US5514850A
Expired / Lapsed
US
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Defect compensation method for smoothing a surface of a transparent plate with an ArF excimer laser beam
Assignee: Sharp Corp
•
Filing: 1993-05-19
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Granted: 1996-05-07
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Expires: 2013-05-19
Abstract
Abstract A defect compensation method for smoothing a surface of a transparent plate by radiating an ArF excimer laser beam to a defect at the surface. The ArF excimer laser beam is radiated by use of a mask having an opening which is shaped in accordance with the shape of the defect, through a lens, or while the size of the beam at the defect is changed to a plurality of values. As the mask, an iris mask having an opening which is larger than the defect is usable. The size of the beam is changed by exchanging, a plurality of masks each having an opening of a different size from one another, or by use of a mask having a plurality of openings of different sizes. Alternatively, the ArF excimer laser beam is radiated so as to have an energy which is high at a center and low at a periphery of the defect. Or, the ArF excimer laser beam has a smaller size than the size of the defect, and the transparent plate having the defect is moved so as to allow different portions of the defect to be irradiated sequentially by the ArF excimer laser beam and simultaneously the number of shots of the ArF excimer laser beam is changed.
Inventors
- 👤 Osamu Miyazaki
- 👤 Kazuya Yoshimura
- 👤 Syunji Nakai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 18:15
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/02; C; C03; C03B; C03B29/00; B23K26/04; B23K26/06; B23K26/064; B23K26/066; B29; B29C; B29C59/00; B29C59/16; B23K2103/00; B23K2103/30; B23K2103/42; B23K2103/50; B29C35/00; B29C35/02; B29C35/08; B29C35/0805; B29C2035/0838; B29K; B29K2995/00; B29K2995/0018; B29K2995/0026; Y; Y02; Y02P; Y02P40/00; Y02P40/50; Y02P40/57
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
26 words
A defect compensation method for smoothing a surface of a synthetic transparent plate by radiating an ArF excimer laser beam to a defect at the surface.
Claim 2
Dependent Claim
26 words
A defect compensation method for smoothing a surface of a synthetic transparent plate by radiating an ArF excimer laser beam to a defect at the surface.
Claim 3
Dependent Claim
44 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 1, wherein the ArF excimer laser beam is radiated by use of a mask having an opening which is shaped in accordance with the shape of the defect.
Claim 4
Dependent Claim
28 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 1, wherein the ArF excimer laser beam is radiated through a lens.
Claim 5
Dependent Claim
41 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 1, wherein the ArF excimer laser beam is radiated while the size of the beam at the defect is changed to a plurality of values.
Claim 6
Dependent Claim
42 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 4, wherein the size of the beam is changed by exchanging a plurality of masks each having an opening of a different size from one another.
Claim 7
Dependent Claim
38 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 4, wherein the size of the beam is changed by use of a mask having a plurality of openings of different sizes.
Claim 8
Dependent Claim
45 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 1, wherein the ArF excimer laser beam is radiated so as to have an energy which is high at a center and low at a periphery of the defect.
Claim 9
Dependent Claim
77 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 1, wherein the ArF excimer laser beam has a smaller size than the size of the defect, and wherein the synthetic transparent plate having the defect is moved so as to allow different portions of the defect to be irradiated sequentially by the ArF excimer laser beam and simultaneously the number of shots of the ArF excimer laser beam is changed.
Claim 10
Dependent Claim
43 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 8, wherein the number of the shots of the beam is changed in accordance with at least one of a depth and a length of the defect.
Claim 11
Dependent Claim
57 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 8, wherein the transparent plate having the defect is moved slowly when a center of the defect is exposed to the ArF excimer laser beam and fast when a periphery of the defect is exposed to the ArF excimer laser beam.
Claim 12
Dependent Claim
60 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 3, wherein the degree of focus of the ArF excimer laser beam is changed and also the synthetic transparent plate having the defect is moved so as to allow different portions of the defect to be irradiated sequentially by the ArF excimer laser beam.
Claim 13
Dependent Claim
68 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 11, wherein the change in the degree of focus and the movement of the synthetic transparent plate having the defect are performed by moving a stage having the synthetic transparent plate thereon in a direction substantially parallel to the radiation of the ArF excimer laser beam and a direction crossing the radiation.
Claim 14
Dependent Claim
40 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 1, wherein the ArF excimer laser beam is radiated by use of an iris mask having an opening which is larger than the defect.
Claim 15
Dependent Claim
39 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 13, wherein a diameter of the opening of the iris mask is sequentially changed during the radiation of the ArF excimer laser beam.
Claim 16
Dependent Claim
42 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 1, wherein the ArF excimer laser beam is radiated in the state where the surface of the synthetic transparent plate is masked except for the defect.
Claim 17
Dependent Claim
26 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 1, wherein the synthetic transparent plate is formed of glass.
Claim 18
Dependent Claim
30 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 1, wherein the synthetic transparent plate is a display plane of a display apparatus.
Claim 19
Dependent Claim
29 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 1, wherein the transparent plate is formed of a glass or a resin.
Claim 20
Dependent Claim
24 words
A defect compensation method for smoothing a surface of a synthetic transparent plate according to claim 1, wherein the transparent plate is essentially flat.
Claim 21
Dependent Claim
22 words
A defect compensation method according to claim 1, wherein the defect is a concave defect on the surface of the transparent plate.
Claim 22
Dependent Claim
22 words
A defect compensation method according to claim 1, wherein the synthetic transparent plate is a display plane of a liquid crystal display.
Claim 23
Dependent Claim
19 words
A defect compensation method according to claim 1, wherein the radiated surface is smooth with essentially no microscopic roughness.
Claim 24
Dependent Claim
32 words
A defect compensation method according to claim 22, wherein the light transmitting property of the transparent plate is not reduced as a result of the radiating by the ArF excimer laser beam.
Claim 25
Dependent Claim
33 words
A defect compensation method for smoothing a surface of a synthetic transparent plate formed of a glass or a resin by radiating an ArF excimer laser beam to a defect at the surface.
Claim 26
Dependent Claim
33 words
A defect compensation method for smoothing a surface of a synthetic transparent plate formed of a glass or a resin by radiating an ArF excimer laser beam to a defect at the surface.
Claim 27
Dependent Claim
51 words
A defect compensation method for smoothing a surface of a synthetic transparent plate by radiating an ArF excimer laser beam to a defect at the surface, wherein the ArF excimer laser beam is radiated in the state where the surface of the synthetic transparent plate is masked except for the defect.
Claim 28
Dependent Claim
51 words
A defect compensation method for smoothing a surface of a synthetic transparent plate by radiating an ArF excimer laser beam to a defect at the surface, wherein the ArF excimer laser beam is radiated in the state where the surface of the synthetic transparent plate is masked except for the defect.
References Cited (Backward Citations)
US4338114A
Cited
US4444801A
Cited
US4729372A
Cited
US4478677A
Cited
US4609566A
Cited
EP0224322A1
Cited
US4861964A
Cited
US4911711A
Cited
EP0346116A2
Cited
US5017755A
Cited
US4980534A
Cited
US4871415A
Cited
DE4018135A1
Cited
US5142386A
Cited
JPH03126913A
Cited
US5091626A
Cited
US5121236A
Cited
US5280374A
Cited
US5175504A
Cited
US5313043A
Cited
US5365034A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-05-07 | 1999-11-06 | 2000-05-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-05-07 | 2003-11-06 | 2004-05-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-05-07 | 2007-11-06 | 2008-05-07 | $7700.00 | Window Closed / Lapsed |