mirror and a pair of first torsional springs, said pair of first torsional springs being formed along a center axis of said light reflection mirror, said first vibrator having a first resonant frequency, and a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part provided on an outer side of said first vibrator, and a pair of second torsional springs, said pair of second torsional springs being formed along said center axis of said light reflection mirror so as to be coaxial with said pair of first torsional springs; a substrate for supporting fixed parts of said torsional vibrator with two degrees of freedom; and an electromagnetic driving means for generating a pair of electromagnetic forces to rotate said responsively acting part around said center axis of said light reflection mirror, said electromagnetic driving means including first and second permanent magnets bonded to opposite sides of said responsively acting part, and first and second coils fixed to said substrate and arranged opposite said first and second permanent magnets, responsively, said responsively acting part being provided with said pair of electromagnetic forces and being thereby rotatingly vibrated by said electromagnetic driving means substantially at the first resonant frequency of said first vibrator.

Claim 18

A light deflector comprising: a torsional vibrator with two degrees of freedom, including: a first vibrator having a light reflection mirror and a pair of first torsional springs, said pair of first torsional springs being formed along a center axis of said light reflection mirror, said first vibrator having a first resonant frequency, and a second vibrator having a second resonant frequency lower than the first resonant frequency, and having a responsively acting part provided on an outer side of said first vibrator, and a pair of second torsional springs, said pair of second torsional springs being formed along said center axis of said light reflection mirror so as to be coaxial with said pair of first torsional springs; a substrate for supporting fixed parts of said torsional vibrator with two degrees of freedom; and an electromagnetic driving means for generating a pair of electromagnetic forces to rotate said responsively acting part around said center axis of said light reflection mirror, said electromagnetic driving means including first and second permanent magnets bonded to opposite sides of said responsively acting part, and first and second coils fixed to said substrate and arranged opposite said first and second permanent magnets, responsively, said responsively acting part being provided with said pair of electromagnetic forces and being thereby rotatingly vibrated by said electromagnetic driving means substantially at the first resonant frequency of said first vibrator.