Patent US5534451A successfully refreshed from Google Patents.
US5534451A
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Method for fabricating a reduced area metal contact to a thin polysilicon layer contact structure having low ohmic resistance
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1995-04-27
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Granted: 1996-07-09
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Expires: 2015-04-27
Abstract
Abstract A method for fabricating reduced area metal contacts to a thin polysilicon layer contact structure having low ohmic resistance was achieved. The method involves forming contact openings in an insulating layer over a buffer layer composed of a thick polysilicon layer. A portion of the sidewall in the opening includes a patterned thin polysilicon layer that forms part of a semiconductor device and also forms the electrical connection to the metal contact. The method provides metal contacts having very low resistance and reduced area for increased device packing densities. The metal contact structure also eliminates the problem of forming P + /N + non-ohmic junctions usually associated with making P + /N + stacked contact. The method further allows large latitude in etching the contact opening and thereby provides a very manufacturable process.
Inventors
- 👤 Shou-Gwo Wuu
- 👤 Mong-Song Liang
- 👤 Chung-Hui Su
- 👤 Chen-Jong Wang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 15:00
CPC Classifications
H; H10; H10B; H10B10/00; H10B10/12; H10B10/125; H10D; H10D30/00; H10D30/60; H10D30/67; H10D30/6729; H10D30/6737; H10D30/674; H10D30/6741; H10D30/6743; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10W; H10W20/00; H10W20/40; Y; Y10; Y10S; Y10S257/00; Y10S257/903
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
371 words
A method for fabricating reduced area metal contacts to a thin polysilicon layer that forms portions of thin film transistors on a semiconductor substrate, comprising the steps of: providing said semiconductor substrate having semi-conductor devices formed from a patterned first and second polysilicon layer and having a first insulating layer there between, and portions of said second polysilicon layer forming also patterned buffer layers for making metal contacts thereon; depositing a second insulating layer on said patterned second polysilicon layer; depositing and patterning by masking and plasma etching a third polysilicon layer, and thereby forming gate electrodes for said thin film transistors; depositing a third insulating layer on said patterned third polysilicon layer and thereby forming a gate oxide on said gate electrodes and said gate oxide extending over said patterned buffer layer areas; forming first contact openings by masking and anisotropic plasma etching in said third and second insulating layer to the surface of said buffer layer formed from said patterned second polysilicon layer; depositing a thin fourth polysilicon layer over said third insulating layer and over and in said first contact openings, and thereby contacting said patterned buffer layer; doping selectively said thin fourth polysilicon layer by masking and ion implantation, and thereby forming source/ drain areas for said thin film transistors and by the same said ion implantation, doping said thin fourth polysilicon layer over said first contact openings and contiguous with said source/drain doping; patterning said thin fourth polysilicon layer by masking and plasma etching, and thereby forming electrically conducting stripes contiguous with said source / drain areas and extending over said first contact openings; depositing a fourth insulating layer over said patterned thin fourth polysilicon layer; forming second contact openings by masking and anisotropically etching, said second contact openings aligned over and smaller in width than said first contact openings and extending down to said thin fourth polysilicon layer; depositing a first metal layer over said third insulating layer and in said second contact opening, and making electrical contact to said thin fourth polysilicon layer; patterning said first metal layer, and thereby completing said reduced area metal contacts to said thin fourth polysilicon layer contiguous with said source / drain areas of said thin film transistors.
