Field effect transistor

Claim 2

A field effect transistor comprising: a semiconductor substrate having at least an upper face; a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer; a source electrode formed on said semiconductor layered structure; a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance; and a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode, wherein said channel layer includes: a first channel region positioned directly under the whole of said source electrode; a second channel region positioned directly under the whole of said drain electrode; a third channel region which is adjacent to all of a side of said first channel region and which is not positioned directly under any one of said gate electrode, said source electrode, and said drain electrode; a fourth channel region which is adjacent to all of a side of said second channel region and which is not positioned directly under any one of said gate electrode, said source electrode, and said drain electrode; and a plurality of stripe-like middle channel regions for connecting said third channel region to said fourth channel region.

Claim 3

A field effect transistor according to claim 1, wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses, wherein said plurality of recesses are positioned between said third channel region and said fourth channel region, and wherein each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions.

Claim 4

A field effect transistor according to claim 2, wherein said semiconductor layered structure includes said channel layer to which no impurity is doped, and an electron supplying layer formed on said channel layer.

Claim 5

A field effect transistor comprising: a semiconductor substrate having at least an upper face; a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer; a source electrode formed on said semiconductor layered structure; a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance; and a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode, wherein said channel layer includes: a first channel region connected to said source electrode; a second channel region connected to said drain electrode; and a plurality of stripe-like middle channel regions for connecting said first channel region to said second channel region, wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses, wherein said plurality of recesses are positioned between said first channel region and said second channel region, and wherein each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions, and wherein said semiconductor layered structure includes a p-type semiconductor layer formed under said channel layer, said channel layer is made of an n-type semiconductor to form a depletion layer therein by the contact of said channel layer with said p-type semiconductor layer, and said channel layer being an uppermost layer of said semiconductor layered structure to form another depletion layer therein by the contact of said channel layer with said gate electrode.

Claim 6

A field effect transistor comprising: a semiconductor substrate having at least an upper face; a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer; a source electrode formed on said semiconductor layered structure; a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance; and a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode, wherein said channel layer includes: a first channel region connected to said source electrode; a second channel region connected to said drain electrode; and a plurality of stripe-like middle channel regions for connecting said first channel region to said second channel region, wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses, wherein said plurality of recesses are positioned between said first channel region and said second channel region, and wherein each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions, and wherein said semiconductor layered structure includes a p-type semiconductor layer formed under said channel layer, said channel layer is made of an n-type semiconductor to form a depletion layer therein by the contact of said channel layer with said p-type semiconductor layer, and said channel layer being an uppermost layer of said semiconductor layered structure to form another depletion layer therein by the contact of said channel layer with said gate electrode.

Claim 7

A field effect transistor according to claim 4, further comprising means for applying voltage to said p-type semiconductor layer.

Claim 8

A field effect transistor comprising: a semiconductor substrate having at least an upper face; a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer; a source electrode formed on said semiconductor layered structure; a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance; and a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode, wherein said channel layer includes: a first channel region connected to said source electrode; a second channel region connected to said drain electrode; and a plurality of stripe-like middle channel regions for connecting said first channel region to said second channel region, wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses, wherein said plurality of recesses are positioned between said first channel region and said second channel region, and wherein each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions, and wherein said semiconductor layered structure includes: a first semiconductor layer containing n-type impurities at a first concentration; a channel layer formed on said first semiconductor layer and containing the n-type impurities at a second concentration which is lower than said first concentration, said channel layer having a smaller bandgap than that of said first semiconductor layer; and a second semiconductor layer, formed on said channel layer, containing the n-type impurities at a concentration higher than said second concentration said second semiconductor layer having a larger bandgap than that of said channel layer.

Claim 9

A field effect transistor comprising: a semiconductor substrate having at least an upper face; a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer; a source electrode formed on said semiconductor layered structure; a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance; and a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode, wherein said channel layer includes: a first channel region connected to said source electrode; a second channel region connected to said drain electrode; and a plurality of stripe-like middle channel regions for connecting said first channel region to said second channel region, wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses, wherein said plurality of recesses are positioned between said first channel region and said second channel region, and wherein each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions, and wherein said semiconductor layered structure includes: a first semiconductor layer containing n-type impurities at a first concentration; a channel layer formed on said first semiconductor layer and containing the n-type impurities at a second concentration which is lower than said first concentration, said channel layer having a smaller bandgap than that of said first semiconductor layer; and a second semiconductor layer, formed on said channel layer, containing the n-type impurities at a concentration higher than said second concentration said second semiconductor layer having a larger bandgap than that of said channel layer.

Claim 10

A field effect transistor according to claim 6, further comprising means for applying voltage to said first semiconductor layer.

