US5536388A — Vertical electroetch tool nozzle and method

Claim 1

Independent Claim 78 words

A nozzle for use in electroetching a vertically oriented workpiece by moving the nozzle vertically with respect to the workpiece, comprising: a housing having a top, sides, bottom, and front for creating a flow of etching solution issuing from the front of the housing and impinging directly on the workpiece, the front of the housing being a cathode; and means for shaping the flow of etching solution into a moving channel to improve etch uniformity of the workpiece.

Claim 2

Dependent Claim 78 words

A nozzle for use in electroetching a vertically oriented workpiece by moving the nozzle vertically with respect to the workpiece, comprising: a housing having a top, sides, bottom, and front for creating a flow of etching solution issuing from the front of the housing and impinging directly on the workpiece, the front of the housing being a cathode; and means for shaping the flow of etching solution into a moving channel to improve etch uniformity of the workpiece.

Claim 3

Dependent Claim 27 words

The apparatus of claim 1 wherein the shaping means comprises damming means attached to the housing for providing a damming action to the flow of etching solution.

Claim 4

Dependent Claim 30 words

The apparatus of claim 2 wherein the damming means comprises a bottom dam fastened to the bottom of the housing such that the flow of etching solution is shaped vertically.

Claim 5

Dependent Claim 15 words

The apparatus of claim 3 wherein the bottom dam is a flexible, electrically non-conductive material.

Claim 6

Dependent Claim 15 words

The apparatus of claim 3 wherein the bottom dam is a rigid, electrically non-conductive material.

Claim 7

Dependent Claim 30 words

The apparatus of claim 3, wherein the damming means further comprises at least one side dam fastened to the housing such that the flow of etching solution is shaped horizontally.

Claim 8

Dependent Claim 33 words

The apparatus of claim 6 wherein the side dam is an L-shaped member with a horizontal portion contacting the top of the nozzle and a vertical portion contacting the front of the nozzle.

Claim 9

Dependent Claim 17 words

The apparatus of claim 6 wherein the side dam is attached to the side of the nozzle.

Claim 10

Dependent Claim 111 words

A nozzle for use in electroetching a vertically oriented workpiece by moving the nozzle vertically with respect to the workpiece, comprising: a housing having a top, sides bottom and front for creating a flow of etching solution issuing from the front of the housing and impinging on the workpiece; a bottom dam fastened to the bottom of the housing for vertical shaping of the flow of etching solution; and two side dams fastened to the housing for horizontal shaping of the flow of etching solution, the two side dams being spaced apart at a distance larger than the width of the workpiece plus means used to conduct current to the workpiece.

Claim 11

Dependent Claim 111 words

A nozzle for use in electroetching a vertically oriented workpiece by moving the nozzle vertically with respect to the workpiece, comprising: a housing having a top, sides bottom and front for creating a flow of etching solution issuing from the front of the housing and impinging on the workpiece; a bottom dam fastened to the bottom of the housing for vertical shaping of the flow of etching solution; and two side dams fastened to the housing for horizontal shaping of the flow of etching solution, the two side dams being spaced apart at a distance larger than the width of the workpiece plus means used to conduct current to the workpiece.

Claim 12

Dependent Claim 16 words

The apparatus of claim 1 wherein neither the nozzle nor the shaping means contact the workpiece.

Claim 13

Independent Claim 62 words

A method of electroetching a vertically oriented workpiece by moving a nozzle vertically with respect to the workpiece, the nozzle having a side proximate the workpiece being a cathode, comprising the steps of: creating a moving channel of electrolyte solution issuing from the nozzle and impinging directly against the workpiece; and damming the flow of the electrolyte solution in a vertical direction.

Claim 14

Independent Claim 62 words

A method of electroetching a vertically oriented workpiece by moving a nozzle vertically with respect to the workpiece, the nozzle having a side proximate the workpiece being a cathode, comprising the steps of: creating a moving channel of electrolyte solution issuing from the nozzle and impinging directly against the workpiece; and damming the flow of the electrolyte solution in a vertical direction.

Claim 15

Dependent Claim 20 words

The method of claim 11 further comprising the step of damming the flow of electrolyte solution in a horizontal direction.

Claim 16

Dependent Claim 16 words

The method of claim 11 wherein neither the nozzle nor the shaping means contact the workpiece.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1999-07-16	2000-01-15	2000-07-16	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2003-07-16	2004-01-15	2004-07-16	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2007-07-16	2008-01-15	2008-07-16	$7700.00	Window Closed / Lapsed

Vertical electroetch tool nozzle and method

Abstract

Inventors

Bibliographic Details

Claims Analysis

References Cited (Backward Citations)

USPTO Annuity & Maintenance Windows

Assigned Categories & Tags

Assign Category Tag