Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
120 words
Electron emission apparatus comprising: an insulating substrate; a conductor formed as plural stripes on said substrate, said stripes being electrically interconnected at ends thereof; conductive plates on said substrate, each conductive plate occupying a region laterally spaced from one of said stripes; a layer of an electrically resistive material overlying said conductive plates and in electrical contact with said plural stripes; an electrically insulating layer on said layer of resistive material; a conductive layer on said insulating layer overlying said conductive plates, said conductive layer having a plurality of apertures formed therein and extending through said insulating layer; microtip emitters on said layer or resistive material, each emitter formed within a corresponding one of said apertures in said conductive layer.
Claim 2
Dependent Claim
120 words
Electron emission apparatus comprising: an insulating substrate; a conductor formed as plural stripes on said substrate, said stripes being electrically interconnected at ends thereof; conductive plates on said substrate, each conductive plate occupying a region laterally spaced from one of said stripes; a layer of an electrically resistive material overlying said conductive plates and in electrical contact with said plural stripes; an electrically insulating layer on said layer of resistive material; a conductive layer on said insulating layer overlying said conductive plates, said conductive layer having a plurality of apertures formed therein and extending through said insulating layer; microtip emitters on said layer or resistive material, each emitter formed within a corresponding one of said apertures in said conductive layer.
Claim 3
Dependent Claim
15 words
The electron emission apparatus in accordance with claim 1 wherein said stripes are substantially parallel.
Claim 4
Dependent Claim
25 words
The electron emission apparatus in accordance with claim 1 wherein each of said conductive plates has an equal number of said emitters formed over it.
Claim 5
Dependent Claim
21 words
The electron emission apparatus in accordance with claim 1 wherein said conductive plates are substantially equally spaced from an adjacent stripes.
Claim 6
Dependent Claim
25 words
The electron emission apparatus in accordance with claim 1 wherein each of said conductive plates has a substantially equal resistance path to an adjacent stripes.
Claim 7
Dependent Claim
23 words
The electron emission apparatus in accordance with claim 1 further including means for applying a potential between said stripes and said conductive layer.
Claim 8
Dependent Claim
24 words
The electron emission apparatus in accordance with claim 1 wherein said stripes comprise a cathode electrode and said conductive layer comprises a gate electrode.
Claim 9
Dependent Claim
23 words
The electron emission apparatus in accordance with claim 1 wherein said emitters are formed over each of said conductive plates as an array.
Claim 10
Dependent Claim
26 words
The electron emission apparatus in accordance with claim 1 wherein said apertures in said conductive layer are generally circular and said microtip emitters are generally cone-shaped.
Claim 11
Dependent Claim
17 words
The electron emission apparatus in accordance with claim 1 wherein said electrically resistive material comprises amorphous silicon.
Claim 12
Dependent Claim
15 words
The electron emission apparatus in accordance with claim 1 wherein said microtip emitters comprise molybdenum.
Claim 13
Dependent Claim
15 words
The electron emission apparatus in accordance with claim 1 wherein said conductive layer comprises niobium.
Claim 14
Dependent Claim
27 words
The electron emission apparatus in accordance with claim 1 wherein the material of said conductive plate is selected from the group comprising aluminum, chromium, molybdenum and niobium.
Claim 15
Dependent Claim
25 words
The electron emission apparatus in accordance with claim 1 wherein the material said stripes is selected from the group comprising aluminum, chromium, molybdenum and niobium.
Claim 16
Independent Claim
134 words
A method for fabricating an electron emission apparatus comprising the steps of: providing an insulating substrate; depositing a first layer of conductive material on said substrate and forming therefrom conductive stripes, conductive plates laterally spaced from said stripes, and bus regions interconnecting said stripes at the ends thereof; forming a layer of an electrically resistive material on said substrate overlying said conductive stripes and said conductive plates; forming an electrically insulating layer on said resistive layer; forming a second conductive layer on said insulating layer in regions over said conductive plates; forming apertures in said second conductive layer in said regions over said conductive plates, said apertures extending through said insulating layer; forming microtip emitters on said resistive layer, each emitter formed within a corresponding one of said apertures in said second conductive layer.
Claim 17
Independent Claim
134 words
A method for fabricating an electron emission apparatus comprising the steps of: providing an insulating substrate; depositing a first layer of conductive material on said substrate and forming therefrom conductive stripes, conductive plates laterally spaced from said stripes, and bus regions interconnecting said stripes at the ends thereof; forming a layer of an electrically resistive material on said substrate overlying said conductive stripes and said conductive plates; forming an electrically insulating layer on said resistive layer; forming a second conductive layer on said insulating layer in regions over said conductive plates; forming apertures in said second conductive layer in said regions over said conductive plates, said apertures extending through said insulating layer; forming microtip emitters on said resistive layer, each emitter formed within a corresponding one of said apertures in said second conductive layer.