US5525190A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optical light pipe and microwave waveguide interconnects in multichip modules formed using adaptive lithography
Assignee: Lockheed Martin Corp
•
Filing: 1995-03-22
•
Granted: 1996-06-11
•
Expires: 2015-03-22
Abstract
Abstract HDI fabrication techniques are employed to form a variety of optical waveguide structures in polymer materials. Adaptive optical connections are formed, taking into account the actual position and orientation of devices which may deviate from the ideal. Structures include solid light-conducting structures, hollow light-conducting structures which are also suitable for conducting cooling fluid, and optical switching devices employing liquid crystal material. A "shrink back" method may be used to form a tunnel in polymer material which is then filled with an uncured polymer material that shrinks upon curing.
Inventors
- 👤 Robert J. Wojnarowski
- 👤 Herbert S. Cole
- 👤 John L. Henkes
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 10:32
CPC Classifications
B; B29; B29D; B29D11/00; B29D11/00663; B29D11/00701; G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/1221; G02B6/13; G02B6/24; G02B6/42; G02B6/4201; G02B6/4204; G02B6/421; G02B6/43; G02B2006/12166; G02B2006/12173; G02B2006/12176; H; H10; H10W; H10W70/00; H10W70/60; H10W70/67; H10W70/68; H10W70/682; H10W72/00; H10W72/851; H10W72/874; H10W72/90; H10W72/941; H10W72/9413
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
73 words
A method for forming a hollow waveguide, said method comprising the steps of: providing a body of polymer material having a surface; forming a groove in the surface of said polymer material; applying a layer of reflective material to surfaces within the groove; and thereafter applying a cover layer of polymer material including a reflective material surface layer facing the groove over the surface of the body so as to cover the groove.
Claim 2
Independent Claim
73 words
A method for forming a hollow waveguide, said method comprising the steps of: providing a body of polymer material having a surface; forming a groove in the surface of said polymer material; applying a layer of reflective material to surfaces within the groove; and thereafter applying a cover layer of polymer material including a reflective material surface layer facing the groove over the surface of the body so as to cover the groove.
Claim 3
Dependent Claim
38 words
The method in accordance with claim 1, which further comprises, after the step of applying a cover layer, depositing additional reflective material on surfaces within the covered groove to fill any voids in the layers of reflective material.
Claim 4
Dependent Claim
27 words
The method in accordance with claim 2, wherein the step of depositing additional reflective material within the covered groove comprises chemical vapor depositing said additional reflective material.
Claim 5
Dependent Claim
14 words
The method in accordance with claim 3, wherein said polymer material comprises a polyimide.
Claim 6
Dependent Claim
22 words
The method in accordance with claim 3, wherein the step of forming a groove in the surface comprises laser-ablating the polymer material.
Claim 7
Dependent Claim
55 words
The method in accordance with claim 3, wherein the step of forming a groove in the surface of said polymer material comprises: depositing a metal mask layer on said surface; forming an opening in the metal mask layer to define the location of said groove, and selectively etching said polymer material to form the groove.
Claim 8
Dependent Claim
21 words
The method in accordance with claim 3, wherein the step of forming a groove in the surface comprises hot tool pressing.
Claim 9
Dependent Claim
33 words
The method in accordance with claim 1, wherein the step of applying a reflective material to surfaces within the groove comprises metallizing said surfaces within the groove and photolithographically patterning the metallized surfaces.
Claim 10
Independent Claim
67 words
A method for forming a hollow waveguide, said method comprising the steps of: providing a body of polymer material having a surface; forming a groove in the surface of said polymer material; applying a cover layer of polymer material over the surface of said polymer material to form a cover for the groove; and thereafter forming a layer of reflective material on surfaces within the covered groove.
Claim 11
Independent Claim
67 words
A method for forming a hollow waveguide, said method comprising the steps of: providing a body of polymer material having a surface; forming a groove in the surface of said polymer material; applying a cover layer of polymer material over the surface of said polymer material to form a cover for the groove; and thereafter forming a layer of reflective material on surfaces within the covered groove.
Claim 12
Dependent Claim
37 words
The method in accordance with claim 9, wherein the step of forming a layer of reflective material on surfaces within the covered groove comprises chemical vapor depositing said reflective material on said surfaces within the covered groove.
Claim 13
Dependent Claim
15 words
The method in accordance with claim 9, wherein said layer of reflective material comprises metal.
Claim 14
Dependent Claim
15 words
The method in accordance with claim 11, wherein said layer of reflective material comprises gold.
Claim 15
Dependent Claim
17 words
The method in accordance with claim 9, wherein said body of polymer material comprises a polyimide layer.
Claim 16
Dependent Claim
26 words
The method in accordance with claim 9, wherein the step of forming a groove in the surface of said polymer material comprises laser-ablating the polymer material.
Claim 17
Dependent Claim
55 words
The method in accordance with claim 9, wherein the step of forming a groove in the surface of said polymer material comprises: depositing a metal mask layer on the surface; forming an opening in the metal mask layer to define the location of the groove; and selectively etching said polymer material to form the groove.
Claim 18
Dependent Claim
25 words
The method in accordance with claim 9, wherein the step of forming a groove in the surface of said polymer material comprises hot tool pressing.
Claim 19
Dependent Claim
16 words
An optical transmission structure comprising a hollow microtunnel formed in polymer material for conducting cooling fluid.
Claim 20
Dependent Claim
16 words
An optical transmission structure comprising a hollow microtunnel formed in polymer material for conducting cooling fluid.
Claim 21
Dependent Claim
16 words
The optical transmission structure of claim 17 and further comprising a light-reflective liner lining said microtunnel.
Claim 22
Dependent Claim
19 words
The optical transmission structure in accordance with claim 18, wherein said light reflective liner further comprises a metallic liner.
Claim 23
Dependent Claim
32 words
A hybrid transmission structure comprising: a polymer material having a hollow microtunnel formed therein; and at least one liner of light transmissive material within said hollow microtunnel, said liner lining said microtunnel.
Claim 24
Dependent Claim
32 words
A hybrid transmission structure comprising: a polymer material having a hollow microtunnel formed therein; and at least one liner of light transmissive material within said hollow microtunnel, said liner lining said microtunnel.
References Cited (Backward Citations)
US4317699A
Cited
US5271801A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-06-11 | 1999-12-11 | 2000-06-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-06-11 | 2003-12-11 | 2004-06-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-06-11 | 2007-12-11 | 2008-06-11 | $7700.00 | Window Closed / Lapsed |