Optical scanner

Claim 2

An optical scanner comprising: a scanning element; a mirror surface provided on said scanning element; a support element for freely supporting at one end thereof said scanning element, said support element being capable of flexure; a vibrating element provided on another end of said support element; and a drive source for inducing vibrations in said vibrating element, whereby vibration of said vibrating element produces elastic deformation of said support element and consequent scanning movement of said scanning element; wherein said support element is a shaft having at least two modes of elastic deformation and said drive source is capable of inducing oscillations in said vibrating element of a resonant frequency corresponding to each mode of elastic deformation of said shaft, said scanning element being rotated in at least two directions by the elastic vibrations of said deformable shaft; and wherein said vibrating element, shaft and scanning element are integrally formed as a flat plate-like member.

Claim 3

An optical scanner as in claim 1, wherein said scanning element includes a weight to provide said scanning element with an imbalance with respect to a center of balance of said deformable shaft.

Claim 4

An optical scanner as in claim 2, wherein said flat plate-like member is a thin plate formed from at least one of a silicon and a glass wafer.

Claim 5

An optical scanner as in claim 3, wherein said mirror surface is provided as an etching of said thin plate.

Claim 6

An optical scanner comprising: a scanning element; a mirror surface provided on said scanning element; a support element for freely supporting at one end thereof said scanning element, said support element being capable of flexure; a vibrating element provided on another end of said support element; and a drive source for inducing vibrations in said vibrating element, whereby vibration of said vibrating element produces elastic deformation of said support element and consequent scanning movement of said scanning element; wherein said support element is a shaft having at least two modes of elastic deformation and said drive source is capable of inducing oscillations in said vibrating element of a resonant frequency corresponding to each mode of elastic deformation of said shaft, said scanning element being rotated in at least two directions by the elastic vibrations of said deformable shaft; wherein said at least two modes of elastic deformation include a twisting mode about said shaft axis and a bending mode in which said shaft bends lengthwise along its axis; and wherein said drive source comprises: a first oscillator which outputs a signal of a first frequency substantially equal to a resonant frequency of said twisting mode; a second oscillator which outputs a signal of a second frequency substantially equal to a resonant frequency of said bending mode; means for amplifying the output of said first and second oscillators; means for selecting at least one amplified output of at least one of said oscillators; and an actuator for receiving the at least one amplified output from the selecting means, said actuator vibrating said vibrating element.

Claim 7

An optical scanner comprising: a scanning element; a mirror surface provided on said scanning element; a support element for freely supporting at one end thereof said scanning element, said support element being capable of flexure; a vibrating element provided on another end of said support element; and a drive source for inducing vibrations in said vibrating element, whereby vibration of said vibrating element produces elastic deformation of said support element and consequent scanning movement of said scanning element; wherein said support element is a shaft having at least two modes of elastic deformation and said drive source is capable of inducing oscillations in said vibrating element of a resonant frequency corresponding to each mode of elastic deformation of said shaft, said scanning element being rotated in at least two directions by the elastic vibrations of said deformable shaft; wherein said at least two modes of elastic deformation include a twisting mode about said shaft axis and a bending mode in which said shaft bends lengthwise along its axis; and wherein said drive source comprises: a first oscillator which outputs a signal of a first frequency substantially equal to a resonant frequency of said twisting mode; a second oscillator which outputs a signal of a second frequency substantially equal to a resonant frequency of said bending mode; means for amplifying the output of said first and second oscillators; means for selecting at least one amplified output of at least one of said oscillators; and an actuator for receiving the at least one amplified output from the selecting means, said actuator vibrating said vibrating element.

Claim 8

An optical scanner as in claim 5, wherein said actuator is selected from the group consisting of: a piezoelectric element, an electrostatic element, and a magnetostrictive element.

Claim 9

An optical scanner as in claim 5, wherein said selecting means is capable of selecting amplified outputs from both of said oscillators which are applied to said actuator.

Claim 10

An optical scanner as in claim 5, wherein said amplifying means is a variable gain amplifying means.

Claim 11

An optical scanner as in claim 5, wherein said drive source includes, as an actuator for inducing vibrations in said vibrating element, at least one of a piezoelectric element, an electrostatic element and a magnetostrictive element.

Claim 12

An optical scanner comprising: a scanning element; a mirror surface provided on said scanning element; a support element for freely supporting at one end thereof said scanning element, said support element being capable of flexure; a vibrating element provided on another end of said support element; and a drive source for inducing vibrations in said vibrating element, whereby vibration of said vibrating element produces elastic deformation of said support element and consequent scanning movement of said scanning element; wherein said support element is a shaft having at least two modes of elastic deformation and said drive source is capable of inducing oscillations in said vibrating element of a resonant frequency corresponding to each mode of elastic deformation of said shaft, said scanning element being rotated in at least two directions by the elastic vibrations of said deformable shaft; wherein said at least two modes of elastic deformation include a twisting mode about said shaft axis and a bending mode in which said shaft bends lengthwise along its axis; and wherein said drive source comprises: a voltage setting unit for setting a voltage to select a desired vibration frequency, said desired vibration frequency being one which is substantially equal to at least one of a resonant frequency of said twisting mode and a resonant frequency of said bending mode; a voltage to frequency converter connected to an output of said voltage setting unit; an amplifier connected to an output of said converter; and an actuator connected to an output of said amplifier said actuator vibrating said vibrating element.

Claim 13

An optical scanner comprising: a scanning element; a mirror surface provided on said scanning element; a support element for freely supporting at one end thereof said scanning element, said support element being capable of flexure; a vibrating element provided on another end of said support element; and a drive source for inducing vibrations in said vibrating element, whereby vibration of said vibrating element produces elastic deformation of said support element and consequent scanning movement of said scanning element; wherein said support element is a shaft having at least two modes of elastic deformation and said drive source is capable of inducing oscillations in said vibrating element of a resonant frequency corresponding to each mode of elastic deformation of said shaft, said scanning element being rotated in at least two directions by the elastic vibrations of said deformable shaft; wherein said at least two modes of elastic deformation include a twisting mode about said shaft axis and a bending mode in which said shaft bends lengthwise along its axis; and wherein said drive source comprises: a voltage setting unit for setting a voltage to select a desired vibration frequency, said desired vibration frequency being one which is substantially equal to at least one of a resonant frequency of said twisting mode and a resonant frequency of said bending mode; a voltage to frequency converter connected to an output of said voltage setting unit; an amplifier connected to an output of said converter; and an actuator connected to an output of said amplifier said actuator vibrating said vibrating element.

Claim 14

An optical scanner as in claim 10, wherein said amplifier is a variable gain amplifier.