Patent US5535005A successfully refreshed from Google Patents.
US5535005A
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US
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Method and system for inspecting polished surface texture
Assignee: Texas Instruments Inc
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Filing: 1994-08-25
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Granted: 1996-07-09
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Expires: 2014-08-25
Abstract
Abstract A method for obtaining texture measurements of a highly-polished surface (110) uses a directed-energy light source (124) to perform the steps of scattering the directed-energy light from a plurality of known texture surfaces. The known texture surfaces have equivalent surface area and dimensions to those of the highly-polished surface (110). A next step is to measure (102 and 130) the scattered light from the directed-energy light source (124) to establish a threshold energy level measurement (48, 50, or 52) above which the measured scattered light varies according to differences in texture among the plurality of known texture surfaces. From variations in the measured scattered light a texture-light relationship (Equation 1) is established that expresses expected changes in measured scattered light according to changes in texture in the plurality of known texture surfaces. Scattered light from the highly-polished surface (110) is then measured. A texture measurement is then generated by applying the texture-light relationship (Equation 1) to the measured scattered light from the highly-polished surface (110).
Inventors
- 👤 Moitreyee Mukherjee-Roy
- 👤 Charles R. Pettersson
- 👤 Thomas G. Debner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 17:06
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/30; G01B11/303
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
154 words
A method for measuring the surface texture of a highly-polished surface using a directed-energy light source, comprising the steps of: scattering directed-energy Light from the directed-energy light source from a plurality of known texture surfaces, said known texture surfaces having equivalent surface area and dimensions to those of the highly-polished surface; measuring the scattered light from the directed-energy light source said measured scattered light to establish a threshold energy level measurement above which the measured scattered light varies according to differences in texture among said plurality of known texture surfaces; establishing from variations in the measured scattered light based on said threshold energy level measurement a texture-light relationship that expresses expected changes in measured scattered light according to changes in texture in said plurality of known texture surfaces; measuring scattered light from the highly-polished surface; and generating a texture measurement by applying the texture-light relationship to said measured scattered light from the highly-polished surface.
Claim 2
Independent Claim
154 words
A method for measuring the surface texture of a highly-polished surface using a directed-energy light source, comprising the steps of: scattering directed-energy Light from the directed-energy light source from a plurality of known texture surfaces, said known texture surfaces having equivalent surface area and dimensions to those of the highly-polished surface; measuring the scattered light from the directed-energy light source said measured scattered light to establish a threshold energy level measurement above which the measured scattered light varies according to differences in texture among said plurality of known texture surfaces; establishing from variations in the measured scattered light based on said threshold energy level measurement a texture-light relationship that expresses expected changes in measured scattered light according to changes in texture in said plurality of known texture surfaces; measuring scattered light from the highly-polished surface; and generating a texture measurement by applying the texture-light relationship to said measured scattered light from the highly-polished surface.
Claim 3
Dependent Claim
28 words
The method of claim 1, wherein said highly-polished surface comprises a silicon wafer and said plurality of known texture surfaces comprise a plurality of known texture silicon wafers.
Claim 4
Dependent Claim
63 words
The method of claim 1, wherein said measuring step for said plurality of known texture surfaces comprises the step of measuring the scattered light from the entire surface of each of said plurality of known texture surfaces and further wherein said measuring step for said highly-polished surface comprises the step of measuring the scattered light from the entire surface of said highly-polished surface.
Claim 5
Dependent Claim
29 words
The method of claim 1, further comprising the step of inspecting said highly-polished surface for light point defects in conjunction with measuring said surface texture of said highly-polished surface.
Claim 6
Dependent Claim
28 words
The method of claim 1, further comprising the step of inspecting said highly-polished surface for polish defects in conjunction with measuring said surface texture of said highly-polished surface.
Claim 7
Dependent Claim
24 words
The method of claim 1, wherein said measuring step for said highly-polished surface and said generating step are performed by a process control computer.
Claim 8
Dependent Claim
40 words
The method of claim 1, wherein said scattering step, said measuring step for said plurality of known texture surfaces, said establishing step, said measuring step for said highly-polished surface, and said generating step are performed by a process control computer.
Claim 9
Independent Claim
179 words
A method for forming the semiconductor wafer, comprising the steps of: polishing the semiconductor wafer surface; inspecting the surface of the semiconductor wafer by measuring the semiconductor wafer surface texture, said texture measuring step comprising the steps of: scattering a directed-energy light source from a plurality of known texture semi-conductor wafer surfaces, said known texture semi-conductor wafer surfaces having equivalent surface area and dimension to those of the highly-polished surface; measuring the scattered light from the directed-energy light source and using said measured scattered light to establish a threshold energy level measurement above which the measured scattered light varies according to differences in texture among said plurality of known texture semi-conductor wafer surfaces; establishing from variations in the measured scattered light based on said threshold energy level measurement a texture-light relationship that expresses expected changes in measured scattered light according to changes in texture in said plurality of known texture semi-conductor wafer surfaces; measuring scattered light from the highly-polished surface; and generating a texture measurement by applying the texture-light relationship to said measured scattered light from the highly-polished surface.