Claim 11

A field effect transistor comprising: a semiconductor substrate having at least an upper face; a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer; a source electrode formed on said semiconductor layered structure; a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance: and a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode, wherein said channel layer includes: a first channel region connected to said source electrode; a second channel region connected to said drain electrode; and a plurality of stripe-like middle channel regions for connecting said first channel region to said second channel region, wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses, wherein said plurality of recesses are positioned between said first channel region and said second channel region, and wherein each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions, wherein said semiconductor layered structure includes: a first semiconductor layer to which n-type impurities are added at a high concentration; a channel layer, formed on said first semiconductor layer, to which the n-type impurities are added at a concentration lower than that of said first semiconductor layer, said channel layer having a smaller bandgap than that of said first semiconductor layer; and a second semiconductor layer, formed of said channel layer, to which the n-type impurities are added at a concentration higher than that of said channel layer, said second semiconductor layer having a larger bandgap than that of said channel layer, and wherein said stripe-like ridges each have grooves at side faces thereof, said grooves being formed by removing part of said channel layer.

Claim 12

A field effect transistor comprising: a semiconductor substrate having at least an upper face; a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer; a source electrode formed on said semiconductor layered structure; a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance: and a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode, wherein said channel layer includes: a first channel region connected to said source electrode; a second channel region connected to said drain electrode; and a plurality of stripe-like middle channel regions for connecting said first channel region to said second channel region, wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses, wherein said plurality of recesses are positioned between said first channel region and said second channel region, and wherein each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions, wherein said semiconductor layered structure includes: a first semiconductor layer to which n-type impurities are added at a high concentration; a channel layer, formed on said first semiconductor layer, to which the n-type impurities are added at a concentration lower than that of said first semiconductor layer, said channel layer having a smaller bandgap than that of said first semiconductor layer; and a second semiconductor layer, formed of said channel layer, to which the n-type impurities are added at a concentration higher than that of said channel layer, said second semiconductor layer having a larger bandgap than that of said channel layer, and wherein said stripe-like ridges each have grooves at side faces thereof, said grooves being formed by removing part of said channel layer.

Claim 13

A field effect transistor comprising: a semiconductor substrate having at least an upper face; a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer; a source electrode formed on said semiconductor layered structure; a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance; and a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode, wherein said channel layer includes: a first channel region connected to said source electrode; a second channel region connected to said drain electrode; and a plurality of stripe-like middle channel regions for connecting said first channel region to said second region, wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of strip-like ridges interposed between said plurality of recesses, wherein said plurality of recesses are positioned between said first channel region and said second channel region, and wherein each of said stripe-like ridges includes a corresponding one of said plurality of stripes-like middle channel regions, wherein said semiconductor layered structure includes said channel layer to which no impurity is doped, and an electron supplying layer formed on said channel layer, and wherein said stripe-like ridges each have grooves at side faces thereof, said grooves being formed by removing part of said electron supplying layer.

Claim 14

A field effect transistor comprising: a semiconductor substrate having at least an upper face; a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer; a source electrode formed on said semiconductor layered structure; a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance; and a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode, wherein said channel layer includes: a first channel region connected to said source electrode; a second channel region connected to said drain electrode; and a plurality of stripe-like middle channel regions for connecting said first channel region to said second region, wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of strip-like ridges interposed between said plurality of recesses, wherein said plurality of recesses are positioned between said first channel region and said second channel region, and wherein each of said stripe-like ridges includes a corresponding one of said plurality of stripes-like middle channel regions, wherein said semiconductor layered structure includes said channel layer to which no impurity is doped, and an electron supplying layer formed on said channel layer, and wherein said stripe-like ridges each have grooves at side faces thereof, said grooves being formed by removing part of said electron supplying layer.

Claim 15

A field effect transistor comprising: a semiconductor substrate having at least an upper face; a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer; a source electrode formed on said semiconductor layered structure; and a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by prescribed distance, wherein said channel layer includes: a first channel region connected to said source electrode; a second channel region connected to said drain electrode; and a plurality of stripe-like middle channel regions for connecting said first channel region to said second channel region, wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses, wherein said plurality of recesses are positioned between said first channel region and said second channel region, wherein each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions, and wherein said field effect transistor comprises a first gate electrode and a second gate electrode which are each formed on respective top and side faces of said plurality of stripe-like ridges and respective portions of said plurality of recesses, said first and second electrodes extending along said second direction and separated from each other in said first direction.

