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US5527732A
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Method for fabricating semiconductor laser and photo detecting arrays for wavelength division multiplexing optical interconnections
Assignee: NEC Corp
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Filing: 1994-07-14
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Granted: 1996-06-18
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Expires: 2014-07-14
Abstract
Abstract The invention provides a method of fabricating two dimensional semiconductor surface emitting laser and photo detector arrays for wavelength division multiplexing optical interconnections. A first stacked multiple layer structure on a first semiconductor substrate. An intermediate layer is grown on the first stacked multiple layer structure. A second stacked multiple layer structure is grown on the intermediate layer. A second semiconductor substrate is adhered on a top of the second stacked multiple layer structure by a heat treatment thereby a wafer is grown in successive growth processes to receive a selective wet etching so that the intermediate layer only is selectively etched to separate the first and second stacked multiple layer structures from one another, followed by forming surface emitting laser arrays and photo detector arrays on the first and second semiconductor substrates respectively.
Inventors
- 👤 Kenichi Kasahara
- 👤 Shigeo Sugou
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 06:25
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/40; H01S5/42; H01S5/423; H01S5/02; H01S5/026; H01S5/0262; H01S5/06; H01S5/068; H01S5/0683; H01S5/10; H01S5/18; H01S5/183; H01S5/18358; H01S5/4025; H01S5/4087
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
191 words
A method of fabricating two dimensional semiconductor surface emitting laser and photo detector arrays comprising the steps of: growing a first stacked multiple layer structure for two dimensional surface emitting laser arrays on a first semiconductor substrate, said first stacked multiple layer structure having at least a predetermined thickness gradient; growing an intermediate layer on said first stacked multiple layer structure, said intermediate layer being made of a semiconductor whose etching rate is much higher than an etching rate of the first stacked multiple layers; growing a second stacked multiple layer structure for two dimensional photo detector arrays on said intermediate layer, said second stacked multiple layer structure having at least a predetermined thickness gradient; adhering a second semiconductor substrate on a top of the second stacked multiple layer structure by a heat treatment thereby a wafer is grown in successive growth processes; subjecting said wafer to a selective wet etching so that said intermediate layer only is selectively etched to separate said first and second stacked multiple layer structures from one another; and forming surface emitting laser arrays and photo detector arrays on said first and second semiconductor substrates respectively.
Claim 2
Independent Claim
191 words
A method of fabricating two dimensional semiconductor surface emitting laser and photo detector arrays comprising the steps of: growing a first stacked multiple layer structure for two dimensional surface emitting laser arrays on a first semiconductor substrate, said first stacked multiple layer structure having at least a predetermined thickness gradient; growing an intermediate layer on said first stacked multiple layer structure, said intermediate layer being made of a semiconductor whose etching rate is much higher than an etching rate of the first stacked multiple layers; growing a second stacked multiple layer structure for two dimensional photo detector arrays on said intermediate layer, said second stacked multiple layer structure having at least a predetermined thickness gradient; adhering a second semiconductor substrate on a top of the second stacked multiple layer structure by a heat treatment thereby a wafer is grown in successive growth processes; subjecting said wafer to a selective wet etching so that said intermediate layer only is selectively etched to separate said first and second stacked multiple layer structures from one another; and forming surface emitting laser arrays and photo detector arrays on said first and second semiconductor substrates respectively.
Claim 3
Dependent Claim
64 words
The method as claimed in claim 1, wherein said surface emitting lasers aligned in the two dimensional arrays shows a laser emission in different wavelengths to each other and said photo detectors aligned in the two dimensional arrays shows a laser detection in different wavelengths to each other, while each pair of surface emission laser and photo detector has the complete correspondent resonant wavelength.
Claim 4
Dependent Claim
18 words
The method as claimed in claim 1, wherein said heat treatment is carried out in H 2 atmosphere.
Claim 5
Dependent Claim
17 words
The method as claimed in claim 1, wherein said heat treatment is carried out at 500° C.
Claim 6
Dependent Claim
20 words
The method as claimed in claim 1, wherein said wet etching is carried out by use of 50% buffered HF.
Claim 7
Dependent Claim
15 words
The method as claimed in claim 1, wherein said intermediate layer is made of AlAs.
Claim 8
Dependent Claim
92 words
The method as claimed in claim 1, wherein said first stacked multiple layer structure is fabricated by the steps comprising: growing a bottom distributed Bragg reflector comprising a plurality of periods of alternate AlAs/GaAs layers doped with a dopant of a first conductivity type; growing an active layer made of In 0 .2 Ga 0 .8 As on said bottom distributed Bragg reflector; and growing a top distributed Bragg reflector comprising a plurality of periods of alternate AlAs/GaAs layers doped with a dopant of a second conductivity type on said active layer.
Claim 9
Dependent Claim
92 words
The method as claimed in claim 7, wherein said second stacked multiple layer structure is fabricated by the steps comprising: growing a bottom distributed Bragg reflector comprising a plurality of periods of alternate AlAs/GaAs layers doped with a dopant of said second conductivity type; growing an absorption layer made of In 0 .2 Ga 0 .8 As on said bottom distributed Bragg reflector; and growing a top distributed Bragg reflector comprising a plurality of periods of alternate AlAs/GaAs layers doped with a dopant of said first conductivity type on said active layer.
Claim 10
Dependent Claim
34 words
The method as claimed in claim 8, further comprising the step of: forming a cover layer on said top distributed Bragg reflector; and removing said cover layer for subsequent adhesion of said second substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-06-18 | 1999-12-18 | 2000-06-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-06-18 | 2003-12-18 | 2004-06-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-06-18 | 2007-12-18 | 2008-06-18 | $7700.00 | Window Closed / Lapsed |