Claim 10
Independent Claim
179 words
A method for forming the semiconductor wafer, comprising the steps of: polishing the semiconductor wafer surface; inspecting the surface of the semiconductor wafer by measuring the semiconductor wafer surface texture, said texture measuring step comprising the steps of: scattering a directed-energy light source from a plurality of known texture semi-conductor wafer surfaces, said known texture semi-conductor wafer surfaces having equivalent surface area and dimension to those of the highly-polished surface; measuring the scattered light from the directed-energy light source and using said measured scattered light to establish a threshold energy level measurement above which the measured scattered light varies according to differences in texture among said plurality of known texture semi-conductor wafer surfaces; establishing from variations in the measured scattered light based on said threshold energy level measurement a texture-light relationship that expresses expected changes in measured scattered light according to changes in texture in said plurality of known texture semi-conductor wafer surfaces; measuring scattered light from the highly-polished surface; and generating a texture measurement by applying the texture-light relationship to said measured scattered light from the highly-polished surface.
Claim 11
Dependent Claim
66 words
The method of claim 8, wherein said measuring step for said plurality of known texture surfaces comprises the step of measuring the scattered light from the entire surface of each of said plurality of known texture semi-conductor wafer surfaces and further wherein said measuring step for said highly-polished surface comprises the step of measuring the scattered light from the entire surface of said semi-conductor wafer surface.
Claim 12
Dependent Claim
30 words
The method of claim 8, further comprising the step of inspecting said semiconductor wafer surface for light point defects in conjunction with measuring said surface texture of said highly-polished surface.
Claim 13
Dependent Claim
30 words
The method of claim 8, further comprising the step of inspecting said semiconductor wafer surface for polish defects in conjunction with measuring said surface texture of said semi-conductor wafer surface.
Claim 14
Dependent Claim
25 words
The method of claim 8, wherein said measuring step for said semiconductor wafer surface and said generating step are performed by a process control computer.
Claim 15
Dependent Claim
40 words
The method of claim 8, wherein said scattering step, said measuring step for said plurality of known texture surfaces, said establishing step, said measuring step for said highly-polished surface, and said generating step are performed by a process control computer.
Claim 16
Independent Claim
169 words
A system for obtaining texture measurements of a highly-polished surface, comprising: a plurality of known texture surfaces having equivalent surface area and dimension to those of the highly-polished surface; a directed-energy light source for scattering a known amount of light onto said plurality of known texture surfaces; light measuring circuitry for measuring the scattered light from the directed-energy light source and using measured scattered light to establish a threshold energy level measurement above which the measured scattered light varies according to differences in surface texture among said plurality of known texture surfaces; calculating circuitry for establishing from variations in the measured scattered light based on threshold energy level measurement a texture-light relationship that expresses expected changes in measured scattered light according to changes in texture in said plurality of known texture surfaces; said light measuring circuitry further for measuring scattered light from the highly-polished surface; and said calculating circuitry further for generating a texture measurement by applying said texture-light relationship to said measured scattered light from the highly-polished surface.
Claim 17
Independent Claim
169 words
A system for obtaining texture measurements of a highly-polished surface, comprising: a plurality of known texture surfaces having equivalent surface area and dimension to those of the highly-polished surface; a directed-energy light source for scattering a known amount of light onto said plurality of known texture surfaces; light measuring circuitry for measuring the scattered light from the directed-energy light source and using measured scattered light to establish a threshold energy level measurement above which the measured scattered light varies according to differences in surface texture among said plurality of known texture surfaces; calculating circuitry for establishing from variations in the measured scattered light based on threshold energy level measurement a texture-light relationship that expresses expected changes in measured scattered light according to changes in texture in said plurality of known texture surfaces; said light measuring circuitry further for measuring scattered light from the highly-polished surface; and said calculating circuitry further for generating a texture measurement by applying said texture-light relationship to said measured scattered light from the highly-polished surface.
Claim 18
Dependent Claim
28 words
The system of claim 14, wherein said highly-polished surface comprises a silicon wafer and said plurality of known texture surfaces comprise a plurality of known texture silicon wafers.
Claim 19
Dependent Claim
50 words
The system of claim 14, wherein said measuring circuitry comprises circuitry measuring the scattered light from the entire surface of each of said plurality of known texture surfaces and further wherein said measuring circuitry comprises the step of measuring the scattered light from the entire surface of said highly-polished surface.
Claim 20
Dependent Claim
33 words
The system of claim 14, further comprising light point defect inspection circuitry inspection circuitry inspecting said highly-polished surface for light point defects in conjunction with measuring said surface texture of said highly-polished surface.
Claim 21
Dependent Claim
28 words
The system of claim 14, further comprising inspecting circuitry for inspecting said highly-polished surface for polish defects in conjunction with measuring said surface texture of said highly-polished surface.
Claim 22
Dependent Claim
29 words
The system of claim 14, further comprising a process control computer for controlling said scattering circuitry, said measuring circuitry and said calculating circuitry for automatically generating said texture measurement.
Claim 23
Dependent Claim
36 words
The system of claim 14, wherein said threshold energy level measurement includes energy levels attributable from electric noise, ambient light, and mechanical vibrations so that the measure scattered light varied sue to variation in surface texture.
References Cited (Backward Citations)
US4376583A
Cited
US5293216A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-07-09 | 2000-01-08 | 2000-07-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-07-09 | 2004-01-08 | 2004-07-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-07-09 | 2008-01-08 | 2008-07-09 | $7700.00 | Window Closed / Lapsed |