Claim 2
Independent Claim
371 words
A method for fabricating reduced area metal contacts to a thin polysilicon layer that forms portions of thin film transistors on a semiconductor substrate, comprising the steps of: providing said semiconductor substrate having semi-conductor devices formed from a patterned first and second polysilicon layer and having a first insulating layer there between, and portions of said second polysilicon layer forming also patterned buffer layers for making metal contacts thereon; depositing a second insulating layer on said patterned second polysilicon layer; depositing and patterning by masking and plasma etching a third polysilicon layer, and thereby forming gate electrodes for said thin film transistors; depositing a third insulating layer on said patterned third polysilicon layer and thereby forming a gate oxide on said gate electrodes and said gate oxide extending over said patterned buffer layer areas; forming first contact openings by masking and anisotropic plasma etching in said third and second insulating layer to the surface of said buffer layer formed from said patterned second polysilicon layer; depositing a thin fourth polysilicon layer over said third insulating layer and over and in said first contact openings, and thereby contacting said patterned buffer layer; doping selectively said thin fourth polysilicon layer by masking and ion implantation, and thereby forming source/ drain areas for said thin film transistors and by the same said ion implantation, doping said thin fourth polysilicon layer over said first contact openings and contiguous with said source/drain doping; patterning said thin fourth polysilicon layer by masking and plasma etching, and thereby forming electrically conducting stripes contiguous with said source / drain areas and extending over said first contact openings; depositing a fourth insulating layer over said patterned thin fourth polysilicon layer; forming second contact openings by masking and anisotropically etching, said second contact openings aligned over and smaller in width than said first contact openings and extending down to said thin fourth polysilicon layer; depositing a first metal layer over said third insulating layer and in said second contact opening, and making electrical contact to said thin fourth polysilicon layer; patterning said first metal layer, and thereby completing said reduced area metal contacts to said thin fourth polysilicon layer contiguous with said source / drain areas of said thin film transistors.
Claim 3
Dependent Claim
39 words
The method of claim 1, wherein said second polysilicon layer is N + doped having a concentration between about 0×10 18 to 0×10 20 10 20 atoms/cm 3 and having a thickness of between about 1500 to 3000 Angstroms.
Claim 4
Dependent Claim
25 words
The method of claim 1, wherein said second insulating layer is composed of silicon oxide having a thickness of between about 700 to 3000 Angstroms.
Claim 5
Dependent Claim
31 words
The method of claim 1, wherein said gate oxide layer formed from said third insulating layer is composed of silicon oxide having a thickness of between about 50 to 500 Angstroms.
Claim 6
Dependent Claim
42 words
The method of claim 1, wherein said patterned thin fourth polysilicon layer forms channel layers for said thin film transistors (TFT) and said ion implanted areas form source / drain areas and also provide an electrical conducting stripe to said metal contact.
Claim 7
Dependent Claim
40 words
The method of claim 5, wherein said patterned thin fourth polysilicon layer is doped P + by phosphorus (p 31 ) ion implantation having a concentration between about 1.0×10 18 to 1.0×10 20 to 1.0 10 20 atoms/cm 3 .
Claim 8
Dependent Claim
21 words
The method of claim 5, wherein the thickness of said thin fourth polysilicon layer is between about 50 to 700 Angstroms.
Claim 9
Dependent Claim
37 words
The method of claim 1, wherein said first metal layer is composed of a multi-layer of titanium titanium nitride, aluminium silicon copper alloy and titanium nitride (Ti/TiN-Al/Si/Cu-TiN) having a thickness of between about 4000 to 6000 Angstroms.
Claim 10
Dependent Claim
38 words
The method of claim 1, wherein said first metal in said contact openings contacts said thin fourth polysilicon layer, and thereby forming a low resistance ohmic contact to said source / drain areas of said thin film transistors.
Claim 11
Dependent Claim
25 words
The method of claim 1, wherein said etching of said second contact opening over said first contact opening forms a contact opening with reduced area.
Claim 12
Independent Claim
321 words
A method for fabricating a reduced area self-aligned metal contact to a thin polysilicon layer contiguous with and forming portions of thin film transistors on a semiconductor substrate, comprising the steps of: providing said semiconductor substrate having semiconductor devices formed from a patterned first and second polysilicon layer and having a first insulating layer there between, and portions of said second polysilicon layer forming also patterned buffer layers for making metal contacts thereon; depositing a second insulating layer on said patterned second polysilicon layer; depositing and patterning by masking and plasma etching a third polysilicon layer, and thereby forming gate electrodes for said thin film transistors; depositing a third insulating layer on said patterned third polysilicon layer and thereby forming a gate oxide on said gate electrodes and said gate oxide extending over said patterned buffer layer areas; depositing a thin fourth polysilicon layer over said third insulating layer: doping selectively said thin fourth polysilicon layer by masking and ion implantation, and thereby forming source / drains areas for said thin film transistors and by the same said ion implantation, doping said thin fourth polysilicon layer over said patterned buffer layer; patterning said thin fourth polysilicon layer by masking and plasma etching, and thereby forming electrically conducting stripes contiguous with said source / drain areas and extending over said patterned buffer layer; depositing a fourth insulating layer over said patterned thin fourth polysilicon layer; forming contact openings by masking and anisotropically etching, to said patterned buffer layer formed from said second polysilicon layer, said contact openings forming sidewalls in said thin fourth polysilicon layer; depositing a first metal layer over said fourth insulating layer and in said contact openings, and making low resistance ohmic contact to said thin fourth polysilicon layer; patterning said first metal layer, and thereby completing said reduced area self-aligned metal contacts to said thin fourth polysilicon layer contiguous with said source/drain areas of said thin film transistors.
