Scanner system

Claim 2

A scanner system comprising: a scanning member arranged opposite a sample; scanning means having a free end displaceable at least in X and Y directions and supporting one of the scanning member and sample on that free end, and a measurement point set on the free end side, the scanning means having a voltage-displacement nonlinear characteristic; means for applying voltages to the scanning means and for displacing one of the scanning member and sample on the free end of the scanning means relative to the other in the X and Y directions; optical displacement detecting means for enabling displacements of the measurement point which correspond to the X and Y direction displacements at the free end of the scanning means to be optically detected after a light beam has been incident on the measurement point via the scanning means and for producing displacement signals corresponding to these displacements; and correction signal supplying means for computing correction signals based on the displacement signals so as to apply voltages which correct the voltage-displacement nonlinear characteristic of the scanning means to the scanning means and for supplying them to the voltage applying means.

Claim 3

The scanner system according to claim 1, wherein the optical displacement detecting means has means for detecting displacements of substantially circular arcs with one point of the fixed end side of the measurement point as a center, the displacements of circular arcs corresponding to the X and Y displacements of the free end of the scanning means.

Claim 4

The scanner system according to claim 2, wherein: the scanning means includes a tube scanner having an XY direction displaceable free end and a fixed end and support means having a first surface for supporting one of the sample and scanning member and a second surface confronting the fixed end of the tube scanner and tiltable at tilt angles corresponding to the X and Y direction displacements on the free end of the tube scanner; the optical displacement detecting means includes a reflection mirror having the set measuring point and a reflection surface confronting the fixed end of the tube scanner and fixed to a second surface of the support means, means for enabling a light beam to be incident on the reflection surface of the reflection mirror through the tube scanner, and photodetector means for receiving a light beam reflected from the reflection surface and for outputting displacement signals corresponding to the tilt angles on the basis of a variation in a displacement amount of the reflected light beam; and the correction signal supplying means has computing means for computing the displacement signals corresponding to the tilt angles to obtain X and Y signals corresponding to the X and Y direction displacements at the free end of the tube scanner, and scan control means for applying to the tube scanner, voltages which correct the voltage-displacement nonlinear characteristic based on the X and Y signals.

Claim 5

The scanner system according to claim 3, wherein the photodetector means includes divided light receiving means, having a plurality of light receiving areas, for outputting displacement signals corresponding to the tilt angles by comparing those associated amounts of light beams at the light receiving areas.

Claim 6

The scanner system according to claim 3, wherein the optical displacement detecting means further includes a collimator optical member, disposed within the tube scanner, for allowing the light beam which passes through the tube scanner to be incident on the reflection surface of the reflection mirror.

Claim 7

The scanner system according to claim 3, further comprising: light dividing means for dividing the light beam reflected from the reflection surface into two directions; and second photodetector means for receiving the divided light beams so as to output displacement signals, including Z direction displacement signals of the scanning means, in accordance with the change of associated amounts of the light beams.

Claim 8

The scanner system according to claim 6, wherein the second photodetector means includes divided light receiving means, having a plurality of light receiving areas, for outputting the displacement signals of the measurement point, including the Z direction displacement signals of the scanning means, by comparing associated amounts of light beams received at the light receiving areas.

Claim 9

A scanner system according to claim 7, which further includes a critical angle prism means that directs at least one of the divided light beams to the photodetector means.

Claim 10

The scanner system according to claim 1, wherein the scanning member has a probe.

Claim 11

A scanner system according to claim 1, wherein said scanning member includes a probe, and further comprising: probe displacement detecting means for detecting a Z direction displacement of the probe caused by interaction between the probe and the sample; feedback control means for feedback controlling the scanning means in said Z direction in accordance with displacement signals output from the probe displacement detecting means; and sensing means for sensing displacement of the measurement point, including the Z direction displacement of the free end of the scanning means, so as to output displacement signals of the measurement point.

Claim 12

The scanner system according to claim 10, wherein the sensing means optically senses displacement of the measuring point and includes divided light receiving means, having a plurality of light receiving areas, for outputting the displacement signals of the measurement point, including the Z direction displacement signals of the free end of the scanning means, by comparing associated amounts of light beams received at the light receiving areas.

Claim 13

The scanner system according to claim 1, further comprising sensing means for optically sensing displacement of the measurement point, including a Z direction displacement of the free end of the scanning means, so as to output displacement signals of the measuring point.

Claim 14

The scanner system according to claim 12, wherein the sensing means includes divided light receiving means, having a plurality of light receiving areas, for outputting the displacement signals of the measurement point, including the Z direction displacement of the free end of the scanning means, by comparing associated amounts of light beams at the light receiving areas.

