US5538699A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microwave introducing device provided with an endless circular waveguide and plasma treating apparatus provided with said device
Assignee: Canon Inc
•
Filing: 1995-06-07
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Granted: 1996-07-23
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Expires: 2015-06-07
Abstract
Abstract A microwave introducing device has an endless circular waveguide provided with a plurality of slots. The circular waveguide is provided with a microwave introducing portion connected to a microwave power source, and the plurality of slots are spaced through an inner side of the circular waveguide such that the slots are arranged at the inner side of the circular waveguide at a given interval. A plasma treating apparatus can be provided with the microwave introducing device.
Inventors
- 👤 Nobumasa Suzuki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:24
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32192; H01J37/32211; H01J37/32229; Y; Y10; Y10S; Y10S422/00; Y10S422/906
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
65 words
A microwave introducing device comprising an endless circular waveguide provided with a plurality of slots, said circular waveguide being provided with a microwave introducing portion connected to a microwave power source, and said plurality of slots being spacedly formed through an inner side of said circular waveguide such that the slots are arranged at said inner side of said circular waveguide at a given interval.
Claim 2
Dependent Claim
65 words
A microwave introducing device comprising an endless circular waveguide provided with a plurality of slots, said circular waveguide being provided with a microwave introducing portion connected to a microwave power source, and said plurality of slots being spacedly formed through an inner side of said circular waveguide such that the slots are arranged at said inner side of said circular waveguide at a given interval.
Claim 3
Dependent Claim
35 words
A microwave introducing device according to claim 1, wherein the plurality of slots are spacedly arranged at an interval corresponding to a 1/4 of the guide wavelength of a microwave introduced into the circular waveguide.
Claim 4
Dependent Claim
23 words
A microwave introducing device according to claim 1, wherein the microwave introducing portion is directed toward a tangential direction of the circular waveguide.
Claim 5
Dependent Claim
29 words
A microwave introducing device according to claim 1, wherein the plurality of slots are designed such that their length is increased along the direction of a microwave to transmit.
Claim 6
Dependent Claim
58 words
A microwave introducing device according to any of claims 1 and 2, wherein the microwave introducing portion is disposed in the direction perpendicular to the circular waveguide, and the microwave introducing portion includes means capable of dividing a microwave introduced in two ways and facilitating the microwaves divided to transmit in the opposite sides in said circular waveguide.
Claim 7
Dependent Claim
53 words
A microwave introducing device according to any of claims 1 and 2 which is provided with a plurality of magnetic field generating means each being capable of generating a magnetic field in the vicinity of each pair of the adjacent slots and in parallel to an inner side face of said circular waveguide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-07-23 | 2000-01-22 | 2000-07-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-07-23 | 2004-01-22 | 2004-07-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-07-23 | 2008-01-22 | 2008-07-23 | $7700.00 | Window Closed / Lapsed |