US5520743A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Processing apparatus with means for rotating an object mounting means and a disk body located in the mounting means differently relative to each other
Assignee: Tokyo Electron Ltd
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Filing: 1993-08-31
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Granted: 1996-05-28
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Expires: 2013-08-31
Abstract
Abstract There are provided a treatment chamber for removing natural oxide films formed on the surface and the underside of an object to be treated, e.g., a semiconductor wafer, in treating gas ambient atmosphere, holding member for holding the object to be treated in the treatment chamber, and a mounting member with, e.g., pins erected thereon, and a disk body disposed inside the mounting member. The mounting member and the disk body are rotated relatively to each other. The relative rotation of the mounting member and the disk body generates flows of the treating gas, so that the natural oxide films are homogeneously removed from the entire surface and underside of the object to be treated.
Inventors
- 👤 Nobuaki Takahashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:23
CPC Classifications
H; H10; H10P; H10P95/00; H10P72/00; H10P72/30; H10P72/33; H10P72/3308; C; C23; C23C; C23C16/00; C23C16/02; C23C16/0227; C23C16/0236; H10P72/04; H10P72/0441; H10P72/0451; H10P72/0452; H10P72/0454; H10P72/0462; H10P72/3312; H10P72/70; H10P72/76; H10P72/7604; H10P72/7608; H10P72/7626
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
95 words
A processing apparatus comprising: means defining a treatment chamber for use in treating an object to be treated in an ambient atmosphere of treating gas; mounting means, the mounting means being provided with holding means for holding the object to be treated in the treatment chamber; a disk body disposed inside the mounting means; and rotating means; the rotating means including means for rotating the mounting means while prohibiting rotation of the disk body, whereby both an upper surface and an underside surface of the object to be treated are treated at the same time.
Claim 2
Dependent Claim
95 words
A processing apparatus comprising: means defining a treatment chamber for use in treating an object to be treated in an ambient atmosphere of treating gas; mounting means, the mounting means being provided with holding means for holding the object to be treated in the treatment chamber; a disk body disposed inside the mounting means; and rotating means; the rotating means including means for rotating the mounting means while prohibiting rotation of the disk body, whereby both an upper surface and an underside surface of the object to be treated are treated at the same time.
Claim 3
Dependent Claim
92 words
A processing apparatus comprising: means defining a treatment chamber for use in treating an object to be treated in an ambient atmosphere of treating gas; mounting means, the mounting means being provided with holding means for holding the object to be treated in the treatment chamber; a disk body disposed inside the mounting means; and rotating means for rotating the mounting means and the disk body differently relative to each other, whereby both an upper surface and an underside surface of the object to be treated are treated at the same time.
Claim 4
Dependent Claim
92 words
A processing apparatus comprising: means defining a treatment chamber for use in treating an object to be treated in an ambient atmosphere of treating gas; mounting means, the mounting means being provided with holding means for holding the object to be treated in the treatment chamber; a disk body disposed inside the mounting means; and rotating means for rotating the mounting means and the disk body differently relative to each other, whereby both an upper surface and an underside surface of the object to be treated are treated at the same time.
Claim 5
Dependent Claim
34 words
The processing apparatus according to claim 2, wherein the rotating means includes means for rotating the mounting means clockwise; and means for rotating the disk body counter-clockwise synchronously with rotation of the mounting means.
Claim 6
Dependent Claim
38 words
The processing apparatus according to claim 2, wherein the rotating means includes means for rotating the mounting means clockwise; and means for rotating the disk body clockwise at a rotation rate different from that of the mounting means.
Claim 7
Dependent Claim
22 words
The processing apparatus according to claim 2, further comprising at least one rectifier disposed on an upper surface of the disk body.
Claim 8
Dependent Claim
14 words
The processing apparatus according to claim 5, wherein the rectifiers are formed of projections.
Claim 9
Dependent Claim
14 words
The processing apparatus according to claim 5, wherein the rectifiers are formed of grooves.
Claim 10
Dependent Claim
17 words
The processing apparatus according to claim 2, wherein the object to be treated is a semiconductor wafer.
Claim 11
Dependent Claim
15 words
The processing apparatus according to claim 2, wherein the treating gas is hydrogen fluoride vapor.
Claim 12
Dependent Claim
30 words
The processing apparatus according to claim 2, wherein the treating is for removing natural oxide films from the upper surface and the underside surface of the object to be treated.
Claim 13
Dependent Claim
17 words
The processing apparatus according to claim 2, wherein the processing apparatus is connected to a CVD apparatus.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-05-28 | 1999-11-27 | 2000-05-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-05-28 | 2003-11-27 | 2004-05-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-05-28 | 2007-11-27 | 2008-05-28 | $7700.00 | Window Closed / Lapsed |