US5532089A
Expired / Lapsed
US
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Simplified fabrication methods for rim phase-shift masks
Assignee: GlobalFoundries Inc
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Filing: 1993-12-23
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Granted: 1996-07-02
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Expires: 2013-12-23
Abstract
Abstract A simplified method of forming a phase shift structure for a lithographic mask includes the conformal deposition of a phase shift material, preferably having an index of refraction similar to that of the mask substrate, over a patterned layer of opaque material and exposed areas of the mask substrate corresponding to the pattern. The thickness of the opaque patterned layer, in combination with the conformal deposition preferably establishes a differentially altered optical path length to produce a phase shift which enhances contrast and increases illumination and resolution in fine patterns. In variant forms of the invention, the conformal deposition of either phase shift material or a sidewall spacer material is followed by an anisotropic removal of material to form the phase shift structure. The application of phase shift material over the mask surface increases durability of the mask and also enhances contrast of images produced with other phase-shift mask feature structures, such as Levenson-type shifters.
Inventors
- 👤 William J. Adair
- 👤 Timothy A. Brunner
- 👤 Derek B. Dove
- 👤 Louis L. Hsu
- 👤 Chi-Min Yuan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 07:28
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/26; G03F1/29; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24273; Y10T428/24322
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
132 words
A method of fabricating a lithography exposure mask for exposing at least one area and including at least one feature including at least one phase shift region adjacent an opaque region of the mask, said method including the step of patterning a layer of opaque material deposited on a substrate in accordance with said at least one feature wherein said feature corresponds in size to said area and said phase shift region, conformally depositing at least one of a phase shift material and a sidewall spacer material over said opaque material and said substrate, and anisotropically removing a portion of said at least one of a phase shift material and a sidewall spacer material deposited during said conformally depositing step, said portion being limited by an edge of said phase shift region.
Claim 2
Independent Claim
132 words
A method of fabricating a lithography exposure mask for exposing at least one area and including at least one feature including at least one phase shift region adjacent an opaque region of the mask, said method including the step of patterning a layer of opaque material deposited on a substrate in accordance with said at least one feature wherein said feature corresponds in size to said area and said phase shift region, conformally depositing at least one of a phase shift material and a sidewall spacer material over said opaque material and said substrate, and anisotropically removing a portion of said at least one of a phase shift material and a sidewall spacer material deposited during said conformally depositing step, said portion being limited by an edge of said phase shift region.
Claim 3
Dependent Claim
18 words
A method as recited in claim 1, wherein said patterning step is performed by anisotropic reactive ion etching.
Claim 4
Dependent Claim
17 words
A method as recited in claim 1, wherein said at least one feature is a closed shape.
Claim 5
Dependent Claim
43 words
A method as recited in claim 1, wherein said layer of opaque material is deposited on said substrate to a thickness which is approximately equal to a thickness of said phase shift material which will produce a 180° phase shift of exposure radiation.
Claim 6
Dependent Claim
47 words
A method as recited in claim 1, wherein said material deposited during said step of conformally depositing material is sidewall spacer material, said method including the further steps of removing material from said substrate in accordance with said sidewall spacer material and removing said sidewall spacer material.
Claim 7
Dependent Claim
30 words
A method as recited in claim 1, including the further steps of applying a resist over said material deposited during said step of conformally depositing material, and patterning said resist.
Claim 8
Dependent Claim
24 words
A method as recited in claim 6, wherein said step on patterning said resist includes the step of planarizing a surface of said mask.
Claim 9
Independent Claim
73 words
A method of increasing contrast of a lithography exposure mask having at least one optical feature thereon, said optical feature being at least one of an aperture and a phase shift structure, said method including the steps of depositing a layer of phase-shift material over said at least one optical feature, and establishing a rounding factor of said layer of phase shift material adjacent an edge of at least one said optical feature.
