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US5530247A
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US
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Millimeter wave imager device using pyroelectric effect
Assignee: Northrop Grumman Systems Corp
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Filing: 1994-08-05
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Granted: 1996-06-25
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Expires: 2014-08-05
Abstract
Abstract A passive millimeter-wave imaging system configured as an integrated circuit. The imaging system incorporates a lens which focuses radiation from a scene onto a detector in the focal plane of the lens. The detector includes an outer array of ferroelectric elements in which each element includes a top metal film and a ferroelectric layer. Millimeter-wave radiation from the beam causes charge build-up in the ferroelectric layers. The charge build-up is sensed by appropriate amplification and signal processing circuitry associated with the read-out electronics so as to provide a signal indicative of obstacles in the scene to a video system. The ferroelectric layer can also be used as an antenna for each pixel element.
Inventors
- 👤 George W. McIver
- 👤 Samatkumar R. Sashital
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:14
CPC Classifications
H; H10; H10N; H10N19/00
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
97 words
A passive millimeter-wave imaging system for imaging a scene, said system comprising: a substrate; a semiconductor device layer positioned on said substrate; and an array of thin film ferroelectric elements integrated on the semiconductor device layer, each of the ferroelectric elements of the array representing a pixel of the imaging system, said ferroelectric elements being responsive to millimeter-wave radiation from the scene and generating an electrostatic charge indicative of millimeter-wave energy in the radiation, wherein the semiconductor device layer includes readout electronics which sense the charge and provide a signal indicative of an image of the scene.
Claim 2
Dependent Claim
97 words
A passive millimeter-wave imaging system for imaging a scene, said system comprising: a substrate; a semiconductor device layer positioned on said substrate; and an array of thin film ferroelectric elements integrated on the semiconductor device layer, each of the ferroelectric elements of the array representing a pixel of the imaging system, said ferroelectric elements being responsive to millimeter-wave radiation from the scene and generating an electrostatic charge indicative of millimeter-wave energy in the radiation, wherein the semiconductor device layer includes readout electronics which sense the charge and provide a signal indicative of an image of the scene.
Claim 3
Dependent Claim
26 words
The imaging system according to claim 1 wherein each ferroelectric element includes a ferroelectric layer and a top metal layer in contact with the ferroelectric layer.
Claim 4
Dependent Claim
35 words
The imaging system according to claim 1 further comprising a lens, said lens focusing the radiation on the ferroelectric element array, said array of ferroelectric elements being substantially in the focal plane of the lens.
Claim 5
Dependent Claim
13 words
The imaging system according to claim 1 wherein the substrate is gallium arsenide.
Claim 6
Dependent Claim
12 words
The imaging system according to claim 1 wherein the substrate is silicon.
Claim 7
Dependent Claim
26 words
The imaging system according to claim 2 wherein each ferroelectric layer is approximately 2 microns thick and each top metal layer is approximately 100-300 Å thick.
Claim 8
Dependent Claim
18 words
The imaging system according to claim 2 wherein the top metal layer is a broadband absorbing, semitransparent film.
Claim 9
Dependent Claim
15 words
The imaging system according to claim 2 wherein the top metal layer is oxidized chromium.
Claim 10
Dependent Claim
99 words
A passive millimeter-wave imaging system comprising a semiconductor substrate, a semiconductor device layer and an array of thin film ferroelectric elements, said semiconductor device layer being supported on the substrate and said array of ferroelectric elements being integrated on the semiconductor device layer, said ferroelectric elements receiving radiation from a scene and generating an electrostatic charge indicative of temperature increases in the ferroelectric elements as a result of millimeter-wave energy in the radiation, said semiconductor device layer being responsive to the electrostatic charge generated in the ferroelectric elements so as to provide an electrical signal indicative of the charge.
Claim 11
Dependent Claim
99 words
A passive millimeter-wave imaging system comprising a semiconductor substrate, a semiconductor device layer and an array of thin film ferroelectric elements, said semiconductor device layer being supported on the substrate and said array of ferroelectric elements being integrated on the semiconductor device layer, said ferroelectric elements receiving radiation from a scene and generating an electrostatic charge indicative of temperature increases in the ferroelectric elements as a result of millimeter-wave energy in the radiation, said semiconductor device layer being responsive to the electrostatic charge generated in the ferroelectric elements so as to provide an electrical signal indicative of the charge.
Claim 12
Dependent Claim
39 words
The imaging system according to claim 9 wherein the semiconductor device layer includes read-out electronics, said read-out electronics sensing the charge and providing a signal indicative of an image of a scene from which the millimeter-wave energy is generated.
Claim 13
Dependent Claim
18 words
The imaging system according to claim 9 wherein the thin film ferroelectric elements are approximately two microns thick.
Claim 14
Dependent Claim
20 words
The imaging system according to claim 9 wherein each ferroelectric element includes a ferroelectric layer and a top metal layer.
Claim 15
Dependent Claim
18 words
The imaging system according to claim 12 wherein the top metal layer is a broadband absorbing, semitransparent film.
Claim 16
Dependent Claim
15 words
The imaging system according to claim 12 wherein the top metal layer is oxidized chromium.
Claim 17
Dependent Claim
22 words
The imaging system according to claim 9 further comprising a lens, said lens focusing the radiation onto the array of ferroelectric elements.
Claim 18
Dependent Claim
17 words
The imaging system according to claim 9 wherein the imaging system is part of an integrated circuit.
Claim 19
Independent Claim
92 words
A method of imaging a scene, said method comprising the steps: providing a semiconductor substrate; providing a semiconductor device layer on said substrate; providing an array of thin film ferroelectric elements integrated on the semiconductor device layer; focusing radiation from the scene onto the ferroelectric elements such that millimeter-wave energy in the radiation heats the ferroelectric elements and causes an electrostatic charge build-up which is measured, wherein the step of providing a semiconductor device layer includes sensing the electrostatic charge build-up and providing a signal indicative of an image of the scene.
Claim 20
Independent Claim
92 words
A method of imaging a scene, said method comprising the steps: providing a semiconductor substrate; providing a semiconductor device layer on said substrate; providing an array of thin film ferroelectric elements integrated on the semiconductor device layer; focusing radiation from the scene onto the ferroelectric elements such that millimeter-wave energy in the radiation heats the ferroelectric elements and causes an electrostatic charge build-up which is measured, wherein the step of providing a semiconductor device layer includes sensing the electrostatic charge build-up and providing a signal indicative of an image of the scene.
Claim 21
Dependent Claim
47 words
The method according to claim 17 wherein the step of providing a semiconductor substrate includes providing a gallium arsenide substrate, and the step of providing an array of ferroelectric elements includes providing an array of ferroelectric elements in which each ferroelectric element is approximately two microns thick.
Claim 22
Dependent Claim
25 words
The method according to claim 17 wherein the step of focusing the radiation includes providing a lens which focuses the radiation onto the ferroelectric elements.
Claim 23
Dependent Claim
45 words
The method according to claim 17 wherein the step of providing an array of ferroelectric elements includes providing an array of ferroelectric elements in which each ferroelectric element includes a ferroelectric layer and a top metal layer, said top metal layer being a broad-band absorber.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-06-25 | 1999-12-25 | 2000-06-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-06-25 | 2003-12-25 | 2004-06-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-06-25 | 2007-12-25 | 2008-06-25 | $7700.00 | Window Closed / Lapsed |