Claim 15

A scanner system comprising: a scanning member arranged opposite a sample; scanning means having a free end displaceable at least in X and Y directions and supporting one of the scanning member and sample on that free end, and a measurement point set on the free end side, the scanning means having a voltage-displacement non-linear characteristic; means for applying voltages to the scanning means and for displacing one of the scanning member and sample on the free end of the scanning means relative to the other in the X and Y directions; optical displacement detecting means for enabling displacements of the measurement point which correspond to the X and Y direction displacements at the free end of the scanning means to be optically detected after a light beam has been incident on the measurement point and for producing displacement signals corresponding to these displacements; and correction signal supplying means for computing correction signals based on the displacement signals so as to apply voltages which correct the voltage displacement non-linear characteristic of the scanning means to the scanning means and for supplying them to the voltage applying means.

Claim 16

A scanner system comprising: a scanning member arranged opposite a sample; scanning means having a free end displaceable at least in X and Y directions and supporting one of the scanning member and sample on that free end, and a measurement point set on the free end side, the scanning means having a voltage-displacement non-linear characteristic; means for applying voltages to the scanning means and for displacing one of the scanning member and sample on the free end of the scanning means relative to the other in the X and Y directions; optical displacement detecting means for enabling displacements of the measurement point which correspond to the X and Y direction displacements at the free end of the scanning means to be optically detected after a light beam has been incident on the measurement point and for producing displacement signals corresponding to these displacements; and correction signal supplying means for computing correction signals based on the displacement signals so as to apply voltages which correct the voltage displacement non-linear characteristic of the scanning means to the scanning means and for supplying them to the voltage applying means.

Claim 17

The scanner system according to claim 14, wherein the optical displacement detecting means has means for detecting displacements of substantially circular arcs with one point of the fixed end side of the measurement point as a center, the displacements of circular arcs corresponding to the X and Y displacements of the free end of the scanning means.

Claim 18

The scanner system according to claim 15, wherein: the scanning means includes a tube scanner having an XY direction displaceable free end and a fixed end and support means having a first surface for supporting one of the sample and scanning member and a second surface confronting the fixed end of the tube scanner and tiltable at tilt angles corresponding to the X and Y direction displacements on the free end of the tube scanner; the optical displacement detecting means includes a reflection mirror having the set measuring point and a reflection surface confronting the fixed end of the tube scanner and fixed to a second surface of the support means, means for enabling a light beam to be incident on the reflection surface of the reflection mirror through the tube scanner, and photodetector means for receiving a light beam reflected from the reflection surface and for outputting displacement signals corresponding to the tilt angles on the basis of a variation in a displacement amount of the reflected light beam; and the correction signal supplying means has computing means for computing the displacement signals corresponding to the tilt angles to obtain X and Y signals corresponding to the X and Y direction displacements at the free end of the tube scanner, and scan control means for applying, to the tube scanner, voltages which correct the voltage-displacement non-linear characteristic based on the X and Y signals.

Claim 19

The scanner system according to claim 16, wherein the photodetector means includes divided light receiving means, having a plurality of light receiving areas, for outputting displacement signals corresponding to the tilt angles by comparing those associated amounts of light beams at the light receiving areas.

Claim 20

The scanner system according to claim 16, wherein the optical displacement detecting means further includes a collimator optical member, disposed within the tube scanner, for allowing the light beam which passes through the tube scanner to be incident on the reflection surface of the reflection mirror.

Claim 21

The scanner system according to claim 16, further comprising: light dividing means for dividing the light beam reflected from the reflection surface into two directions; and second photodetector means for receiving the divided light beams so as to output displacement signals, including Z direction displacement signals of the scanning means, in accordance with the change of associated amounts of the light beams.

Claim 22

The scanner system according to claim 19, wherein the second photodetector means includes divided light receiving means, having a plurality of light receiving areas, for outputting the displacement signals of the measurement point, including the Z direction displacement signals of the scanning means, by comparing associated amounts of light beams received at the light receiving areas.

Claim 23

A scanning system according to claim 20, which further includes a critical angle prism means which directs at least one of the divided light to the photodetector means.

Claim 24

A scanner system according to claim 14, wherein said scanning member includes a probe, and further comprising: probe displacement detecting means for detecting a Z direction displacement of the probe caused by interaction between the probe and the sample; feedback control means for feedback controlling the scanning means in said Z direction in accordance with displacement signals output from the probe displacement detecting means; and sensing means for sensing displacement of the measurement point, including the Z direction displacement of the free end of the scanning means, so as to output displacement signals of the measurement point.

Claim 25

The scanner system according to claim 22, wherein the sensing means optically senses displacement of the measuring point and includes divided light receiving means, having a plurality of light receiving means, for outputting the displacement signals of the measurement point, including the Z direction displacement signals of the free end of the scanning means, by comparing associated amounts of light beams received at the light receiving areas.

Claim 26

The scanner system according to claim 14, further comprising sensing means for optically sensing displacement of the measurement point, including a Z direction displacement of the free end of the scanning means, so as to output displacement signals of the measuring point.

Claim 27

The scanner system according to claim 24, wherein the sensing means includes divided light receiving means, having a plurality of light receiving areas, for outputting the displacement signals of the measurement point, including the Z direction displacement of the free end of the scanning means, by comparing associated amounts of light beams at the light receiving areas.