Claim 10
Independent Claim
73 words
A method of increasing contrast of a lithography exposure mask having at least one optical feature thereon, said optical feature being at least one of an aperture and a phase shift structure, said method including the steps of depositing a layer of phase-shift material over said at least one optical feature, and establishing a rounding factor of said layer of phase shift material adjacent an edge of at least one said optical feature.
Claim 11
Dependent Claim
119 words
A phase-shift lithography mask for projecting at least one image area onto a resist material including a substrate which is substantially transparent to electromagnetic radiation having a desired wavelength and which has a first refractive index, a pattern of opaque material deposited on said substrate and having openings therein exposing said substrate and a feature corresponding in size to said at least one image area formed in at least one of said substrate and a layer of phase shift material which is substantially transparent to electromagnetic radiation having said desired wavelength and which has a second refractive index substantially equal to said first refractive index, said layer of phase shift material being deposited on said substrate, within said openings.
Claim 12
Dependent Claim
119 words
A phase-shift lithography mask for projecting at least one image area onto a resist material including a substrate which is substantially transparent to electromagnetic radiation having a desired wavelength and which has a first refractive index, a pattern of opaque material deposited on said substrate and having openings therein exposing said substrate and a feature corresponding in size to said at least one image area formed in at least one of said substrate and a layer of phase shift material which is substantially transparent to electromagnetic radiation having said desired wavelength and which has a second refractive index substantially equal to said first refractive index, said layer of phase shift material being deposited on said substrate, within said openings.
Claim 13
Dependent Claim
66 words
A phase-shift lithography mask as recited in claim 9 wherein a thickness of said pattern of opaque material is approximately equal to one-half of a wavelength of said electromagnetic radiation in said layer of phase shift material and wherein said layer of phase shift material is a conformal layer extending over said openings in said opaque material and at least a portion of said opaque material.
Claim 14
Dependent Claim
21 words
A phase-shift lithography mask as recited in claim 10 wherein said patterned layer of opaque material defines a Levenson-type phase shifter.
Claim 15
Dependent Claim
26 words
A phase-shift lithography mask as recited in claim 10 wherein at least one of said openings in said layer of opaque material is a closed shape.
Claim 16
Dependent Claim
45 words
A phase-shift lithography mask as recited in claim 9 wherein said feature corresponding in size to said at least one image shape is a portion of said substrate which is patterned to have a reduced thickness over a central region of one of said openings.
Claim 17
Dependent Claim
40 words
A phase shift lithography mask as recited in claim 9 wherein said substrate includes an etch stop layer at a surface thereof and said feature comprises a layer of said phase shift material deposited directly on said etch stop layer.
Claim 18
Independent Claim
102 words
A method of fabricating a lithography exposure mask for exposing at least one area and including at least one feature including at least one phase shift region adjacent an opaque region of the mask, said method including the step of patterning a layer of opaque material deposited on a substrate in accordance with said at least one feature wherein said feature corresponds in size to said area and said phase shift region, conformally depositing a phase shift material over said opaque material and said substrate, and establishing a rounding factor of said phase shift material adjacent an edge of said opaque region.
Claim 19
Independent Claim
102 words
A method of fabricating a lithography exposure mask for exposing at least one area and including at least one feature including at least one phase shift region adjacent an opaque region of the mask, said method including the step of patterning a layer of opaque material deposited on a substrate in accordance with said at least one feature wherein said feature corresponds in size to said area and said phase shift region, conformally depositing a phase shift material over said opaque material and said substrate, and establishing a rounding factor of said phase shift material adjacent an edge of said opaque region.
Claim 20
Dependent Claim
43 words
A method as recited in claim 15, wherein said layer of opaque material is deposited on said substrate to a thickness which is approximately equal to a thickness of said phase shift material which will produce a 180° phase shift of exposure radiation.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-07-02 | 2000-01-01 | 2000-07-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-07-02 | 2004-01-01 | 2004-07-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-07-02 | 2008-01-01 | 2008-07-02 | $7700.00 | Window Closed / Lapsed |