Array of field emission cathodes
Abstract
Abstract Disclosed herein is an array of field emission cathodes of the type, in which each element is made up of a substrate 1 (which serves as a first electrode 1), an insulating layer 2 in which is formed a cavity 6, a cathode 9 formed in the cavity 6 and on the first electrode 1, and a second electrode 3 formed on the insulating layer 2, and the second electrode is coated with a protective metal layer having good conductivity and corrosion resistance. The record electrode (the gate electrode) protected from oxidation permits stable electron emission. Also disclosed herein is an array of field emission cathodes in which each element is made up of a first electrode 11 to apply voltage to a plurality of cathodes 9, a resistance layer 12, an insulating layer 2, and a second electrode 3 which are formed on top of the other, a cavity 6 formed in the second electrode 3 and insulating layer 2, and a cathode 9 formed in the cavity 6 and on the resistance layer 12, with the first electrode 11 having a void under the cathode 9. This structure prevents short circuits between the cathode and the gate electrode, which contributes to high yields and long life.
Inventors
- 👤 Hidetoshi Watanabe
- 👤 Toshio Ohoshi
Bibliographic Details
Claims Analysis
Total Claims: 4References Cited (Backward Citations)
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