Claim 13
Independent Claim
321 words
A method for fabricating a reduced area self-aligned metal contact to a thin polysilicon layer contiguous with and forming portions of thin film transistors on a semiconductor substrate, comprising the steps of: providing said semiconductor substrate having semiconductor devices formed from a patterned first and second polysilicon layer and having a first insulating layer there between, and portions of said second polysilicon layer forming also patterned buffer layers for making metal contacts thereon; depositing a second insulating layer on said patterned second polysilicon layer; depositing and patterning by masking and plasma etching a third polysilicon layer, and thereby forming gate electrodes for said thin film transistors; depositing a third insulating layer on said patterned third polysilicon layer and thereby forming a gate oxide on said gate electrodes and said gate oxide extending over said patterned buffer layer areas; depositing a thin fourth polysilicon layer over said third insulating layer: doping selectively said thin fourth polysilicon layer by masking and ion implantation, and thereby forming source / drains areas for said thin film transistors and by the same said ion implantation, doping said thin fourth polysilicon layer over said patterned buffer layer; patterning said thin fourth polysilicon layer by masking and plasma etching, and thereby forming electrically conducting stripes contiguous with said source / drain areas and extending over said patterned buffer layer; depositing a fourth insulating layer over said patterned thin fourth polysilicon layer; forming contact openings by masking and anisotropically etching, to said patterned buffer layer formed from said second polysilicon layer, said contact openings forming sidewalls in said thin fourth polysilicon layer; depositing a first metal layer over said fourth insulating layer and in said contact openings, and making low resistance ohmic contact to said thin fourth polysilicon layer; patterning said first metal layer, and thereby completing said reduced area self-aligned metal contacts to said thin fourth polysilicon layer contiguous with said source/drain areas of said thin film transistors.
Claim 14
Dependent Claim
37 words
The method of claim 11, wherein said second polysilicon layer is N + doped having a concentration between about 1.0×10 18 to 1.0×10 20 atoms/cm 3 and having a thickness of between about 1500 to 3000 Angstroms.
Claim 15
Dependent Claim
25 words
The method of claim 11, wherein said second insulating layer is composed of silicon oxide having a thickness of between about 700 to 3000 Angstroms.
Claim 16
Dependent Claim
31 words
The method of claim 11, wherein said gate oxide layer formed from said third insulating layer is composed of silicon oxide having a thickness of between about 50 to 500 Angstroms.
Claim 17
Dependent Claim
47 words
The method of claim 11, wherein said patterned thin fourth polysilicon layer forms the channel layer for P-channel thin film transistors (TFT) and the selectively P + ion implanted areas form source / drain areas and also provide a doped electrical conducting stripe to said metal contact.
Claim 18
Dependent Claim
36 words
The method of claim 15, wherein said patterned thin fourth polysilicon layer is doped P + by phosphorus (p 31 ) ion implantation having a concentration between about 1.0×10 18 to 1.0×10 20 atoms/cm 3 .
Claim 19
Dependent Claim
22 words
The method of claim 15, wherein the thickness of said thin patterned fourth polysilicon layer is between about 50 to 700 Angstroms.
Claim 20
Dependent Claim
28 words
The method of claim 11, wherein said first metal layer is composed of Ti/TiN, Al/Si/Cu alloy, and TiN having a thickness of between about 4000 to 6000 Angstroms.
Claim 21
Dependent Claim
38 words
The method of claim 11, wherein said first metal in said contact openings contacts said thin fourth polysilicon layer, and thereby forms a low resistance ohmic contact to said source / drain areas of said thin film transistors.
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| 3.5 Years (Year 4) | 1999-07-09 | 2000-01-08 | 2000-07-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-07-09 | 2004-01-08 | 2004-07-09 | $3760.00 | Window Closed / Lapsed |
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