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US5530267A
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Article comprising heteroepitaxial III-V nitride semiconductor material on a substrate
Assignee: Avago Technologies International Sales Pte Ltd
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Filing: 1995-03-14
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Granted: 1996-06-25
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Expires: 2015-03-14
Abstract
Abstract We have discovered advantageous substrates for III-V nitride semiconductors such as GaN. The substrate material is of the YbFe 2 O 4 or InFeO 3 (ZnO) n structure type and has general composition RAO 3 (MO) n , where R is one or more of Sc, In, Y and the lanthanides (atomic number 67-71); A is one or more of Fe(III), Ga, and Al; M is one or more of Mg, Mn, Fe(II), Co, Cu, Zn and Cd; and n is an integer≧1, typically<9. Furthermore, the substrate material is selected to have a lattice constant that provides less than ±5% lattice mismatch with the III-V nitride semiconductor material that is to be deposited thereon. At least some of the substrate materials (e.g., ScMgAlO 4 ) typically can be readily and relatively cheaply produced in single crystal form, are readily clearable on the basal plane, and do essentially not interact chemically with the III-V nitride under typical deposition conditions. Use of the novel substrate materials for opto-electronic device manufacture is contemplated.
Inventors
- 👤 Charles D. Brandle, Jr.
- 👤 Denis N. Buchanan
- 👤 Elliot H. Hartford, Jr.
- 👤 Eric S. Hellman
- 👤 Lynn F. Schneemeyer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 11:19
CPC Classifications
H; H10; H10F; H10F71/00; H10F71/127; H10F71/1276; H10H; H10H20/00; H10H20/01; H10H20/011; H10H20/013; H10H20/0133; H10H20/01335; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/544
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
146 words
An article comprising a quantity of III-V nitride semiconductor material disposed on a substrate and substantially epitaxial therewith, CHARACTERIZED IN THAT a) said substrate is an essentially single crystal material of general composition RAO 3 (MO) n , where R is one or more of Sc, In, Y and the lanthanides of atomic number 67-71; A is one or more of Fe (III), Ga and Al; M is one or more of Mg, Mn, Fe (II), Co, Cu, Zn and Cd; and n is an integer≧1; b) said essentially single crystal substrate material has a crystal structure of the YbFe 2 O 4 structure type or of the InFeO 3 (ZnO) n structure type; and c) said essentially single crystal substrate material has a lattice constant that provides less than ±5% lattice mismatch with a lattice constant a of said quantity of III-V nitride semiconductor material.
Claim 2
Dependent Claim
146 words
An article comprising a quantity of III-V nitride semiconductor material disposed on a substrate and substantially epitaxial therewith, CHARACTERIZED IN THAT a) said substrate is an essentially single crystal material of general composition RAO 3 (MO) n , where R is one or more of Sc, In, Y and the lanthanides of atomic number 67-71; A is one or more of Fe (III), Ga and Al; M is one or more of Mg, Mn, Fe (II), Co, Cu, Zn and Cd; and n is an integer≧1; b) said essentially single crystal substrate material has a crystal structure of the YbFe 2 O 4 structure type or of the InFeO 3 (ZnO) n structure type; and c) said essentially single crystal substrate material has a lattice constant that provides less than ±5% lattice mismatch with a lattice constant a of said quantity of III-V nitride semiconductor material.
Claim 3
Dependent Claim
40 words
An article according to claim 1, wherein said quantity of III-V nitride semiconductor material comprises material selected from GaN, AlN, InN, GaAlN, GaInN, AlInN, GaAlInN, and of said nitrides with As or P substituted for a portion of the nitrogen.
Claim 4
Dependent Claim
8 words
An article according to claim 1, wherein n<9.
Claim 5
Dependent Claim
8 words
An article according to claim 3, where n≦3.
Claim 6
Dependent Claim
8 words
An article according to claim 4, wherein n=1.
Claim 7
Dependent Claim
34 words
An article according to claim 5, wherein said essentially single crystal substrate material is selected from ScGaMgO 4 , InGaMgO 4 , ScAlMnO 4 , ScAlCoO 4 , ScAlMgO 4 and InAlMgO 4 .
Claim 8
Dependent Claim
55 words
An article according to claim 1, wherein said quantity of III-V nitride semiconductor material is a layer structure comprising at least a first and a second layer of III-V nitride semiconductor material, with the first layer differing in composition from the second layer, and with at least one of said layers comprising doped semiconductor material.
Claim 9
Dependent Claim
19 words
An article according to claim 7, further comprising contacts adapted for flowing an electric current through said layer structure.
Claim 10
Dependent Claim
18 words
An article according to claim 8, wherein said article is a semiconductor laser or a light emitting diode.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-06-25 | 1999-12-25 | 2000-06-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-06-25 | 2003-12-25 | 2004-06-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-06-25 | 2007-12-25 | 2008-06-25 | $7700.00 | Window Closed / Lapsed |