Claim 16

A field effect transistor comprising: a semiconductor substrate having at least an upper face; a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer; a source electrode formed on said semiconductor layered structure; and a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by prescribed distance, wherein said channel layer includes: a first channel region connected to said source electrode; a second channel region connected to said drain electrode; and a plurality of stripe-like middle channel regions for connecting said first channel region to said second channel region, wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses, wherein said plurality of recesses are positioned between said first channel region and said second channel region, wherein each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions, and wherein said field effect transistor comprises a first gate electrode and a second gate electrode which are each formed on respective top and side faces of said plurality of stripe-like ridges and respective portions of said plurality of recesses, said first and second electrodes extending along said second direction and separated from each other in said first direction.

Claim 17

A field affect transistor according to claim 6, wherein said channel layer is made of InGaAs semiconductor, and said first semiconductor layer and said second semiconductor layer are made of AlGaAs semiconductor.

Claim 18

A field effect transistor comprising: a semiconductor substrate having at least an upper face; a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer and an electron supplying layer formed on said channel layer, said channel layer substantially containing no impurity; a source electrode formed on said semiconductor layered structure; a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance; and a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode, wherein said channel layer includes: a first channel region connected to said source electrode; a second channel region connected to said drain electrode; and a plurality of stripe-like middle channel regions for connecting said first channel region to said second channel region, wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses, said plurality of recesses are positioned between said first channel region and said second channel region, and each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions, and wherein said gate electrode includes: a plurality of gate electrode portions formed to cover top faces of said plurality of stripe-like ridges, respectively; and an interconnection formed on said plurality of gate electrode portions and over said plurality of recesses.

Claim 19

A field effect transistor comprising: a semiconductor substrate having at least an upper face; a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer and an electron supplying layer formed on said channel layer, said channel layer substantially containing no impurity; a source electrode formed on said semiconductor layered structure; a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance; and a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode, wherein said channel layer includes: a first channel region connected to said source electrode; a second channel region connected to said drain electrode; and a plurality of stripe-like middle channel regions for connecting said first channel region to said second channel region, wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses, said plurality of recesses are positioned between said first channel region and said second channel region, and each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions, and wherein said gate electrode includes: a plurality of gate electrode portions formed to cover top faces of said plurality of stripe-like ridges, respectively; and an interconnection formed on said plurality of gate electrode portions and over said plurality of recesses.

Claim 20

A field effect transistor according to claim 12, wherein said plurality of recesses are filled with a silicon oxide film.

Claim 21

A field effect transistor according to claim 12, wherein each of said plurality of recesses provides a vacant portion below said interconnection.

Claim 22

A field effect transistor comprising: a semiconductor substrate having at least an upper face; a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer; a source electrode formed on said semiconductor layered structure; a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance; and a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode, wherein said channel layer includes: a first channel region connected to said source electrode; a second channel region connected to said drain electrode; and a plurality of stripe-like middle channel regions for connecting said first channel region to said second channel region, wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses, wherein said plurality of recesses are positioned between said first channel region and said second channel region, wherein each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions, wherein said semiconductor layered structure includes said channel layer to which no impurity is doped, and an electron supplying layer formed on said channel layer, and wherein said gate electrode includes: a plurality of gate electrode portions formed to cover top faces of said plurality of stripe-like ridges, respectively; and an interconnection connecting said plurality of gate electrode portions to each other, wherein said interconnection is comprised of a material having a smaller resistivity than at least a portion of one of said plurality of gate electrode portions.

Claim 23

A field effect transistor comprising: a semiconductor substrate having at least an upper face; a semiconductor layered structure, formed on said upper face of said semiconductor substrate, said semiconductor layered structure including a channel layer; a source electrode formed on said semiconductor layered structure; a drain electrode formed on said semiconductor layered structure at a position apart from said source electrode in a first direction by a prescribed distance; and a gate electrode, formed on said semiconductor layered structure between said source electrode and said drain electrode, wherein said channel layer includes: a first channel region connected to said source electrode; a second channel region connected to said drain electrode; and a plurality of stripe-like middle channel regions for connecting said first channel region to said second channel region, wherein said semiconductor layered structure includes a plurality of recesses arranged in a second direction which is substantially perpendicular to said first direction, and a plurality of stripe-like ridges interposed between said plurality of recesses, wherein said plurality of recesses are positioned between said first channel region and said second channel region, wherein each of said stripe-like ridges includes a corresponding one of said plurality of stripe-like middle channel regions, wherein said semiconductor layered structure includes said channel layer to which no impurity is doped, and an electron supplying layer formed on said channel layer, and wherein said gate electrode includes: a plurality of gate electrode portions formed to cover top faces of said plurality of stripe-like ridges, respectively; and an interconnection connecting said plurality of gate electrode portions to each other, wherein said interconnection is comprised of a material having a smaller resistivity than at least a portion of one of said plurality of gate electrode portions.